1. Boti la Graphite Crystal lokhala ndi CVD-SiC Coating
Graphite ndi yosavuta kuikonza ndipo ingapangidwe kukhala boti la kristalo limodzi pogwiritsa ntchito njira zingapo kuchokera ku chinthu chimodzi. Popeza graphite ndi chinthu chokhala ndi mabowo, gawo la SiC lokhala ndi makulidwe a pafupifupi 100μm liyenera kuphimbidwa pamwamba pake kuti lipewe vuto linalake lomwe limabwera chifukwa cha kuwonekera mwachindunji kwa pamwamba pa graphite ku mafakitale osiyanasiyana a semiconductor. Komabe, makulidwe aChophimba cha CVD-SiCSikophweka kulamulira, makamaka m'mabowo akuya ndi m'makona komwe chophimbacho chingakhale chocheperako. Chifukwa cha kusalingana kwa CTE (coefficient of thermal expansion) pakati pa thupi la graphite ndi filimu ya SiC (25-1400℃, ndi avareji ya 4.4×10e-6/℃ ya SIC ndi 7.1×10e-6/℃ ya graphite), filimu ya SiC nthawi zambiri imagwa kutentha kukakwera ndi kutsika kangapo. Graphite ikawonekera, mpweya wowononga kapena zakumwa zimalowa m'thupi la graphite ndipo zimakhala zovuta kuchotsa kwathunthu, zomwe zimapangitsa kuti pakhale zochepa mu njira zotentha kwambiri. Boti la graphite lopangidwa ndi SiC ndi lotsika mtengo kwambiri ndipo limakhala ndi moyo waufupi kwambiri, pafupifupi chaka chimodzi.
2. Bwato la SiC Crystal lopangidwanso ndi CVD-SiC Coating
Maboti a kristalo a SiC obwezeretsedwanso nthawi zambiri amapangidwa powasakaniza ndi kukonza magawo angapo a mayunitsi poyamba, kenako nkumangirira gawo lililonse ndi Si paste pa kutentha kwambiri kuti apange boti la kristalo, ndipo pamapeto pake nkumayika CVD-SiC coating (pafupifupi 100um). Chifukwa recrystallization ndi yotupa, gawo lina limathanso kulowetsedwa mu njira za semiconductor popanda SiC coating. Kuphatikiza apo, Si paste mu bonding zone silingathe kupirira kutentha komweko monga zinthu za SiC. Njira yopangira boti la kristalo la SiC lobwezeretsedwanso ndi CVD-SiC coating ndiyo yayitali kwambiri ndipo mtengo wake ndi wokwera kwambiri. Poyerekeza ndi boti la kristalo la graphite lophimbidwa ndi SiC, boti la kristalo la SiC lobwezeretsedwanso lophimbidwa ndi CVD-SiC silili ndi vuto la CTE mismatch, koma kutsuka ndi kugundana kwa asidi kungayambitsenso kuti SiC coating igwe. Nthawi yake yogwira ntchito ndi yayitali pang'ono, pafupifupi zaka 2 mpaka 3.
3. Bwato la SiC Crystal lopanda CVD
Pa maboti a kristalo opanda CVD, pamwamba pake payenera kukhala pokhuthala. Pali mitundu iwiri ya zinthu zokhuthala za SiC: SiC (SSiC) yopanda mphamvu komanso SiC yosakanikirana ndi reaction-sintered (RBSiC, yomwe imadziwikanso kuti silicon-permeated SiC, SiSiC). Komabe, palibe mitundu iwiri ya SiC yomwe ingasakanizidwe kukhala imodzi monga quartz. Sikophweka kupanga SiC kuchokera ku ufa ndikuyiwotcha kukhala mawonekedwe ofanana ndi boti la kristalo limodzi. Kuphatikiza apo, SiC ndi yovuta kwambiri komanso yovuta kuikonza, zomwe zimapangitsa kuti pakhale ndalama zambiri zokonzera maboti a kristalo limodzi a SiC. Ngakhale RBSiC ndi yosavuta pang'ono kupanga mawonekedwe ofanana ndi SSiC, imakhalabe yolimba kwambiri. Kuphatikiza apo, RBSC ili ndi 10 mpaka 15% ya Si yaulere, zomwe zimapangitsa kuti isathe kupirira kutentha komweko monga zinthu za SSiC. Nthawi zambiri, imatha kupirira kutentha pansi pa 1400 ° C. Kuphatikiza apo, Si yaulere imadulidwa mosavuta ndi HF acid, zomwe zimapangitsa kuti ikhale yopanda mphamvu.
4. Kallex SiC Modular Crystal Boat
Zigawo za chipangizocho zimakonzedwa kudzera mu kupanga, kupukuta ndi kupukuta pogwiritsa ntchito zinthu za SiC zopanda kupanikizika zokhala ndi chiyero cha 99.675%. Kenako ziphatikizeni pamodzi ndi zomangira za SSiC, mtedza, ndi zina zotero, ndikuzikonza ndi ma pin a SSiC kuti zitsimikizire kuti zinyamula katundu. Popanda chophimba cha SiC, palibe chiopsezo cha kuwonongeka kwa chophimba pang'ono. Kuphatikiza apo, chingagwiritsidwe ntchito kwa nthawi yayitali m'malo ovuta, monga kutentha kwambiri (1600℃) ndi HF acid, yokhala ndi moyo wautali wa zaka zoposa zisanu.
Nthawi yotumizira: Ogasiti-19-2025