CVD Silicon Carbide Coated Graphite Nplhaib

CVD Silicon Carbide Coated Graphite Ring Featured Duab

Kev Piav Qhia Luv:

VET Energy silicon carbide coated graphite ring yog ib yam khoom ua tau zoo uas tsim los muab kev ua haujlwm zoo thiab txhim khu kev qha rau lub sijhawm ntev. Nws muaj kev tiv taus kub zoo heev thiab kev sib xws ntawm thermal, kev ntshiab siab, kev tiv taus kev yaig, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau kev siv wafer.

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Cov Khoom Qhia Txog Khoom

Cov Cim Npe Khoom

Cov Khoom Siv Graphite Uas Muaj Cov Qauv:

Qhov Ceev Pom Tseeb:	1.85 g/cm3
Kev Tiv Thaiv Hluav Taws Xob:	11 μΩm
Flexural Zog:	49 MPa (500kgf/cm2)
Ntug dej Hardness:	58
Tshauv:	<5ppm
Kev Ua Kub:	116 W/mK (100 kcal/mhr-℃)

Peb muab ntau yam susceptors thiab graphite Cheebtsam rau txhua lub epitaxy reactors tam sim no. Peb cov khoom suav nrog barrel susceptors rau LPE units, pancake susceptors rau LPE, CSD, thiab Gemini units, thiab single-wafer susceptors rau applied thiab ASM units.

Los ntawm kev sib koom tes zoo nrog cov OEMs ua lag luam, kev txawj ntse ntawm cov ntaub ntawv thiab kev paub txog kev tsim khoom, vet muab cov qauv tsim zoo tshaj plaws rau koj daim ntawv thov.

VET Zog yog lubChaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide uas muaj CVD txheej,muaj peev xwm muab khoomntau yamcov khoom siv kho kom haum rau kev lag luam semiconductor thiab photovoltaic. Okoj pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau duarau koj.

Fcov yam ntxwv ntawm peb cov khoom:

1. Kev kub siab oxidation tsis kam mus txog 1700℃.
2. Kev huv siab thiabkev sib npaug ntawm thermal
3. Kev tiv thaiv xeb zoo heev: kua qaub, alkali, ntsev thiab cov tshuaj reagents organic.
4. Kev nyuaj siab, qhov chaw me me, cov khoom me me.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC薄膜基本物理性能 Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej
性质 / Khoom vaj khoom tsev	典型数值 / Tus nqi ib txwm muaj
晶体结构 / Cov Qauv Siv Crystal	FCC β theem多晶, 主要为(111) Ib
密度 / Qhov Ceev	3.21 g/cm³
硬度 / Qhov nyuaj	2500 维氏硬度 (500g load)
晶粒大小 / Cov nplej loj	2 ~ 10μm
纯度 / Kev Ntshiab Tshuaj	99.99995%
Cov duab / Peev Xwm Kub	640 J·kg^-1·K^-1
升华温度 Kub Sublimation	2700 ℃
抗弯强度 Lub zog flexural	415 MPa RT 4-point
杨氏模量 / Cov Modulus Hluas	430 Gpa 4pt khoov, 1300 ℃
导热系数 / ThermalKev coj ua hluav taws xob	300W·m^-1·K^-1
热膨胀系数 / Kev nthuav dav thermal (CTE)	4.5 × 10^-6K^-1