I-SiC Coated Graphite Susceptor kunye ne-Carrier ye-Wafer

Inkcazo emfutshane:

I-VET Energy SiC Coated Graphite Susceptor yimveliso esebenza kakuhle kakhulu eyenzelwe ukubonelela ngokusebenza okuzinzileyo nokuthembekileyo ixesha elide. Inokumelana okuhle kakhulu nobushushu kunye nokufana kobushushu, ubunyulu obuphezulu, ukumelana nokukhukuliseka, nto leyo eyenza ukuba ibe sisisombululo esifanelekileyo sokusetyenziswa kwe-wafer.

Izixhobo:I-graphite ye-isostatic ecocekileyo kakhulu

Ukuhlanjululwa: <5ppm

Ukwaleka:I-CVD-SiC, i-CVD-TaC, i-Pyro-carbon

I-OEM ODM:Iyafumaneka

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-SiC egqunywe ngegrafiti egqunywe yi-suscetporlicandelo eliphambili elisetyenziswa kwiinkqubo ezahlukeneyo zokwenziwa kwee-semiconductor. Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza i-suscetpor egqunywe yi-SiC ibe nobunyulu obuphezulu kakhulu, ukufana okuhle kokugqunywa kunye nobomi benkonzo obuhle kakhulu, kunye nokumelana okuphezulu kweekhemikhali kunye neempawu zozinzo lobushushu.

Iimpawu zeemveliso zethu:

1. Ukumelana ne-oxidation yobushushu obuphezulu ukuya kuthi ga kwi-1700℃.
2. Ubunyulu obuphezulu kunye nokufana kobushushu
3. Ukumelana nokugqwala okugqwesileyo: i-asidi, i-alkali, ityuwa kunye nee-reagents ze-organic.
4. Ubulukhuni obuphezulu, umphezulu oxineneyo, amasuntswana amancinci.
5. Ubomi benkonzo obude kwaye buhlala ixesha elide

I-CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko zomzimba ze-CVD SiCugqubuthelo
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lwekristale	Isigaba se-FCC β多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ubulukhuni	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Ubukhulu beenkozo	2 ~ 10μm
纯度 / Ucoceko lweekhemikhali	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Ubushushu bokunyibilikisa	2700℃
抗弯强度 / Amandla okugobeka	I-415 MPa RT 4-point
杨氏模量 / Imodulus yoLutsha	I-430 Gpa 4pt bend, 1300℃
导热系数 / I-ThermalUkuqhuba	300W·m^-1·K^-1
热膨胀系数 / Ukwandiswa kobushushu (CTE)	4.5×10^-6K^-1

I-VET Energy ngumvelisi ochwephesha ogxile kwi-R&D kunye nemveliso yezinto eziphambili ezifana ne-graphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njl. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.

Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.

Iingenelo ze-VET Energy ziquka:
• Ilabhoratri yakho yomzi-mveliso kunye neyobungcali;
• Amanqanaba ococeko kunye nomgangatho ophambili kushishino;
• Ixabiso elikhuphisanayo kunye nexesha lokuhanjiswa ngokukhawuleza;
• Ubudlelwane obuninzi kushishino kwihlabathi liphela;

Siyakwamkela ukuba undwendwele ifektri yethu kunye nelebhu nangaliphi na ixesha!