Karubide ya Silicon (SiC) ni ibikoresho bishya bya semiconductor. Karubide ya Silicon ifite icyuho kinini (hafi silicon inshuro 3), imbaraga zikomeye cyane (hafi silicon inshuro 10), ubwikorezi bwinshi bw'ubushyuhe (hafi silicon inshuro 3). Ni ibikoresho by'ingenzi bya semiconductor byo mu gisekuru gitaha. Irangi rya SiC rikoreshwa cyane mu nganda za semiconductor na photovoltaics z'izuba. By'umwihariko, susceptors zikoreshwa mu gukura kwa epitaxial kwa LED na Si single crystal epitaxy bisaba gukoresha SiC coating. Bitewe n'iterambere rikomeye rya LED mu nganda z'amatara n'ibyerekanwa, ndetse n'iterambere rikomeye ry'inganda za semiconductor,Igicuruzwa cyo gusiga SiCamahirwe ni meza cyane.
UMURIMO W'UBUSABIZI
Ubuziranenge, Imiterere ya SEM, isesengura ry'ubugari bwaGutwikiriza SiC
Ubuziranenge bw'imyambaro ya SiC kuri grafiti hakoreshejwe CVD buri hejuru cyane kugeza kuri 99.9995%. Imiterere yayo ni fcc. Filimi za SiC zitwikiriwe kuri grafiti zigana (111) nk'uko bigaragara mu makuru ya XRD (Ishusho ya 1) bigaragaza ubwiza bwayo buri hejuru bwa kristale. Ubunini bwa filime ya SiC burangana cyane nk'uko bigaragara ku Ishusho ya 2.
Igishushanyo cya 2: ubugari bw'amafilimi ya SiC SEM na XRD ya filimi ya beta-SiC kuri grafiti
Amakuru ya SEM ya CVD SiC thin film, ingano ya crystal ni 2 ~ 1 Opm
Imiterere ya kristalo ya CVD SiC filme ni imiterere ya cubic ishingiye ku maso, kandi icyerekezo cyo gukura kwa filme kiri hafi 100%.
Karubide ya silikoni (SiC) itwikiriweishingiro ni ryo shingiro ryiza cyane rya silikoni imwe ya kristale na GaN epitaxy, ikaba ari yo gice cy'ingenzi cy'itanura rya epitaxy. Ishingiro ni igikoresho cy'ingenzi cya silikoni ya monocrystalline ku miyoboro minini ihuriweho. Ifite ubuziranenge bwinshi, irwanya ubushyuhe bwinshi, irwanya ingese, ifata neza umwuka n'ibindi bintu byiza cyane.
Imikoreshereze n'ikoreshwa ry'ibicuruzwa
Igishishwa cya grafiti gishyirwa ku gikoresho cyo gukura cya silikoni epitaxial gikozwe muri kristale imwe. Gikwiriye imashini za Aixtron, nibindi. Ubunini bw'igishishwa: 90 ~ 150um. Umurambararo w'ikigega cya wafer ni 55mm.
Igihe cyo kohereza ubutumwa: Werurwe-14-2022