Maitiro mana Ekugadzira Silicon Carbide (SiC) Wafer Boat

1. Chikepe cheGraphite Crystal chine CVD-SiC Coating

Graphite iri nyore kugadzirisa uye inogona kugadzirwa kuita chikepe chekristaro chine chidimbu chimwe chete kuburikidza nenzira dzakasiyana-siyana kubva pane chimwe chinhu chebhuroko. Sezvo graphite iri chinhu chine maburi, SiC layer ine ukobvu hweinenge 100μm inofanira kuputirwa pamusoro payo kudzivirira dambudziko rinokonzerwa nekuratidzwa zvakananga kwepamusoro pegraphite kune akasiyana magadzirirwo e semiconductor. Zvisinei, ukobvu hweKuputira kweCVD-SiCHazvisi nyore kudzora, kunyanya mune mamwe maburi akadzika nemakona uko kupeta kungave kwakatetepa. Nekuda kwekusawirirana kweCTE (coefficient of thermal expansion) pakati pemuviri wegraphite nefirimu reSiC (25-1400℃, neavhareji ye4.4×10e-6/℃ yeSIC uye 7.1×10e-6/℃ yegraphite), firimu reSiC rinowanzo kudonha mushure mekukwira nekudzika kwekupisa kwakati wandei. Kana graphite yaonekwa, magasi anoparadza kana zvinwiwa zvinopinda mumuviri wegraphite une maburi uye zvinonetsa kubvisa zvachose, zvichiita kuti pave nekubuda kwezvikamu mukupisa kwakanyanya. Iri bhoti regraphite rakafukidzwa neSiC ndiro rakachipa uye rine hupenyu hupfupi, rinenge gore rimwe chete.

2. Chikepe cheSiC Crystal chakagadziriswazve chine CVD-SiC Coating

Mabhoti eSiC crystal akagadziriswazve anowanzo gadzirwa nekugadzira zvikamu zvakasiyana-siyana zvemayuniti, uye ozobatanidza chikamu chimwe nechimwe neSi paste pakupisa kwakanyanya kuti agadzire bhoti rekristaro, uye pakupedzisira oisa CVD-SiC coating (inenge 100um). Nekuti recrystallization ine maburi, chikamu chinogonawo kuiswa muma semiconductor process pasina SiC coating. Pamusoro pezvo, Si paste iri munzvimbo yekubatanidza haigone kumira tembiricha yakafanana neyeSiC. Maitiro ekugadzira bhoti reSiC crystal rakagadziriswazve rine CVD-SiC coating ndiyo yakareba uye mutengo wayo wakakwira zvikuru. Kana tichienzanisa nebhoti regraphite crystal rakaputirwa neSiC, bhoti reSiC crystal rakagadziriswazve rakaputirwa neCVD-SiC harina dambudziko reCTE mismatch, asi kushambidzwa neacid nekugumburana zvinogonawo kukonzera kuti SiC coating iwire. Hupenyu hwayo hwekushanda hwakareba zvishoma, makore angangoita maviri kusvika matatu.

3. Chikepe cheSiC Crystal chine chidimbu chimwe chete chisina CVD Coating

Kune mabhoti ekristaro asina CVD coating, pamusoro payo panofanira kunge pakaoma. Kune mhando mbiri dzezvinhu zveSiC zvakasviba: SiC isina kumanikidzwa (SSiC) uye SiC inosanganiswa nereaction-sintered (RBSiC, inozivikanwawo seSilicon-permeated SiC, SiSiC). Zvisinei, hapana kana imwe yemhando mbiri idzi dzeSiC inogona kusanganiswa kuita chimwe chinhu senge quartz. Hazvisi nyore kugadzira SiC kubva muupfu woipisa kuita chimiro chebhoti rekristaro rimwe chete. Uyezve, SiC yakaoma uye yakaoma kugadzirisa, izvo zvinotungamira kumutengo wakakwira wekugadzirisa mabhoti ekristaro rimwe chete reSiC. Kunyangwe RBSiC iri nyore kugadzira chimiro chekufungidzira pane SSiC, ichiri yakaoma zvikuru. Pamusoro pezvo, RBSC ine 10 kusvika 15% free Si, izvo zvinoita kuti isakwanise kumira tembiricha dzakafanana neSSiC zvinhu. Kazhinji, inogona kumira tembiricha dziri pasi pe1400 ° C. Uyezve, Si yakasununguka inochekwa nyore nyore neHF acid, zvichiita kuti ive chikamu.

4.Kallex SiC Modular Crystal Boat

Zvikamu zveyuniti zvinogadziriswa kuburikidza nekugadzira, kusvina uye kukuya uchishandisa zvinhu zveSiC zvisina kumanikidzwa zvine kuchena kwe99.675%. Wobva wazvisanganisa pamwe chete neSSiC screws, nzungu, nezvimwewo, wozvigadzirisa nemapini eSSiC kuti uve nechokwadi chekuti zvinotakura mutoro. Pasina SiC coating, hapana njodzi yekukuvara kwechikamu che coating. Uyezve, inogona kushandiswa kwenguva yakareba munzvimbo dzakaoma, dzakadai sekupisa kwakanyanya (1600℃) uye HF acid, ine hupenyu hwebasa hwemakore anopfuura mashanu.