Carbohydrate-ka Silicon (SiC) waa walax cusub oo semiconductor ah. Carbohydrate-ka Silicon wuxuu leeyahay farqi weyn oo xarig ah (qiyaastii 3 jeer silicon), xoog sare oo muhiim ah oo goobta ah (qiyaastii 10 jeer silicon), koronto-qaadis heer sare ah (qiyaastii 3 jeer silicon). Waa walax semiconductor-ka jiilka soo socda oo muhiim ah. Dahaarka SiC waxaa si weyn loogu isticmaalaa warshadaha semiconductor-ka iyo photovoltaics-ka qorraxda. Gaar ahaan, susceptors-ka loo isticmaalo koritaanka epitaxial ee LED-yada iyo single crystal epitaxy-ga Si waxay u baahan yihiin isticmaalka dahaarka SiC. Sababtoo ah isbeddelka xooggan ee LED-yada ee warshadaha iftiinka iyo bandhigga, iyo horumarka xooggan ee warshadaha semiconductor-ka,Badeecada dahaarka SiCmustaqbalku aad buu u wanaagsan yahay.
Goobta Codsiga
Nadiifnimo, Qaab-dhismeedka SEM, falanqaynta dhumucdaDahaarka SiC
Nadiifnimada dahaarka SiC ee garaafitka iyadoo la adeegsanayo CVD waa ilaa 99.9995%. Qaab-dhismeedkiisu waa fcc. Filimada SiC ee lagu dahaadhay garaafitka waxay u janjeeraan (111) sida ku cad xogta XRD (Jaantuska 1) taasoo muujinaysa tayadiisa sare ee kirismaska. Dhumucda filimka SiC aad bay isugu mid tahay sida ku cad Sawirka 2.
Jaantuska 2: isku-dhafka dhumucda filimada SiC SEM iyo XRD ee filimka beta‐SiC ee ku yaal garaafit
Xogta SEM ee filimka khafiifka ah ee CVD SiC, cabbirka kiristaalka waa 2 ~ 1 Opm
Qaab-dhismeedka kiristaalka ee filimka CVD SiC waa qaab-dhismeed saddex-jibbaaran oo wejiga ku xiran, jihada koritaanka filimkuna waxay ku dhowdahay 100%
Dahaarka silikoon carbide (SiC)Saldhiggu waa saldhigga ugu fiican ee silicon-ka keli ah iyo GaN epitaxy, kaas oo ah qaybta ugu muhiimsan ee foornada epitaxy. Saldhiggu waa qalab wax soo saar oo muhiim u ah silicon-ka monocrystalline ee wareegyada waaweyn ee isku dhafan. Waxay leedahay daahirnimo sare, iska caabin heerkul sare, iska caabin daxaleed, cidhiidhi hawo oo wanaagsan iyo astaamo kale oo agab oo aad u fiican.
Adeegsiga iyo isticmaalka alaabta
Dahaarka saldhigga Graphite ee koritaanka epitaxial silicon crystalline hal kiristaalo ah Ku habboon mashiinnada Aixtron, iwm. Dhumucda dahaarka: 90 ~ 150um. Dhexroorka godka wafer-ka waa 55mm.
Waqtiga boostada: Maarso-14-2022