Giraangiraha Garaafiga ee CVD Silicon Carbide

Giraangiraha Dahaarka leh ee CVD Silicon Carbide Sawirka Lagu Soo Bandhigay

Sharaxaad Gaaban:

Faraantiga garaafka ee VET Energy silicon carbide-ka ah waa badeeco waxqabad sare leh oo loogu talagalay inay bixiso waxqabad joogto ah oo la isku halleyn karo muddo dheer. Waxay leedahay iska caabin kulayl oo aad u wanaagsan iyo isku mid ahaanshaha kulaylka, daahirnimo sare, iyo iska caabin nabaad-guur, taasoo ka dhigaysa xalka ugu habboon ee codsiyada warshadaynta wafer-ka.

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Sifooyinka Caadiga ah ee Walxaha Garaafiga Saldhigga ah:

Cufnaanta Muuqda:	1.85 g/cm3
Iska caabinta Korontada:	11 μΩm
Xoogga Laab-jeexa:	49 MPa (500kgf/cm2)
Adkaanta Xeebta:	58
Dambas:	<5ppm
Qaboojinta Kulaylka:	116 W/mK (100 kcal/mhr-℃)

Waxaan bixinaa noocyo kala duwan oo suuxdin iyo qaybo garaafit ah oo loogu talagalay dhammaan fal-galayaasha epitaxy ee hadda jira. Badeecadahayagu waxay ka kooban yihiin suuxdin foosto ah oo loogu talagalay cutubyada LPE, suuxdinta pancake ee cutubyada LPE, CSD, iyo Gemini, iyo suuxdinta hal-wafer ah ee cutubyada la mariyey iyo ASM.

Iyada oo la isku darayo iskaashi xooggan oo lala yeesho OEM-yada hormuudka ka ah, khibradda agabka iyo aqoonta wax soo saarka, dhakhtarka xoolaha ayaa bixiya naqshadda ugu habboon ee codsigaaga.

Tamarta VET waa Shaki kuma jiro insoo saaraha dhabta ah ee alaabada graphite iyo silicon carbide ee loo habeeyay oo leh dahaarka CVD,bixin karaakala duwanqaybo loo habeeyey warshadaha semiconductor iyo photovoltaic. OKooxda farsamada ee aad ka tirsan tahay waxay ka timaadaa hay'adaha cilmi-baarista ee ugu sarreeya gudaha, waxayna bixin karaan xalal agab xirfadeed oo dheeraad ahadiga.

Fcuntooyinka alaabtayada:

1. Iska caabinta oksaydhka heerkulka sare ilaa 1700℃.
2. Nadiifnimo sare iyoisku mid ahaanshaha kulaylka
3. Iska caabin aad u fiican oo daxalka ah: aashitada, alkali, milixda iyo walxaha dabiiciga ah.
4. Adkayn sare, dusha sare oo is haysta, iyo walxo yaryar.
5. Adeeg dheer iyo cimri dheer

CVD SiC薄膜基本物理性能 Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka
性质 / Hantida	典型数值 / Qiimaha Caadiga ah
晶体结构 / Qaab-dhismeedka Crystal	Marxaladda FCC β多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adkaanta	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Xaddiga Badarka	2 ~ 10μm
纯度 / Nadiifinta Kiimikada	99.99995%
热容 / Awoodda Kulaylka	640 J·kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700℃
抗弯强度 / Xoogga Laablaabashada	415 MPa RT 4-dhibcood
杨氏模量 / Modulus-ka Young	430 GPA 4pt laab, 1300℃
导热系数 / ThermalGudbinta	300W·m^-1·K^-1
热膨胀系数 / Ballaarinta Kulaylka (CTE)	4.5 × 10^-6K^-1