4 Cov Txheej Txheem Tsim Khoom Rau Silicon Carbide (SiC) Wafer Boat

1. Lub nkoj siv lead ua los ntawm graphite nrog CVD-SiC txheej

Graphite yooj yim ua thiab tuaj yeem ua rau hauv ib lub nkoj siv lead ua los ntawm ntau txoj kev los ntawm ib qho khoom siv thaiv. Raws li graphite yog cov khoom siv porous, ib txheej SiC nrog tuab ntawm kwv yees li 100μm yuav tsum tau coated rau ntawm nws qhov chaw kom tiv thaiv cov teeb meem me me los ntawm kev raug ncaj qha ntawm qhov chaw graphite rau ntau yam kev tsim khoom semiconductor. Txawm li cas los xij, qhov tuab ntawmTxheej CVD-SiCtsis yooj yim rau kev tswj hwm, tshwj xeeb tshaj yog nyob rau hauv qee qhov tob thiab ces kaum qhov twg cov txheej yuav nyias dua. Vim yog qhov tsis sib xws ntawm CTE (coefficient ntawm thermal expansion) ntawm lub cev graphite thiab zaj duab xis SiC (25-1400 ℃, nrog qhov nruab nrab ntawm 4.4 × 10e-6 / ℃ rau SIC thiab 7.1 × 10e-6 / ℃ rau graphite), zaj duab xis SiC feem ntau yuav poob tawm tom qab ntau qhov kub nce thiab poob. Thaum graphite raug, cov pa roj corrosive lossis kua yuav nkag mus rau hauv lub cev graphite porous thiab nyuaj rau tshem tawm tag nrho, yog li ua rau muaj cov khoom me me hauv cov txheej txheem kub siab. Lub nkoj graphite coated SiC no yog qhov pheej yig tshaj plaws thiab muaj lub neej luv tshaj plaws, kwv yees li ib xyoos.

2. Rov ua dua SiC Crystal Boat nrog CVD-SiC Coating

Cov nkoj siv lead ua los ntawm SiC feem ntau yog tsim los ntawm kev sintering thiab ua ntau qhov chaw ua ntej, tom qab ntawd sib txuas txhua qhov nrog Si nplaum ntawm qhov kub siab los tsim lub nkoj siv lead ua, thiab thaum kawg siv CVD-SiC txheej (kwv yees li 100um). Vim tias recrystallization yog porous, cov khoom me me kuj tseem tuaj yeem nkag mus rau hauv cov txheej txheem semiconductor yam tsis muaj SiC txheej. Tsis tas li ntawd, Si nplaum hauv thaj chaw sib txuas tsis tuaj yeem tiv taus qhov kub siab tib yam li cov khoom siv SiC. Cov txheej txheem tsim khoom ntawm lub nkoj siv lead ua los ntawm SiC no nrog CVD-SiC txheej yog qhov ntev tshaj plaws thiab tus nqi siab heev. Piv nrog lub nkoj siv lead ua los ntawm graphite coated nrog SiC, lub nkoj siv lead ua los ntawm SiC recrystallized coated nrog CVD-SiC tsis muaj teeb meem CTE mismatch, tab sis kev ntxuav kua qaub thiab kev sib tsoo kuj tseem tuaj yeem ua rau SiC txheej poob. Nws lub neej kev pabcuam ntev dua me ntsis, kwv yees li 2 txog 3 xyoos.

3. Ib daim SiC Crystal Boat uas tsis muaj CVD Coating

Rau cov nkoj siv lead ua uas tsis muaj CVD txheej, qhov chaw yuav tsum ntom. Muaj ob hom khoom siv SiC ntom: SiC sintered tsis muaj siab (SSiC) thiab SiC reaction-sintered (RBSiC, tseem hu ua silicon-permeated SiC, SiSiC). Txawm li cas los xij, ob hom SiC no tsis tuaj yeem sib xyaw ua ke zoo li quartz. Nws tsis yooj yim los tsim SiC los ntawm hmoov thiab hlawv nws mus rau hauv ib daim duab zoo li ib daim nkoj siv lead ua ib daim. Ntxiv mus, SiC nyuaj heev thiab nyuaj rau ua, uas ua rau tus nqi ua tiav siab heev rau ib daim nkoj siv lead ua ib daim SiC. Txawm hais tias RBSiC yooj yim dua me ntsis los tsim ib daim duab zoo li SSiC, nws tseem nyuaj heev. Ntxiv mus, RBSC muaj 10 txog 15% Si dawb, uas ua rau nws tsis tuaj yeem tiv taus qhov kub siab tib yam li cov ntaub ntawv SSiC. Feem ntau, nws tuaj yeem tiv taus qhov kub qis dua 1400 ° C. Ntxiv mus, Si dawb yooj yim etched los ntawm HF acid, ua rau particle.

4. Kallex SiC Modular Crystal Boat

Cov khoom siv hauv chav tsev raug ua tiav los ntawm kev tsim, sintering thiab sib tsoo siv cov khoom siv SiC sintered tsis muaj siab nrog qhov huv ntawm 99.675%. Tom qab ntawd muab lawv ua ke nrog SSiC ntsia hlau, txiv ntoo, thiab lwm yam, thiab kho lawv nrog SSiC pins kom ntseeg tau tias muaj peev xwm thauj khoom. Yog tsis muaj SiC txheej, tsis muaj kev pheej hmoo ntawm kev puas tsuaj ntawm cov txheej txheem me me. Ntxiv mus, nws tuaj yeem siv tau ntev hauv qhov chaw nyuaj, xws li qhov kub siab (1600 ℃) thiab HF acid, nrog lub neej ua haujlwm ntau dua tsib xyoos.