1. Jirgin ruwan Graphite Crystal tare da Shafi na CVD-SiC
Graphite yana da sauƙin sarrafawa kuma ana iya yin shi a matsayin jirgin ruwa mai lu'ulu'u guda ɗaya ta hanyar hanyoyi da yawa daga kayan toshe guda ɗaya. Ganin cewa graphite abu ne mai ramuka, dole ne a shafa Layer na SiC mai kauri kusan 100μm a samansa don hana matsalar ɓangaren da ke haifar da fallasa kai tsaye ga saman graphite ga masana'antun semiconductor daban-daban. Duk da haka, kauri naRufin CVD-SiCba shi da sauƙin sarrafawa, musamman a wasu ramuka masu zurfi da kusurwoyi inda rufin zai iya zama siriri. Saboda rashin daidaiton CTE (ma'aunin faɗaɗa zafi) tsakanin jikin graphite da fim ɗin SiC (25-1400℃, tare da matsakaicin 4.4×10e-6/℃ don SIC da 7.1×10e-6/℃ don graphite), fim ɗin SiC yawanci yakan faɗi bayan tashin zafi da faɗuwa da dama. Lokacin da aka fallasa graphite, iskar gas ko ruwa mai lalata za su shiga jikin graphite mai ramuka kuma suna da wahalar cirewa gaba ɗaya, don haka yana haifar da samar da ɓangaren da ke cikin yanayin zafi mai yawa. Wannan jirgin ruwan graphite mai rufi na SiC shine mafi arha kuma yana da mafi ƙarancin tsawon rai, kimanin shekara guda.
2. Jirgin ruwan SiC Crystal da aka sake yin amfani da shi tare da murfin CVD-SiC
Kwale-kwalen lu'ulu'u na SiC da aka sake yin amfani da su galibi ana samar da su ta hanyar yin sintering da sarrafa sassan naúra da dama da farko, sannan a haɗa kowane ɓangare da manna Si a yanayin zafi mai yawa don samar da jirgin ruwa mai lu'ulu'u, sannan a ƙarshe a shafa murfin CVD-SiC (kimanin 100um). Saboda sake yin amfani da su yana da ramuka, ana iya shigar da ɓangaren cikin tsarin semiconductor ba tare da murfin SiC ba. Bugu da ƙari, manna Si a yankin haɗin ba zai iya jure yanayin zafi iri ɗaya da kayan SiC ba. Tsarin kera wannan jirgin ruwa mai lu'ulu'u na SiC da aka sake yin amfani da shi tare da murfin CVD-SiC shine mafi tsayi kuma farashin yana da yawa sosai. Idan aka kwatanta da jirgin ruwa mai lu'ulu'u na graphite da aka shafe da SiC, jirgin ruwan lu'ulu'u na SiC da aka sake yin amfani da shi wanda aka shafe da CVD-SiC ba shi da matsalar rashin daidaiton CTE, amma wanke acid da karo na iya haifar da faɗuwar murfin SiC. Rayuwarsa ta ɗan fi tsayi, kimanin shekaru 2 zuwa 3.
3. Jirgin ruwan SiC Crystal guda ɗaya ba tare da murfin CVD ba
Ga jiragen ruwa na lu'ulu'u ba tare da rufin CVD ba, saman dole ne ya kasance mai kauri. Akwai nau'ikan kayan SiC guda biyu masu kauri: SiC mara matsi (SSiC) da SiC mai narkewar amsawa (RBSiC, wanda aka fi sani da silicon-permeated SiC, SiSiC). Duk da haka, babu ɗayan waɗannan nau'ikan SiC guda biyu da za a iya haɗa su cikin raka'a ɗaya kamar quartz. Ba shi da sauƙi a samar da SiC daga foda a ƙone shi zuwa siffar kimanin jirgin ruwa na lu'ulu'u guda ɗaya. Bugu da ƙari, SiC yana da matuƙar wahala kuma yana da wahalar sarrafawa, wanda ke haifar da tsadar sarrafawa mai yawa ga jiragen ruwa na lu'ulu'u na SiC guda ɗaya. Kodayake RBSiC ya ɗan fi sauƙi a samar da siffar kusan fiye da SSiC, har yanzu yana da tauri sosai. Bugu da ƙari, RBSC ya ƙunshi Si 10 zuwa 15% kyauta, wanda ke sa ya kasa jure yanayin zafi iri ɗaya da kayan SSiC. Gabaɗaya, yana iya jure yanayin zafi ƙasa da 1400 ° C. Bugu da ƙari, Si kyauta yana da sauƙin gogewa ta hanyar acid HF, wanda ke haifar da ɓarkewar ɓangaren.
4.Kallex SiC Modular Crystal Boat
Ana sarrafa sassan na'urar ta hanyar ƙirƙirar, niƙa da niƙa ta amfani da kayan SiC mai sinadari mara matsi tare da tsarkin kashi 99.675%. Sannan a haɗa su tare da sukurori na SSiC, goro, da sauransu, sannan a gyara su da fil ɗin SSiC don tabbatar da ƙarfin ɗaukar kaya. Ba tare da rufin SiC ba, babu haɗarin lalacewar rufin ɓangare. Bugu da ƙari, ana iya amfani da shi na dogon lokaci a cikin yanayi mai wahala, kamar yanayin zafi mai yawa (1600℃) da acid na HF, tare da tsawon lokacin aiki na sama da shekaru biyar.
Lokacin Saƙo: Agusta-19-2025