Tuam Tshoj Chaw Tsim Khoom SiC Coated Graphite MOCVD Epitaxy Susceptor

Kev Piav Qhia Luv:

Kev huv huv <5ppm
‣ Kev sib npaug zoo ntawm doping
‣ Kev ceev ceev thiab kev nplaum siab
‣ Zoo tiv thaiv xeb thiab carbon tsis kam

‣ Kev kho kom haum rau cov neeg ua haujlwm
‣ Lub sijhawm luv luv
‣ Kev muab khoom ruaj khov
‣ Kev tswj xyuas zoo thiab kev txhim kho tas mus li

Epitaxy ntawm GaN ntawm Sapphire(RGB/Mini/Micro LED);
Epitaxy ntawm GaN ntawm Si Substrate(UVC);
Epitaxy ntawm GaN ntawm Si Substrate(Cov Khoom Siv Hluav Taws Xob);
Epitaxy ntawm Si ntawm Si Substrate(Kev sib xyaw ua ke ntawm lub voj voog);
Epitaxy ntawm SiC ntawm SiC Substrate(Cov khoom hauv qab);
Epitaxy ntawm InP rau InP

Xa email rau peb Rub tawm ua PDF

Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

MOCVD Susceptor zoo yuav online hauv Suav teb

Ib lub wafer yuav tsum tau dhau los ntawm ntau kauj ruam ua ntej nws npaj siv rau hauv cov khoom siv hluav taws xob. Ib qho txheej txheem tseem ceeb yog silicon epitaxy, uas cov wafers raug nqa ntawm graphite susceptors. Cov khoom thiab qhov zoo ntawm cov susceptors muaj qhov cuam tshuam tseem ceeb rau qhov zoo ntawm wafer's epitaxial txheej.

Rau cov theem tso zaj duab xis nyias xws li epitaxy lossis MOCVD, VET muab cov khoom siv graphite ntshiab heev uas siv los txhawb cov substrates lossis "wafers". Hauv plawv ntawm cov txheej txheem, cov khoom siv no, epitaxy susceptors lossis satellite platforms rau MOCVD, thawj zaug raug rau qhov chaw tso zaj duab xis:

● Kub heev.
● Lub tshuab nqus tsev siab.
● Siv cov roj ua ntej uas muaj zog heev.
● Tsis muaj kuab paug, tsis muaj tev tawv.
● Tiv thaiv cov kua qaub muaj zog thaum lub sijhawm ntxuav

VET Energy yog lub chaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide uas muaj txheej txheem rau kev lag luam semiconductor thiab photovoltaic. Peb pab neeg tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tebchaws, tuaj yeem muab cov kev daws teeb meem tshaj lij rau koj.

Peb pheej tsim cov txheej txheem siab heev los muab cov ntaub ntawv zoo dua, thiab tau ua haujlwm tawm ib txoj kev siv tshuab tshwj xeeb uas tau txais patent, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis yooj yim tawg.

Cov yam ntxwv ntawm peb cov khoom:

1. Kev tiv thaiv oxidation kub siab txog li 1700 ℃.
2. Kev huv siab thiab kev sib npaug ntawm thermal
3. Kev tiv thaiv xeb zoo heev: kua qaub, alkali, ntsev thiab cov tshuaj reagents organic.
4. Kev nyuaj siab, qhov chaw me me, cov khoom me me.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej
Vaj tse	Tus nqi ib txwm muaj
Cov Qauv Siv Crystal	FCC β theem polycrystalline, feem ntau yog (111) kev taw qhia
Qhov Ceev	3.21 g/cm³
Qhov nyuaj	2500 Vickers hardness (500g thauj khoom)
Cov nplej SiZe	2 ~ 10μm
Kev Ntshiab Tshuaj	99.99995%
Peev Xwm Kub	640 J·kg^-1·K^-1
Kub Sublimation	2700 ℃
Lub zog flexural	415 MPa RT 4-point
Young's Modulus	430 Gpa 4pt khoov, 1300 ℃
Kev Ua Kub	300W·m^-1·K^-1
Kev Nthuav Dav Kub (CTE)	4.5 × 10^-6K^-1