1. Waka Karaihe Graphite me te Paninga CVD-SiC
He māmā te tukatuka i te karāpiti, ā, ka taea te hanga hei poti karaihe kotahi-wahi mā roto i ngā tukanga maha mai i te rauemi poraka kotahi. Nā te mea he rauemi pūwero te karāpiti, me pania he paparanga SiC tata ki te 100μm te matotoru ki tōna mata hei ārai i te raruraru iti i puta mai i te pānga tika o te mata karāpiti ki ngā momo hangahanga haurua-ira. Heoi, ko te matotoru o tePaninga CVD-SiCEhara i te mea ngāwari te whakahaere, inā koa i roto i ētahi kōhao hohonu me ngā kokonga ka angiangi ake te paninga. Nā te kore ōrite o te CTE (tauwehenga whakawhānui wera) i waenga i te tinana karāpeti me te kiriata SiC (25-1400℃, me te toharite o te 4.4×10e-6/℃ mō te SIC me te 7.1×10e-6/℃ mō te karāpeti), ka taka te kiriata SiC i muri i te pikinga me te hekenga o te pāmahana. Ina pāngia te karāpeti, ka uru ngā hau waikura, ngā wai rānei ki te tinana karāpeti porous, ā, ka uaua ki te tango katoa, ka hua ake he matūriki i roto i ngā tukanga pāmahana teitei. Ko tēnei poti karāpeti kua pania ki te SiC te mea iti rawa te utu, ā, he poto rawa te roa o te ora, tata ki te kotahi tau.
2. Waka Tioata SiC kua Whakakirihoutia me te Paninga CVD-SiC
Ko ngā poti tioata SiC kua whakakōpiripiritia anō ka hangaia mā te whakakōpiri me te tukatuka i ētahi wāhanga waeine i te tuatahi, kātahi ka honoa ia wāhanga ki te whakapiri Si i ngā pāmahana teitei hei hanga poti tioata, ā, i te mutunga ka pania he paninga CVD-SiC (tata ki te 100um). Nā te mea he pūwero te whakakōpiripiritia anō, ka taea hoki te whakauru i te matūriki ki roto i ngā tukanga haurua-ā-ira me te kore he paninga SiC. Hei tāpiri, kāore e taea e te whakapiri Si i roto i te rohe hononga te tu atu i te pāmahana teitei rite tonu ki te rauemi SiC. Ko te tukanga hanga o tēnei poti tioata SiC kua whakakōpiripiritia anō me te paninga CVD-SiC te mea roa rawa atu, ā, he tino teitei te utu. Ki te whakatauritea ki te poti tioata graphite kua pania ki te SiC, kāore he raruraru CTE ōrite o te poti tioata SiC kua whakakōpiripiritia anō kua pania ki te CVD-SiC, engari ka taea hoki e te horoi waikawa me te tukinga te hinga o te paninga SiC. He roa ake te ora ratonga, tata ki te 2 ki te 3 tau.
3. Waka Karaihe SiC Kotahi-wahi Kāore he Paninga CVD
Mō ngā poti tioata kāore he paninga CVD, me matotoru te mata. E rua ngā momo rauemi SiC matotoru: te SiC kua whakakāhoretia te pēhanga (SSiC) me te SiC kua whakakāhoretia te tauhohenga (RBSiC, e mōhiotia ana ko te SiC kua whakakīia ki te silicon, SiSiC). Heoi, kāore e taea te whakakotahi i tētahi o ēnei momo SiC e rua ki te kotahi waeine pērā i te quartz. Ehara i te mea ngāwari te hanga SiC mai i te paura ka tahuna kia rite ki te āhua o te poti tioata kotahi-wahi. Heoi anō, he tino pakeke te SiC, ā, he uaua ki te tukatuka, ka hua ake he utu tukatuka tino nui mō ngā poti tioata SiC kotahi-wahi. Ahakoa he ngāwari ake te hanga i te āhua tata o te RBSiC i te SSiC, he tino pakeke tonu. Hei tāpiri, kei roto i te RBSC te 10 ki te 15% o te Si kore utu, ā, kāore e taea te tu atu i ngā pāmahana teitei rite tonu ki ngā rauemi SSiC. I te nuinga o te wā, ka taea e ia te tu atu i ngā pāmahana i raro i te 1400 °C. Heoi anō, ka ngawari te keri i te Si kore utu e te waikawa HF, ka hua ake he matūriki.
4. Waka Karaihe Whakarōpū Kallex SiC
Ka tukatukahia ngā wāhanga o te waeine mā te hanga, te whakakoi me te huri mā te whakamahi i te rauemi SiC whakakoi kore-pēhanga me te parakore o te 99.675%. Kātahi ka honoa ki ngā tīwiri SSiC, nati, me ētahi atu, ka whakamau ki ngā pine SSiC kia mau ai te kaha ki te kawe kawenga. Ki te kore he paninga SiC, kāore he mōrearea o te pakaru o te paninga. Heoi anō, ka taea te whakamahi mō te wā roa i roto i ngā taiao uaua, pērā i te pāmahana teitei (1600℃) me te waikawa HF, me te roa o te ora mahi neke atu i te rima tau.
Wā tuku: 19 o Ākuhata-2025