Indandatho yeGraphite egqunywe yiCVD Silicon Carbide

Umfanekiso obonisiweyo weRingi yeGraphite eQokelelweyo yeCVD Silicon Carbide

Inkcazo emfutshane:

I-VET Energy silicon carbide coated graphite ring yimveliso esebenza kakuhle kakhulu eyenzelwe ukubonelela ngokusebenza okuzinzileyo nokuthembekileyo ixesha elide. Inokumelana okuhle kakhulu nobushushu kunye nokufana kobushushu, ubunyulu obuphezulu, ukumelana nokukhukuliseka, nto leyo eyenza ukuba ibe sisisombululo esifanelekileyo sokusetyenziswa kwe-wafer.

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Iinkcukacha zeMveliso

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Iimpawu eziqhelekileyo zezinto ezisisiseko zeGraphite:

Ubuninzi Obubonakalayo:	1.85 g/cm3
Ukumelana nombane:	11 μΩm
Amandla okuGuquka:	I-49 MPa (500kgf/cm2)
Ukuqina koLwandle:	58
Uthuthu:	<5ppm
Ukuqhuba kwe-Thermal:	116 W/mK (100 kcal/mhr-℃)

Sibonelela ngee-susceptors ezahlukeneyo kunye neenxalenye zegrafiti kuzo zonke ii-reactors ze-epitaxy zangoku. Iimveliso zethu ziquka ii-susceptors zebarrel zeeyunithi ze-LPE, ii-susceptors zepancake zeeyunithi ze-LPE, i-CSD, kunye ne-Gemini, kunye nee-susceptors ze-single-wafer zeeyunithi ezisetyenzisiweyo kunye ne-ASM.

Ngokudibanisa ubudlelwane obuqinileyo nee-OEM eziphambili, ulwazi lwezinto kunye nolwazi lokuvelisa, ugqirha wezilwanyana unikezela ngoyilo olufanelekileyo kwisicelo sakho.

I-VET Energy yi iumenzi wokwenyani weemveliso zegrafiti kunye nesilicon carbide ezenziwe ngokwezifiso ezine-CVD coating,ingabonelelaezahlukeneyoiindawo ezenzelwe wena zeshishini le-semiconductor kunye ne-photovoltaic. OIqela lakho lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbiyeyakho.

Fiindlela zokutya iimveliso zethu:

1. Ukumelana ne-oxidation yobushushu obuphezulu ukuya kuthi ga kwi-1700℃.
2. Ubunyulu obuphezulu kunyeukufana kobushushu
3. Ukumelana nokugqwala okugqwesileyo: i-asidi, i-alkali, ityuwa kunye nee-reagents ze-organic.
4. Ubulukhuni obuphezulu, umphezulu oxineneyo, amasuntswana amancinci.
5. Ubomi benkonzo obude kwaye buhlala ixesha elide

I-CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko zomzimba ze-CVD SiCugqubuthelo
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lwekristale	Isigaba se-β se-FCC多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ubulukhuni	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Ubukhulu beenkozo	2 ~ 10μm
纯度 / Ucoceko lweekhemikhali	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Ubushushu bokunyibilikisa	2700℃
抗弯强度 / Amandla okugobeka	I-415 MPa RT 4-point
杨氏模量 / Imodulus yoLutsha	I-430 Gpa 4pt bend, 1300℃
导热系数 / I-ThermalUkuqhuba	300W·m^-1·K^-1
热膨胀系数 / Ukwandiswa kobushushu (CTE)	4.5×10^-6K^-1