ʻO Silicon carbide (SiC) kahi mea semiconductor hui hou. Loaʻa i ka Silicon carbide kahi ākea band nui (ma kahi o 3 mau manawa silicon), ikaika kahua koʻikoʻi kiʻekiʻe (ma kahi o 10 mau manawa silicon), conductivity thermal kiʻekiʻe (ma kahi o 3 mau manawa silicon). He mea semiconductor hanauna hou koʻikoʻi ia. Hoʻohana nui ʻia nā uhi SiC i ka ʻoihana semiconductor a me nā photovoltaics solar. Ma ke ʻano kūikawā, ʻo nā susceptors i hoʻohana ʻia i ka ulu ʻana o ka epitaxial o nā LED a me ka epitaxy kristal hoʻokahi Si e pono ai ka hoʻohana ʻana i ka uhi SiC. Ma muli o ke ʻano ikaika o nā LED i ka ʻoihana kukui a me ka hōʻike, a me ka hoʻomohala ikaika o ka ʻoihana semiconductor,Huahana uhi SiCmaikaʻi loa nā manaʻolana.
KAHU NOI
Maʻemaʻe, ʻano SEM, loiloi mānoanoa oUhi ʻana SiC
ʻO ke kiʻekiʻe o ka maʻemaʻe o nā uhi SiC ma luna o ka graphite ma ka hoʻohana ʻana iā CVD he 99.9995%. ʻO kona ʻano he fcc. ʻO nā kiʻiʻoniʻoni SiC i uhi ʻia ma luna o ka graphite ua (111) i kuhikuhi ʻia e like me ka mea i hōʻike ʻia ma ka ʻikepili XRD (Fig.1) e hōʻike ana i kona ʻano crystalline kiʻekiʻe. ʻO ka mānoanoa o ka kiʻiʻoniʻoni SiC he like loa ia e like me ka mea i hōʻike ʻia ma ke Kiʻi 2.
Kiʻi 2: ʻano mānoanoa like o nā kiʻiʻoniʻoni SiC SEM a me XRD o ka kiʻiʻoniʻoni beta-SiC ma ka graphite
ʻIkepili SEM o ka ʻili lahilahi CVD SiC, ʻo ka nui o ke aniani he 2 ~ 1 Opm
ʻO ke ʻano kristal o ka kiʻiʻoniʻoni CVD SiC he ʻano cubic i kau ʻia ma ke alo, a ua kokoke ke kuhikuhi ulu ʻana o ka kiʻiʻoniʻoni i 100%.
Uhi ʻia ʻo Silicon carbide (SiC)ʻO ke kumu ke kumu maikaʻi loa no ka silicon kristal hoʻokahi a me ka GaN epitaxy, ʻo ia ka ʻāpana koʻikoʻi o ka umu epitaxy. ʻO ke kumu kahi mea hana koʻikoʻi no ka silicon monocrystalline no nā kaapuni hoʻohui nui. Loaʻa iā ia ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe, ke kūpaʻa i ka pala, ka paʻa maikaʻi o ka ea a me nā ʻano mea maikaʻi ʻē aʻe.
Ka hoʻopili ʻana a me ka hoʻohana ʻana i ka huahana
ʻO ke kumu graphite no ka ulu ʻana o ka silicon epitaxial kristal hoʻokahi Kūpono no nā mīkini Aixtron, a pēlā aku Ka mānoanoa o ke uhi ʻana: 90 ~ 150um ʻO ke anawaena o ka lua wafer he 55mm.
Ka manawa hoʻouna: Malaki-14-2022