Gukuraho umwuka w’ubushyuhe mu by’imiti (CVD) ni ikoranabuhanga ry’ingenzi ryo gushyiramo filime nto, rikunze gukoreshwa mu gutegura filime zitandukanye zikora neza n’ibikoresho byo mu rwego rwo hasi, kandi rikoreshwa cyane mu nganda zikora ibikoresho bya semiconductor n’izindi nzego.
1. Ihame ry'imikorere ya CVD
Mu buryo bwa CVD, icyuma gitegura gazi (imwe cyangwa nyinshi zitegura gazi) gishyirwa ku buso bwa substrate hanyuma kigashyuha kugeza ku bushyuhe runaka kugira ngo habeho uburyo bwa chemical reaction hanyuma kigashyirwa ku buso bwa substrate kugira ngo habeho firime cyangwa irangi ryifuzwa. Umusaruro w'ubu buryo bwa chemical reaction ni ikintu gikomeye, akenshi kiba ari ikintu cyifuzwa. Niba dushaka gufata silicon ku buso, dushobora gukoresha trichlorosilane (SiHCl3) nk'umwuka ubanziriza: SiHCl3 → Si + Cl2 + HCl Silicone izafatana n'ubuso ubwo aribwo bwose bwagaragaye (bwo imbere n'ubwo hanze), mu gihe chlorine na aside hydrochloric zizava mu cyumba.
2. Gushyira mu byiciro CVD
CVD ishyushye: Mu gushyushya gazi ibanziriza iyindi kugira ngo ibore kandi iyishyire ku buso bwa substrate. CVD irushaho kwiyongera muri plasma (PECVD): Plasma yongerwa kuri CVD ishyushye kugira ngo yongere umuvuduko w'ibisubizo no kugenzura uburyo bwo kuyishyiramo. CVD ishingiye ku byuma bya Organic (MOCVD): Hakoreshejwe imvange y'ibyuma nk'imyuka ibanziriza iyindi, hashobora gutegurwa uduce duto tw'ibyuma na semiconductors, kandi akenshi bikoreshwa mu gukora ibikoresho nka LED.
3. Gushyira mu bikorwa
(1) Gukora ibikoresho bya semiconductor
Filimi ya silicide: ikoreshwa mu gutegura ibice bikingira, substrates, ibice byo kwitandukanya, nibindi. Filimi ya nitride: ikoreshwa mu gutegura nitride ya silikoni, nitride ya aluminiyumu, nibindi, ikoreshwa muri LED, ibikoresho by'amashanyarazi, nibindi. Filimi y'icyuma: ikoreshwa mu gutegura ibice biyobora amashanyarazi, ibice by'icyuma, nibindi.
(2) Ikoranabuhanga ryo kwerekana
Filimi ya ITO: Filimi ikoresha amashanyarazi arenga urumuri, ikoreshwa cyane mu kwerekana no gukoraho amashusho. Filimi y'umuringa: ikoreshwa mu gutegura ibice byo gupakira, imirongo ikoresha amashanyarazi, nibindi, kugira ngo inoze imikorere y'ibikoresho byo kwerekana amashusho.
(3) Izindi nzego
Imyambaro yo gutwikira: harimo iy'ingufu zirinda urumuri, iy'ingufu zirinda urujya n'uruza, n'ibindi. Ingufu zirinda urujya n'uruza: zikoreshwa mu bice by'imodoka, mu bikoresho by'indege, n'ibindi.
4. Ibiranga inzira ya CVD
Koresha ahantu hashyushye cyane kugira ngo wongere umuvuduko w'imikorere. Akenshi bikorwa ahantu hadakoreshejwe umwuka. Imyanda iri ku buso bw'igice igomba gukurwaho mbere yo gusiga irangi. Igikorwa gishobora kugira imbogamizi ku bice bishobora gusigwa, ni ukuvuga imbogamizi z'ubushyuhe cyangwa imbogamizi z'imikorere. Irangi rya CVD rizatwikira ibice byose by'igice, harimo imigozi, imyobo idafunguye n'ubuso bw'imbere. Rishobora kugabanya ubushobozi bwo gupfuka ahantu runaka hagenewe. Ubunini bwa firime bugengwa n'imiterere y'ibikoresho. Gufatana neza cyane.
5. Ibyiza by'ikoranabuhanga rya CVD
Ubusa: Ishobora kugera ku gipimo kimwe hejuru y'ubutaka bunini.
Uburyo bwo kugenzura: Igipimo cyo gushyiramo umwuka n'imiterere ya firime bishobora guhindurwa hagenzurwa igipimo cy'amazi n'ubushyuhe bwa gazi ibanziriza iyi.
Guhindagurika: Bikwiriye gushyirwa mu bikoresho bitandukanye, nk'ibyuma, semiconductors, oxydes, nibindi.
Igihe cyo kohereza: Gicurasi-06-2024