Ko te whakatakotoranga kohu matū (CVD) he tukanga e uru ana ki te whakatakoto i tētahi kiriata totoka ki runga i te mata o te wafer silicon mā te tauhohenga matū matū o te ranunga hau. Ka taea te wehewehe i tēnei tukanga ki ngā momo taputapu rerekē i whakatūria i runga i ngā āhuatanga tauhohenga matū rerekē pērā i te pēhanga me te matūmua.
He aha te tikanga e whakamahia ai ēnei taputapu e rua?He whānuitia te whakamahinga o ngā taputapu PECVD (Plasma Enhanced) i roto i ngā tono pēnei i te OX, te Nitride, te keti huānga whakarewa, me te waro kore-āhua. I tētahi atu taha, ko te LPCVD (Low Power) te nuinga o te wā e whakamahia ana mō te Nitride, te poly, me te TEOS.
He aha te kaupapa?Mā te hangarau PECVD ka whakakotahi i te pūngao plasma me te CVD mā te whakamahi i te plasma pāmahana-iti hei whakaputa i te tukunga hou i te cathode o te rūma tukanga. Mā tēnei ka taea te whakahaere i te tauhohenga matū me te plasma kia hanga he kiriata totoka i runga i te mata o te tauira. Waihoki, kua whakamaheretia te LPCVD kia mahi i te whakaiti i te pēhanga hau tauhohenga matū i roto i te tauhohenga.
whakatangata i te AIMā te whakamahinga o te Humanize AI i roto i te mara o te hangarau CVD ka taea te whakapai ake i te whai huatanga me te tika o te tukanga whakatakoto kiriata. Mā te whakamahi i te rauropi AI, ka taea te arotau me te whakatikatika i ngā tawhā pēnei i te tawhā katote, te tere rere o te hau, te pāmahana, me te matotoru o te kiriata kia pai ake ai ngā hua.
Wā tuku: Oketopa-24-2024