I-SiC Coated Graphite Susceptor kunye ne-Carrier ye-Wafer

Inkcazelo emfutshane:

I-VET Energy SiC Coated Graphite Susceptor yimveliso ephezulu yokusebenza eyilelwe ukubonelela ngokusebenza okungaguquguqukiyo nokuthembekileyo kwithuba elide. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

Izinto:Ukucoceka okuphezulu kwegraphite ye-isostatic

Ukucoca: <5ppm

Ukwaleka:I-CVD-SiC, i-CVD-TaC, i-Pyro-carbon

OEM ODM:Iyafumaneka

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-SiC eqatywe i-graphite suscetporyinxalenye ephambili esetyenziswa kwiinkqubo ezahlukeneyo zokwenziwa kwe-semiconductor. Sisebenzisa itekhnoloji yethu enelungelo elilodwa lomenzi wechiza ukwenza i-Suscetpor egqunywe nge-SiC ngobunyulu obuphezulu, ukufana okuhle kokugquma kunye nobomi benkonzo obugqwesileyo, kunye nokuxhathisa okuphezulu kweekhemikhali kunye neempawu zokuzinza kwe-thermal.

Iimpawu zeemveliso zethu:

1. Ukumelana nobushushu obuphezulu be-oxidation ukuya kuthi ga kwi-1700℃.
2. Ukucoceka okuphezulu kunye nokufana kwe-thermal
3. Ukumelana nokugqwesa okugqwesileyo: i-asidi, i-alkali, ityuwa kunye ne-organic reagents.
4. Ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
5. Ubomi benkonzo ende kwaye buhlala ixesha elide

CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko ze-CVD SiCukutyabeka
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lweCrystal	iFCC β isigaba多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ukuqina	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Iinkozo uSiZe	2 ~ 10μm
纯度 / Ukucoceka kwemichiza	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Iqondo lobushushu elisezantsi	2700℃
抗弯强度 / Amandla e-Flexural	415 MPa RT 4-point
杨氏模量 / Imodyuli yabaselula	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUkuqhuba	300Wm^-1·K^-1
热膨胀系数 / Ukwandiswa kweThermal(CTE)	4.5×10^-6K^-1

I-VET Energy ngumvelisi oqeqeshiweyo ogxile kwi-R & D kunye nokuveliswa kwezinto eziphezulu eziphezulu ezifana negraphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto eziphathekayo ezifana ne-SiC yokugqoka, i-TaC yokugqoka, i-glassy carbon coating, i-pyrolytic ye-carbon coating, njl.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Izibonelelo zamandla e-VET ziquka:
• Umzi-mveliso ongowakho kunye nelebhu yobungcali;
• Amanqanaba okucoceka ahamba phambili kushishino kunye nomgangatho;
• Ixabiso elikhuphisanayo kunye nexesha lokuhanjiswa ngokukhawuleza;
• Intsebenziswano yamashishini amaninzi kwihlabathi jikelele;

Siyakwamkela ukuba ujonge umzi-mveliso wethu kunye nelabhoratri nangaliphi na ixesha!