He rauemi haurua-whakakotahi hou te Silicon carbide (SiC). He nui te āputa roopu o te Silicon carbide (tata ki te 3 ngā wā o te silicon), he kaha teitei o te mara arohaehae (tata ki te 10 ngā wā o te silicon), he nui te kawe wera (tata ki te 3 ngā wā o te silicon). He rauemi haurua-whakakotahi nui o te whakatipuranga e whai ake nei. He whānuitia te whakamahinga o ngā paninga SiC i roto i te umanga haurua-whakakotahi me te photovoltaics solar. Ina koa, ko ngā suceptors e whakamahia ana i roto i te tipu epitaxial o ngā LED me te epitaxy tioata kotahi Si me whakamahi i te paninga SiC. Nā te pikinga kaha o ngā LED i roto i te umanga rama me te whakaaturanga, me te whanaketanga kaha o te umanga haurua-whakakotahi,Hua paninga SiChe tino pai ngā tūmanakohanga.
MĀRA TONO
Te Parakore, te Hanganga SEM, te tātaritanga matotoru oPaninga SiC
Ko te parakore o ngā paninga SiC i runga i te karāpeti mā te whakamahi i te CVD e eke ana ki te 99.9995%. Ko tōna hanganga he fcc. Ko ngā kiriata SiC i pania ki te karāpeti he (111) te aronga e whakaaturia ana i roto i ngā raraunga XRD (Pikitia 1) e tohu ana i tōna kounga tioata teitei. He tino ōrite te matotoru o te kiriata SiC e whakaaturia ana i te Pikitia 2.
Pikitia 2: te matotoru ōrite o ngā kiriata SiC SEM me te XRD o te kiriata beta-SiC i runga i te karāhe
Ko ngā raraunga SEM o te kiriata angiangi CVD SiC, ko te rahi o te tioata he 2~1 Opm
Ko te hanganga tioata o te kiriata CVD SiC he hanganga pūtoru e anga ana ki te mata, ā, e tata ana te ahunga tipu o te kiriata ki te 100%.
Kua pania ki te silicon carbide (SiC)Ko te turanga te turanga pai rawa atu mō te silicon tioata kotahi me te epitaxy GaN, koinei te wāhanga matua o te oumu epitaxy. Ko te turanga he taputapu whakaputa matua mō te silicon tioata kotahi mō ngā ara iahiko whakauru nui. He tino parakore, he ātete pāmahana teitei, he ātete waikura, he pai te piri ki te hau me ētahi atu āhuatanga rauemi tino pai.
Te tono me te whakamahinga o te hua
Paninga turanga graphite mō te tipu epitaxial silicon karaihe kotahiHe pai mō ngā mīhini Aixtron, me ētahi atuMatotoru paninga: 90~150umKo te whānui o te rua wafer he 55mm.
Wā tuku: Maehe-14-2022