He kupu whakataki ki te hangarau whakatakoto kiriata angiangi mō te kohu matū (CVD)

Ko te Whakatakotoranga Kohu Matū (CVD) he hangarau whakatakoto kiriata angiangi nui, e whakamahia whānuitia ana hei whakarite i ngā kiriata mahi me ngā rauemi paparanga-angiangi, ā, e whakamahia whānuitia ana i roto i te hanga haurua-haurua me ētahi atu mara.

1. Te kaupapa mahi o te CVD

I roto i te tukanga CVD, ka whakapā atu he matū mua hau (kotahi, neke atu rānei ngā matū mua hau) ki te mata o te papa, ā, ka whakamahanatia ki tētahi pāmahana hei whakaoho i te tauhohenga matū me te whakatakoto ki te mata o te papa hei hanga i te kiriata, i te paparanga paninga rānei e hiahiatia ana. Ko te hua o tēnei tauhohenga matū he totoka, he matū o te rauemi e hiahiatia ana. Mena kei te hiahia tātou ki te piri i te silicon ki tētahi mata, ka taea e tātou te whakamahi i te trichlorosilane (SiHCl3) hei hau mua: SiHCl3 → Si + Cl2 + HCl Ka herea te silicon ki tētahi mata e kitea ana (i roto, i waho hoki), ko te hau chlorine me te waikawa hydrochloric ka tukuna mai i te ruma.

2. Te whakarōpūtanga o te CVD

CVD Wera: Mā te whakamahana i te hau matūmua hei pirau, ka whakatakoto ki te mata o te papa. CVD Whakarei Plasma (PECVD): Ka tāpirihia te plasma ki te CVD wera hei whakarei ake i te tere tauhohenga me te whakahaere i te tukanga whakatakoto. CVD Waro Konganuku (MOCVD): Mā te whakamahi i ngā matū waro konganuku hei hau matūmua, ka taea te whakarite i ngā kiriata angiangi o ngā konganuku me ngā haurua-ira, ā, he maha ngā wā ka whakamahia i roto i te hanga taputapu pēnei i ngā rama LED.

3. Tono

(1) Te hanga i ngā mea hiko-haurua

Kiriata silica: e whakamahia ana hei whakarite i ngā paparanga ārai, ngā paparanga, ngā paparanga wehe, me ētahi atu. Kiriata nitride: e whakamahia ana hei whakarite i te nitride silicon, te nitride konumohe, me ētahi atu, e whakamahia ana i roto i ngā rama LED, ngā taputapu hiko, me ētahi atu. Kiriata whakarewa: e whakamahia ana hei whakarite i ngā paparanga kawe hiko, ngā paparanga whakarewa, me ētahi atu.

(2) Hangarau whakaatu

Kiriata ITO: Kiriata waikura arataki mārama, e whakamahia whānuitia ana i roto i ngā whakaaturanga papatahi me ngā mata pā. Kiriata parahi: e whakamahia ana hei whakarite i ngā paparanga takai, ngā aho arataki, me ētahi atu, hei whakapai ake i te mahi a ngā taputapu whakaaturanga.

(3) Ētahi atu mara

Paninga whatu: tae atu ki ngā paninga ārai-whakaata, ngā tātari whatu, me ētahi atu. Paninga ārai-waikura: e whakamahia ana i roto i ngā wāhanga motuka, ngā taputapu rererangi, me ētahi atu.

4. Ngā āhuatanga o te tukanga CVD

Whakamahia he taiao pāmahana teitei hei whakatairanga i te tere o te tauhohenga. He tikanga tēnei ka mahia i roto i te taiao korehau. Me tango ngā poke i runga i te mata o te wāhanga i mua i te peita. Tērā pea he herenga kei roto i te tukanga mō ngā papa ka taea te pani, arā, he herenga pāmahana, he herenga tauhohenga rānei. Ka kapi te paninga CVD i ngā wāhi katoa o te wāhanga, tae atu ki ngā miro, ngā kōhao matapo me ngā mata o roto. Tērā pea ka herea te kaha ki te huna i ngā wāhi whainga motuhake. Ka herea te matotoru o te kiriata e ngā āhuatanga o te tukanga me te rauemi. He pai ake te piri.