Selelekela sa theknoloji ea ho boloka filimi e tšesaane ea lik'hemik'hale (CVD)

Ho lahla mouoane ka lik'hemik'hale (CVD) ke theknoloji ea bohlokoa ea ho boloka filimi e tšesaane, e atisang ho sebelisoa ho lokisa lifilimi tse fapaneng tse sebetsang le thepa e nang le lera le lesesaane, 'me e sebelisoa haholo tlhahisong ea li-semiconductor le mafapheng a mang.

1. Molao-motheo oa ho sebetsa oa CVD

Mokgweng wa CVD, selelekela sa kgase (metswako e le nngwe kapa ho feta ya di-precursor tsa kgase) se kopana le bokahodimo ba substrate mme se futhumatswa ho fihlela mochesong o itseng ho baka karabelo ya dikhemikhale mme se behe hodima bokahodimo ba substrate ho etsa lera la filimi kapa sekwahelo se lakatsehang. Sehlahiswa sa karabelo ena ya dikhemikhale ke ntho e tiileng, hangata e leng motsoako wa thepa e lakatsehang. Haeba re batla ho kgomaretsa silicon hodima bokahodimo, re ka sebedisa trichlorosilane (SiHCl3) e le kgase e lekanyetsang pele: SiHCl3 → Si + Cl2 + HCl Silicon e tla tlama hodima bokahodimo bofe kapa bofe bo pepeneneng (ka hare le ka ntle), ha dikgase tsa chlorine le hydrochloric acid di tla ntshwa ka kamoreng.

2. Tlhophiso ea CVD

CVD e futhumetseng: Ka ho futhumatsa khase e etellang pele ho bola le ho e beha holim'a substrate. CVD e Ntlafalitsoeng ke Plasma (PECVD): Plasma e eketsoa ho CVD e futhumetseng ho ntlafatsa sekhahla sa karabelo le ho laola ts'ebetso ea ho beoa. CVD ea Metal Organic (MOCVD): Ho sebelisoa metsoako ea tšepe e phelang e le likhase tse etellang pele, lifilimi tse tšesaane tsa litšepe le li-semiconductor li ka lokisoa, 'me hangata li sebelisoa tlhahisong ea lisebelisoa tse kang li-LED.

3. Kopo

(1) Tlhahiso ea li-semiconductor

Filimi ea silicide: e sebelisetsoa ho lokisa mekhahlelo e sireletsang mocheso, li-substrate, mekhahlelo e itšehlang thajana, jj. Filimi ea nitride: e sebelisetsoa ho lokisa nitride ea silicon, nitride ea aluminium, jj., e sebelisoang ho li-LED, lisebelisoa tsa motlakase, jj. Filimi ea tšepe: e sebelisetsoa ho lokisa mekhahlelo e tsamaisang motlakase, mekhahlelo e entsoeng ka tšepe, jj.

(2) Theknoloji ea ponts'o

Filimi ea ITO: Filimi ea oxide e tsamaisang motlakase e bonaletsang, e sebelisoang hangata lipontšong tse bataletseng le li-skrini tsa ho ama. Filimi ea koporo: e sebelisetsoa ho lokisa mekhahlelo ea liphutheloana, mela e tsamaisang motlakase, jj., ho ntlafatsa ts'ebetso ea lisebelisoa tsa pontšo.

(3) Masimo a mang

Liaparo tsa mahlo: ho kenyeletsoa le liaparo tse thibelang ho bonahatsa, li-filter tsa mahlo, jj. Liaparo tse thibelang ho bola: li sebelisoa likarolong tsa likoloi, lisebelisoa tsa lifofane, jj.

4. Litšobotsi tsa ts'ebetso ea CVD

Sebelisa tikoloho e nang le mocheso o phahameng ho khothaletsa lebelo la karabelo. Hangata e etsoa tikolohong e se nang letho. Litšila tse holim'a karolo li tlameha ho tlosoa pele ho penta. Ts'ebetso e ka 'na ea ba le meeli holim'a li-substrate tse ka koaheloang, ke hore, meeli ea mocheso kapa meeli ea ho sebetsana le lintho. Seaparo sa CVD se tla koahela libaka tsohle tsa karolo, ho kenyeletsoa likhoele, masoba a foufetseng le libaka tse ka hare. Se ka 'na sa fokotsa bokhoni ba ho pata libaka tse itseng tse reretsoeng. Botenya ba filimi bo lekanyelitsoe ke ts'ebetso le maemo a thepa. Ho khomarela ho phahameng.