SiC Coated Graphite Susceptor Thiab Carrier Rau Wafer

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VET Energy SiC Coated Graphite Susceptor yog cov khoom ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev. Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.

 

 


  • Khoom siv:High purity isostatic graphite
  • Purification: <5 ppm
  • Txheej:CVD-SiC, CVD-TaC, Pyro-carbon
  • OEM ODM:Muaj
  • Product Detail

    Khoom cim npe

    SiC coated graphite suscetporyog ib feem tseem ceeb siv nyob rau hauv ntau yam semiconductor manufacturing txheej txheem. Peb siv peb cov cuab yeej patented los ua SiC coated suscetpor nrog purity siab heev, zoo txheej uniformity thiab ib tug zoo heev kev pab cuam lub neej, nrog rau cov tshuaj tiv thaiv siab thiab thermal stability.

    Feature ntawm peb cov khoom:

    1. Kub kub oxidation tsis kam mus txog 1700 ℃.
    2. High purity thiab thermal uniformity
    3. Zoo heev corrosion kuj: acid, alkali, ntsev thiab organic reagents.
    4. High hardness, compact nto, zoo hais.
    5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

    CVD SiC薄膜基本物理性能

    Basic Physical Properties ntawm CVD SiCtxheej

    性质 / Khoom

    典型数值 / Tus nqi

    晶体结构 / Crystal Structure

    FCC β theem多晶, 主要为(111) Ib

    密度 / Ceev

    3.21 g / cm³

    硬度 / Hardness

    2500 维氏硬度 (500g load)

    晶粒大小 / Grain SiZe

    2 ~ 10 hli

    纯度 / Tshuaj Purity

    99.99995%

    Cov duab / Kub Muaj Peev Xwm

    6 40j kg-1· K-1

    升华温度 / Sublimation kub

    2700 ℃

    抗弯强度 / Flexural zog

    415 MPa RT 4-point

    杨氏模量 / Young's Modulus

    430 Gpa 4pt khoov, 1300 ℃

    导热系数 / KublKev coj ua

    300 Wm-1· K-1

    热膨胀系数 / Thermal Expansion (CTE)

    4.5 × 10-6K-1

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    VET Energy Graphite

    2

    VET Energy yog cov chaw tsim khoom lag luam tsom rau R&D thiab tsim cov khoom siv high-end xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho mob xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, tshiab zog, metalclurgy.

    Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb saum toj kawg nkaus hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.

    VET Energy zoo muaj xws li:
    • Tus kheej lub Hoobkas thiab kev kuaj xyuas;
    • Kev lag luam-ua purity theem thiab zoo;
    • Tus nqi sib tw & Lub sijhawm xa khoom sai;
    • Ntau lub koom haum kev lag luam thoob ntiaj teb;

    Peb zoo siab tos txais koj tuaj xyuas peb lub Hoobkas thiab chav kuaj txhua lub sijhawm!

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