CVD Silicon Carbide Coated Graphite Ring

Tsananguro pfupi:

Mhete yegirafiti yakaputirwa neVET Energy silicon carbide yakagadzirwa nesimbi yakagadzirwa kuti ishande zvakanaka uye yakavimbika kwenguva yakareba. Inodzivirira kupisa zvakanaka uye yakafanana pakupisa, yakachena, uye inodzivirira kukurwa kwevhu, zvichiita kuti ive mhinduro yakakwana yekugadzirisa wafer.

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Hunhu Hwakajairika hweBase Graphite Material:

Kuwanda Kunoonekwa:	1.85 g/cm3
Kuramba kweMagetsi:	11 μΩm
Simba reFlexural:	49 MPa (500kgf/cm2)
Kuoma kweGungwa:	58
Dota:	<5ppm
Kufambisa kwekupisa:	116 W/mK (100 kcal/mhr-℃)

Tinopa zvinhu zvakasiyana-siyana zvinodzivirira kupisa uye graphite zvema "reactors" ese aripo epitaxy reactors. Zvigadzirwa zvedu zvinosanganisira ma "barrel susceptors" eLPE units, ma "pancake susceptors" eLPE, CSD, uye maGemini units, uye ma "single-wafer susceptors" e "applied" uye ma "ASM units".

Nekubatanidza hukama hwakasimba nemakambani makuru eOEM, hunyanzvi hwezvinhu uye ruzivo rwekugadzira, chiremba wemhuka anopa dhizaini yakanakisisa yekushandisa kwako.

VET Energy ndiyo iyomugadziri chaiye wezvigadzirwa zve graphite ne silicon carbide zvakagadzirwa neCVD coating,anogona kupazvakasiyana-siyanazvikamu zvakagadzirirwa zve semiconductor uye photovoltaic industry. OChikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kupa mhinduro dzehunyanzvi.zvako.

FMitemo yezvigadzirwa zvedu:

1. Kudzivirira kupisa kwakanyanya kwe oxidation kusvika 1700℃.
2. Kuchena kwakanyanya uyekufanana kwekupisa
3. Kudzivirira ngura kwakanyanya: acid, alkali, munyu uye organic reagents.
4. Kuoma kwakanyanya, pamusoro pakaoma, zvidimbu zvitete.
5. Hupenyu hwebasa hwakareba uye hwakasimba

CVD SiC薄膜基本物理性能 Hunhu hweCVD SiCkuputira
性质 / Pfuma	典型数值 / Kukosha Kwakajairika
晶体结构 / Chimiro cheKristaro	Chikamu cheFCC β多晶，主要為（111）取向
密度 / Kuwanda kwehuwandu	3.21 g/cm³
硬度 / Kuomarara	2500 维氏硬度 (500g mutoro)
晶粒大小 / Saizi yeZviyo	2 ~ 10μm
纯度 / Kuchena kwemakemikari	99.99995%
热容 / Kugona Kupisa	640 J·kg^-1·K^-1
升华温度 / Kupisa kweSublimation	2700℃
抗弯强度 / Simba reKuchinjika	415 MPa RT ine mapoinzi mana
杨氏模量 / Modulus yeVadiki	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalKufambisa kwemhepo	300W·m^-1·K^-1
热膨胀系数 / Kuwedzera kweThermal (CTE)	4.5×10^-6K^-1