Impeta ya Graphite ya CVD Silicon Carbide itwikiriwe na CVD

Ishusho y'impeta ya Graphite ya CVD Silicon Carbide

Ibisobanuro bigufi:

Impeta ya grafiti ya VET Energy silicon carbide ikoze muri VET Energy ni igicuruzwa gifite imikorere myiza kandi cyizewe cyagenewe gutanga imikorere ihoraho kandi yizewe mu gihe kirekire. Ifite ubushobozi bwo kurwanya ubushyuhe n'ubushyuhe bungana, isuku cyane, irwanya isuri, bigatuma iba igisubizo cyiza cyo gutunganya wafer.

Ohereza imeri kuri twe Kuramo nka PDF

Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Imiterere isanzwe y'ibikoresho bya grafiti by'ibanze:

Ubucucike bugaragara:	1.85 g/cm3
Ubushobozi bwo guhangana n'amashanyarazi:	11 μΩm
Ingufu zo Kongera Uburemere:	49 MPa (500kgf/cm2)
Ubukomere bw'Inkombe:	58
Ivu:	<5ppm
Ubushobozi bwo gutwara ubushyuhe:	116 W/mK (100 kcal/mhr-℃)

Dutanga ibikoresho bitandukanye bya susceptors na grafiti kuri reactors zose zigezweho za epitaxy. Ibicuruzwa byacu birimo ibikoresho bya barrel susceptors kuri LPE units, pancake susceptors kuri LPE, CSD, na Gemini units, hamwe na susceptors za single-wafer kuri units zikoreshwa na ASM.

Mu guhuza ubufatanye bukomeye n'ibigo bikomeye by'ubucuruzi, ubumenyi mu bikoresho n'ubumenyi mu bijyanye no gukora, veterineri itanga igishushanyo mbonera cyiza ku ikoreshwa ryawe.

VET Energy ni iuruganda nyarwo rukora ibikoresho bya graphite na silicon carbide byihariye hamwe n'imvange ya CVD,ishobora gutangabitandukanyeibice byihariye byo mu nganda za semiconductor na photovoltaic. OItsinda ryanyu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora gutanga ibisubizo by’ibikoresho by’umwuga.kuri wowe.

FImirire y'ibicuruzwa byacu:

1. Ubudahangarwa bw'ubushyuhe bwinshi kugeza kuri dogere 1700℃.
2. Ubuziranenge bwinshi kandiubushyuhe bungana
3. Irwanya ingese neza cyane: aside, alkali, umunyu n'ibikomoka ku bimera.
4. Ubukomere bwinshi, ubuso buto, uduce duto.
5. Igihe kirekire cyo gukora kandi kiramba kurushaho

CVD SiC薄膜基本物理性能 Imiterere y'ibanze ya CVD SiCgusiga
性质 / Umutungo	典型数值 / Agaciro Gasanzwe
晶体结构 / Imiterere ya kristu	Icyiciro cya FCC β多晶，主要为（111 ）取向
密度 / Ubucucike	3.21 g/cm³
硬度 / Ubukomere	2500 维氏硬度（ 500g umutwaro）
晶粒大小 / Ubunini bw'ibinyampeke	2 ~ 10μm
纯度 / Ubuziranenge bw'ibinyabutabire	99.99995%
热容 / Ubushobozi bwo gushyuha	640 J·kg^-1·K^-1
升华温度 / Ubushyuhe bwo gushyuha	2700℃
抗弯强度 / Imbaraga zo Kongera Uburemere	415 MPa RT ifite amanota 4
杨氏模量 / Modulus y'Abana	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUbushobozi bwo kuyobora	300W·m^-1·K^-1
热膨胀系数 / Kwagura ubushyuhe (CTE)	4.5×10^-6K^-1