Onye nrụpụta China SiC graphite ejiri MOCVD mee ihe mkpuchi Epitaxy Suscepter

Foto a na-egosi na onye nrụpụta China SiC Graphite ejiri MOCVD Epitaxy Suscepter kpuchie

Nkọwa Dị Mkpirikpi:

Ịdị ọcha < 5ppm
‣ Nha nhata dị mma nke doping
‣ Njupụta dị elu na njikọta
‣ Ezigbo mgbochi mmebi na iguzogide carbon

‣ Nhazi ọkachamara
‣ Obere oge tupu oge
‣ Ngwa ahịa kwụsiri ike
‣ Njikwa mma na mmezi mgbe niile

Epitaxy nke GaN na Sapphire(RGB/Mini/Micro LED);
Epitaxy nke GaN na Si Substrate(UVC);
Epitaxy nke GaN na Si Substrate(Ngwaọrụ eletrọniki);
Epitaxy nke Si na Si Substrate(Sekit ejikọtara ọnụ);
Epitaxy nke SiC na SiC Substrate(Ihe e ji mee ihe n'okpuru ala);
Epitaxy nke InP na InP

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Nkọwa Ngwaahịa

Akara Ngwaahịa

Ịzụta MOCVD Suscepter dị elu n'ịntanetị na China

A ga-eji wafer gafere ọtụtụ usoro tupu e jiri ya mee ihe na ngwaọrụ eletrọniki. Otu usoro dị mkpa bụ silicon epitaxy, ebe a na-ebu wafers na graphite susceptors. Àgwà na àgwà nke wafers nwere mmetụta dị mkpa na ịdị mma nke oyi akwa epitaxial nke wafer.

Maka usoro ntinye ihe nkiri dị gịrịgịrị dịka epitaxy ma ọ bụ MOCVD, VET na-enye ngwa graphite dị ọcha nke ejiri kwado ihe ndị e ji eme ihe ma ọ bụ "wafers". Isi ihe dị na usoro a bụ na a na-ebu ụzọ tinye akụrụngwa a, ihe ndị na-egbochi epitaxy ma ọ bụ ikpo okwu satịlaịtị maka MOCVD:

● Okpomọkụ dị elu.
● Igwe ikuku dị elu.
● Ojiji nke ihe ndị na-ebute gas dị ike.
● Enweghị mmetọ, enweghịkwa mkpụcha akpụkpọ ahụ.
● Nguzogide asịd siri ike n'oge ọrụ nhicha

VET Energy bụ ezigbo onye na-emepụta ngwaahịa graphite na silicon carbide ahaziri ahazi nke nwere mkpuchi maka ụlọ ọrụ semiconductor na photovoltaic. Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.

Anyị na-emepụta usoro dị elu mgbe niile iji nye ihe ndị ka mma, anyị arụpụtakwala teknụzụ pụrụ iche nke nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi ahụ na ihe mkpuchi ahụ sie ike ma ghara ịdị mfe iwepụ ya.

Atụmatụ nke ngwaahịa anyị:

1. Oke okpomọkụ na-eguzogide oxidation ruo 1700℃.
2. Ịdị ọcha dị elu na ịdị n'otu okpomọkụ
3. Ezigbo nguzogide nchara: acid, alkali, nnu na ihe ndị sitere n'okike.
4. Ike siri ike, elu dị obere, obere ihe.
5. Ndụ ọrụ dị ogologo ma na-adịgide adịgide karịa

CVD SiC Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
Akụ na ụba	Uru nkịtị
Ọdịdị kristal	FCC β phase polycrystalline, ọkachasị (111) ntụzịaka
Njupụta	3.21 g/cm³
Ike siri ike	Ike Vickers 2500 (ibu 500g)
SiZe ọka	2 ~ 10μm
Ọcha Kemịkalụ	99.99995%
Ike Okpomọkụ	640 J·kg^-1·K^-1
Okpomọkụ Sublimation	2700℃
Ike nke Flexural	415 MPa RT isi ihe anọ
Modulu Young	430 GPA 4pt gbagọrọ agbagọ, 1300℃
Ọgbakọ okpomọkụ	300W·m^-1·K^-1
Mgbasawanye Okpomọkụ (CTE)	4.5 × 10^-6K^-1