Silicon carbide (SiC) chinhu chitsva che semiconductor chakagadzirwa ne compound. Silicon carbide ine band gap yakakura (inenge silicon katatu), high critical field strength (inenge silicon kagumi), high thermal conductivity (inenge silicon katatu). Ichinhu chakakosha che semiconductor chechizvarwa chinotevera. SiC coatings inoshandiswa zvakanyanya muindasitiri ye semiconductor uye solar photovoltaics. Kunyanya, susceptors dzinoshandiswa mukukura kwe epitaxial kwema LED ne Si single crystal epitaxy dzinoda kushandiswa kweSiC coating. Nekuda kwekuwedzera kwakasimba kwema LED muindasitiri yemwenje ne display, uye kukura kwakasimba kweindasitiri ye semiconductor,Chigadzirwa chekuputira cheSiCtarisiro dzakanaka kwazvo.
MUNDA WEKUSHANDISA
Kuchena, Maumbirwo eSEM, kuongororwa kwekukora kweSiC coating
Kuchena kweSiC coatings pagraphite uchishandisa CVD kwakakwira kusvika 99.9995%. Maumbirwo ayo ifcc. Mafirimu eSiC akaputirwa pagraphite akatarisana (111) sezvakaratidzwa muXRD data (Mufananidzo 1) zvichiratidza kuti ine crystalline yakakwira. Ukobvu hwefirimu reSiC hwakafanana zvakanyanya sezvakaratidzwa muMufananidzo 2.
Mufananidzo 2: Kukora kwakafanana kwemafirimu eSiC SEM uye XRD yefirimu re beta-SiC pagraphite
Data reSEM reCVD SiC thin film, saizi yekristaro ndeye 2~1 Opm
Maumbirwo ekristaro efirimu reCVD SiC akaumbwa necubic ine chitarisiko chakatarisana, uye kukura kwefirimu kwakanangana ne100%.
Silicon carbide (SiC) yakafukidzwaHwaro ndiyo hwaro hwakanakisisa hwe single crystal silicon neGaN epitaxy, inova ndiyo chikamu chikuru che epitaxy furnace. Hwaro ichinhu chakakosha pakugadzirwa kwe monocrystalline silicon yemaseketi makuru akabatanidzwa. Ine kuchena kwakanyanya, inodzivirira kupisa kwakanyanya, inodzivirira ngura, inosimbisa mhepo zvakanaka uye zvimwe zvinhu zvakanaka.
Kushandiswa uye kushandiswa kwechigadzirwa
Kuvhara pasi pegirafiti yekukura kwegirazi rimwe chete resilicon epitaxial. Yakakodzera michina yeAixtron, nezvimwewo. Ukobvu hwekufukidza: 90~150um. Dhayamita yewafer crater i55mm.
Nguva yekutumira: Kurume-14-2022