Silicon carbide (SiC) ndi chinthu chatsopano cha semiconductor. Silicon carbide ili ndi band gap yayikulu (pafupifupi katatu kuposa silicon), high critical field strength (pafupifupi katatu kuposa silicon), high thermal conductivity (pafupifupi katatu kuposa silicon). Ndi chinthu chofunikira kwambiri cha semiconductor cha m'badwo wotsatira. Zophimba za SiC zimagwiritsidwa ntchito kwambiri mumakampani opanga semiconductor ndi solar photovoltaics. Makamaka, zophimba zomwe zimagwiritsidwa ntchito pakukula kwa epitaxial kwa ma LED ndi Si single crystal epitaxy zimafuna kugwiritsa ntchito SiC coating. Chifukwa cha kukwera kwamphamvu kwa ma LED mumakampani opanga magetsi ndi zowonetsera, komanso chitukuko champhamvu cha makampani opanga semiconductor,Chovala cha SiCMapeto ake ndi abwino kwambiri.
MUNDA WOPHUNZIRA
Chiyero, Kapangidwe ka SEM, kusanthula makulidwe aChophimba cha SiC
Kuyera kwa zophimba za SiC pa graphite pogwiritsa ntchito CVD kuli kokwera kufika pa 99.9995%. Kapangidwe kake ndi fcc. Mafilimu a SiC opakidwa pa graphite ali ndi (111) motsatira zomwe zawonetsedwa mu data ya XRD (Chithunzi 1) zomwe zikusonyeza kuti ndi yapamwamba kwambiri. Kukhuthala kwa filimu ya SiC ndi kofanana kwambiri monga momwe zasonyezedwera mu Chithunzi 2.
Chithunzi 2: makulidwe ofanana a mafilimu a SiC SEM ndi XRD a filimu ya beta-SiC pa graphite
Deta ya SEM ya filimu yopyapyala ya CVD SiC, kukula kwa kristalo ndi 2 ~ 1 Opm
Kapangidwe ka kristalo ka filimu ya CVD SiC ndi kapangidwe ka cubic kozungulira nkhope, ndipo kukula kwa filimuyo kuli pafupi 100%.
Chokutidwa ndi silicon carbide (SiC)Maziko ake ndi maziko abwino kwambiri a silicon imodzi ya kristalo ndi GaN epitaxy, yomwe ndi gawo lalikulu la ng'anjo ya epitaxy. Maziko ake ndi chowonjezera chofunikira kwambiri pakupanga silicon ya monocrystalline pamabwalo akuluakulu ophatikizika. Ali ndi chiyero chapamwamba, kukana kutentha kwambiri, kukana dzimbiri, kulimba kwa mpweya wabwino komanso zinthu zina zabwino kwambiri.
Kugwiritsa ntchito ndi kugwiritsa ntchito kwa chinthucho
Chophimba maziko a graphite cha kukula kwa silicon epitaxial imodzi. Choyenera makina a Aixtron, ndi zina zotero. Kukhuthala kwa chophimba: 90~150um. M'mimba mwake mwa chibowo cha wafer ndi 55mm.
Nthawi yotumizira: Marichi-14-2022