SiC Coated Graphite Susceptor Thiab Carrier Rau Wafer

Kev Piav Qhia Luv:

VET Zog SiC Coated Graphite Susceptor yog cov khoom ua tau zoo uas tsim los muab kev ua haujlwm zoo thiab txhim khu kev qha rau lub sijhawm ntev. Nws muaj kev tiv taus cua sov zoo heev thiab kev sib xws ntawm thermal, kev ntshiab siab, kev tiv taus kev yaig, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau kev siv wafer.

Khoom siv:High purity isostatic graphite

Kev ntxuav kom huv: <5ppm

Txheej:CVD-SiC, CVD-TaC, Pyro-carbon

OEM ODM:Muaj

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Cov Lus Qhia Txog Khoom

Cov Cim Npe Khoom

SiC coated graphite suscetporyog ib qho tseem ceeb uas siv rau hauv ntau yam txheej txheem tsim khoom semiconductor. Peb siv peb cov thev naus laus zis patented los ua cov SiC coated suscetpor nrog kev ntshiab siab heev, kev sib npaug zoo thiab lub neej ua haujlwm zoo heev, nrog rau kev tiv thaiv tshuaj lom neeg siab thiab kev ruaj khov thermal.

Cov yam ntxwv ntawm peb cov khoom:

1. Kev tiv thaiv oxidation kub siab txog li 1700 ℃.
2. Kev huv siab thiab kev sib npaug ntawm thermal
3. Kev tiv thaiv xeb zoo heev: kua qaub, alkali, ntsev thiab cov tshuaj reagents organic.
4. Kev nyuaj siab, qhov chaw me me, cov khoom me me.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC薄膜基本物理性能 Cov khoom siv lub cev yooj yim ntawm CVD SiCtxheej
性质 / Khoom vaj khoom tsev	典型数值 / Tus nqi ib txwm muaj
晶体结构 / Cov Qauv Siv Crystal	FCC β theem多晶, 主要为(111) Ib
密度 / Qhov Ceev	3.21 g/cm³
硬度 / Qhov nyuaj	2500 维氏硬度 (500g load)
晶粒大小 / Cov nplej loj	2 ~ 10μm
纯度 / Kev Ntshiab Tshuaj	99.99995%
Cov duab / Peev Xwm Kub	640 J·kg^-1·K^-1
升华温度 Kub Sublimation	2700 ℃
抗弯强度 Lub zog flexural	415 MPa RT 4-point
杨氏模量 / Cov Modulus Hluas	430 Gpa 4pt khoov, 1300 ℃
导热系数 / ThermalKev coj ua hluav taws xob	300W·m^-1·K^-1
热膨胀系数 / Kev nthuav dav thermal (CTE)	4.5 × 10^-6K^-1

VET Zog yog ib lub chaw tsim khoom uas tsom mus rau R & D thiab kev tsim cov khoom siv siab heev xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.

Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.

Cov txiaj ntsig ntawm VET Energy suav nrog:
• Muaj lub Hoobkas thiab chaw kuaj mob tshaj lij;
• Cov qib kev huv thiab qhov zoo uas ua tus thawj coj hauv kev lag luam;
• Tus nqi sib tw & Lub sijhawm xa khoom sai;
• Kev koom tes ntau yam lag luam thoob ntiaj teb;

Peb txais tos koj tuaj xyuas peb lub Hoobkas thiab chaw kuaj mob txhua lub sijhawm!