Silicon carbide (SiC) yog ib yam khoom siv semiconductor tshiab. Silicon carbide muaj qhov sib txawv loj (kwv yees li 3 npaug ntawm silicon), lub zog tseem ceeb ntawm thaj chaw (kwv yees li 10 npaug ntawm silicon), kev ua kom sov siab (kwv yees li 3 npaug ntawm silicon). Nws yog ib yam khoom siv semiconductor tseem ceeb rau tiam tom ntej. SiC coatings siv dav hauv kev lag luam semiconductor thiab hnub ci photovoltaics. Tshwj xeeb, cov susceptors siv hauv kev loj hlob epitaxial ntawm LEDs thiab Si ib leeg siv lead ua epitaxy xav tau kev siv SiC coating. Vim yog qhov sib txawv ntawm LEDs hauv kev lag luam teeb pom kev zoo thiab kev tso saib, thiab kev loj hlob ntawm kev lag luam semiconductor,Cov khoom siv SiC txheejkev cia siab zoo heev.
DAIM NTAWV THOV
Kev huv huv, SEM qauv, kev tshuaj xyuas tuab ntawmSiC txheej
Qhov huv ntawm SiC txheej ntawm graphite los ntawm kev siv CVD yog siab txog 99.9995%. Nws cov qauv yog fcc. Cov yeeb yaj kiab SiC txheej ntawm graphite yog (111) raws li pom hauv cov ntaub ntawv XRD (Daim Duab 1) qhia txog nws cov khoom siv crystalline siab. Lub thickness ntawm SiC zaj duab xis yog sib xws heev raws li pom hauv Daim Duab 2.
Daim Duab 2: qhov tuab sib xws ntawm SiC zaj duab xis SEM thiab XRD ntawm beta-SiC zaj duab xis ntawm graphite
Cov ntaub ntawv SEM ntawm CVD SiC zaj duab xis nyias, qhov loj me ntawm siv lead ua yog 2 ~ 1 Opm
Cov qauv siv lead ua ntawm zaj duab xis CVD SiC yog lub ntsej muag-centered cubic qauv, thiab zaj duab xis kev loj hlob orientation yog ze li ntawm 100%.
Cov khoom siv silicon carbide (SiC) coatedLub hauv paus yog lub hauv paus zoo tshaj plaws rau cov silicon siv lead ua ib leeg thiab GaN epitaxy, uas yog lub hauv paus tseem ceeb ntawm lub cub tawg epitaxy. Lub hauv paus yog cov khoom siv tseem ceeb rau cov monocrystalline silicon rau cov voj voog loj. Nws muaj kev ntshiab siab, tiv taus kub siab, tiv taus corrosion, huab cua zoo thiab lwm yam khoom siv zoo heev.
Daim ntawv thov khoom thiab siv
Txheej txheej graphite rau kev loj hlob ntawm ib qho siv lead ua silicon epitaxial Haum rau Aixtron tshuab, thiab lwm yam. Txheej tuab: 90 ~ 150um. Txoj kab uas hla ntawm lub wafer crater yog 55 hli.
Lub sijhawm tshaj tawm: Lub Peb Hlis-14-2022