Mowhiti Graphite Panipanihia ki te Silicon Carbide CVD

Whakaahuatanga Poto:

He hua mahi-teitei te mowhiti karāhe kua pania ki te silicon carbide a VET Energy, kua hangaia hei whakarato i te mahi pumau me te pono mō te wā roa. He tino pai te ātete ki te wera me te ōritetanga o te wera, he tino parakore, he ātete ki te horo, ā, koinei te otinga tino pai mō ngā tono tukatuka wafer.

Tukua mai he īmēra ki a mātou Tikiake hei PDF

Taipitopito Hua

Ngā Tohu Hua

Ngā Āhuatanga Noa o te Rauemi Graphite Turanga:

Te Matotoru Āhua:	1.85 karamu/cm3
Ātete Hiko:	11 μΩm
Kaha Whakapiko:	49 MPa (500kgf/cm2)
Te Pakari o te Takutai:	58
Te pungarehu:	<5ppm
Te Arahi Wera:	116 W/mK (100 kcal/mhr-℃)

Ka tukuna e mātou ngā momo whakapūmau me ngā wāhanga karāpeti mō ngā tauhohenga epitaxy katoa o nāianei. Kei roto i ā mātou hua ngā whakapūmau oko mō ngā waeine LPE, ngā whakapūmau panikeke mō ngā waeine LPE, CSD, me Gemini, me ngā whakapūmau wafer kotahi mō ngā waeine tono me ngā waeine ASM.

Mā te whakakotahi i ngā hononga kaha me ngā OEM matua, te tohungatanga ki ngā rauemi me te mōhiotanga hangahanga, ka tukuna e vet te hoahoa tino pai mō tō tono.

Ko te Pūngao VET tekaihanga tūturu o ngā hua karāpeti me te karāpeti silicon kua whakaritea me te paninga CVD,ka taea te tukungā momongā wāhanga kua whakaritea mō te umanga semiconductor me te photovoltaic. ONō ngā umanga rangahau ā-rohe nui tō mātou tīma hangarau, ā, ka taea e rātou te whakarato i ngā otinga rauemi ngaio ake.māu.

Fngā āhuatanga o ā mātou hua:

1. Te ātete ki te waikura pāmahana teitei tae atu ki te 1700℃.
2. Te parakore teitei me tete ōritetanga o te wera
3. Ātete pai ki te waikura: waikawa, kawakore, tote me ngā matū waro.
4. He pakeke rawa, he mata kiato, he matūriki angiangi.
5. He roa ake te ora ratonga, he pakari ake

CVD SiC薄膜基本物理性能 Ngā āhuatanga ā-tinana taketake o te CVD SiCpaninga
性质 / Taonga	典型数值 / Uara Noa
晶体结构 / Hanganga Karaihe	Wāhanga β FCC多晶，主要为（111）取向
密度 / Kiato	3.21 karamu/cm³
硬度 / Te pakeketanga	2500 维氏硬度（500g kawenga）
晶粒大小 / Rahi o te Witi	2~10μm
纯度 / Te Parakore o te Matū	99.99995%
热容 / Te kaha wera	640 J·kg^-1·K^-1
升华温度 / Te Pāmahana Whakatōtō	2700℃
抗弯强度 / Kaha Whakapiko	415 MPa RT 4-ira
杨氏模量 / Te Tauwehenga o te Young	430 Gpa 4pt piko, 1300℃
导热系数 / Te whakamahanalTe kawe i te hiko	300W·m^-1·K^-1
热膨胀系数 / Te Whanuitanga Wera (CTE)	4.5×10^-6K^-1