Àgwà ndị a na-ahụkarị nke ihe e ji graphite mee:
| Njupụta Dị Anya: | 1.85 g/cm3 |
| Nguzogide eletriki: | 11 μΩm |
| Ike nke Flexural: | 49 MPa (500kgf/cm2) |
| Ike nke Osimiri: | 58 |
| Ash: | <5ppm |
| Ọgbakọ okpomọkụ: | 116 W/mK (100 kcal/mhr-℃) |
Anyị na-enye ọtụtụ ihe ndị na-egbochi ihe na ihe ndị na-akpata ihe mgbu na graphite maka ihe niile na-akpata ihe mgbu na epitaxy. Ngwaahịa anyị gụnyere ihe ndị na-egbochi ihe mgbu maka LPE units, ihe ndị na-egbochi ihe mgbu na pancake units maka LPE, CSD, na Gemini units, na ihe ndị na-egbochi ihe mgbu na otu wafer maka ihe ndị e tinyere na ASM units.
Site na ijikọta mmekọrịta siri ike na ndị isi OEM, ọkachamara ihe na nkà nrụpụta, vet na-enye imewe kachasị mma maka ngwa gị.
Ike VET bụ O nwere ike ịbụ na o meghị ihe ọbụla gbasara ya.ezigbo onye nrụpụta ngwaahịa graphite na silicon carbide ahaziri ahazi nwere mkpuchi CVD,ike inyedị iche icheakụkụ ahaziri ahazi maka ụlọ ọrụ semiconductor na photovoltaic. ONdị otu teknụzụ gị si n'ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye azịza ihe ọkachamara karịamaka gị.
Fnri nke ngwaahịa anyị:
1. Oke okpomọkụ na-eguzogide oxidation ruo 1700℃.
2. Ịdị ọcha dị elu naotu ihe dị n'otu okpomọkụ
3. Ezigbo nguzogide nchara: acid, alkali, nnu na ihe ndị sitere n'okike.
4. Ike siri ike, elu dị obere, obere ihe.
5. Ndụ ọrụ dị ogologo ma na-adịgide adịgide karịa
| CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi | |
| 性质 / Ihe onwunwe | 典型数值 / Uru nkịtị |
| 晶体结构 / Nhazi kristal | FCC β nkebi多晶，主要为（111) 取向 |
| 密度 / Njupụta | 3.21 g/cm³ |
| 硬度 / Ike siri ike | 2500 维氏硬度： (ibu 500g) |
| 晶粒大小 / SiZe ọka | 2 ~ 10μm |
| 纯度 / Ịdị ọcha nke kemịkalụ | 99.99995% |
| 热容 / Ike Okpomọkụ | 640 J·kg-1·K-1 |
| 升华温度 / Okpomọkụ Sublimation | 2700℃ |
| 抗弯强度 / Ike nke Flexural | 415 MPa RT isi ihe anọ |
| 杨氏模量 / Modulu Young | 430 GPA 4pt gbagọrọ agbagọ, 1300℃ |
| 导热系数 / ThermalNhazigharị | 300W·m-1·K-1 |
| 热膨胀系数 / Mgbasawanye Okpomọkụ (CTE) | 4.5 × 10-6K-1 |
Nabata gị nke ọma ka ị bịa leta ụlọ ọrụ mmepụta ihe anyị, ka anyị nwee mkparịta ụka ọzọ!
