SiC Yashushanyijeho Graphite Susceptor na Carrier Kuri Wafer

Ibisobanuro bigufi:

VET Ingufu SiC Coated Graphite Susceptor nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.

Ibikoresho:Isuku ryinshi isostatike

Isuku: <5ppm

Igifuniko:CVD-SiC, CVD-TaC, Pyro-karubone

OEM ODM:Birashoboka

Ohereza imeri kuri twe Kuramo nka PDF

Ibicuruzwa birambuye

Ibicuruzwa

SiC yashushanyije grafite suscetporni ikintu cyingenzi gikoreshwa mubikorwa bitandukanye bya semiconductor. Twifashishije tekinoroji yacu yemewe kugirango dukore suscetpor ya SiC ifite isuku irenze urugero, uburinganire bwiza hamwe nubuzima bwiza bwa serivisi, hamwe n’imiti myinshi irwanya imiti hamwe nubushyuhe bwumuriro.

Ibiranga ibicuruzwa byacu:

1. Ubushyuhe bwo hejuru bwa okiside irwanya 1700 ℃.
2. Isuku ryinshi nuburinganire bwumuriro
3. Kurwanya ruswa nziza: aside, alkali, umunyu na reagent.
4. Gukomera cyane, hejuru yuzuye, ibice byiza.
5. Kuramba kumurimo muremure kandi biramba

SiC Yashushanyijeho Graphite Susceptor (3)

SiC Yashushanyijeho Graphite Susceptor (4)

CVD SiC薄膜基本物理性能 Ibyingenzi bifatika bya CVD SiCgutwikira
性质 / Umutungo	典型数值 / Agaciro gasanzwe
晶体结构 / Imiterere ya Crystal	FCC β icyiciro多晶，主要为（111 ）取向
密度 Ubucucike	3.21 g / cm³
硬度 / Gukomera	2500 维氏硬度（ 500g umutwaro）
晶粒大小 / Ibinyampeke SiZe	2 ~ 10 mm
纯度 / Ubuziranenge bwa Shimi	99.99995%
热容 / Ubushyuhe	640 J · kg^-1· K.^-1
升华温度 / Ubushyuhe bwo hejuru	2700 ℃
抗弯强度 / Imbaraga zoroshye	415 MPa RT amanota 4
杨氏模量 / Modulus	430 Gpa 4pt yunamye, 1300 ℃
导热系数 / ThermalImyitwarire	300W · m^-1· K.^-1
热膨胀系数 Kwagura Ubushyuhe (CTE)	4.5 × 10^-6K^-1

VET Energy ni uruganda rukora umwuga rwibanda kuri R&D no gukora ibikoresho byo mu rwego rwo hejuru nka grafite, karubide ya silicon, quartz, ndetse no kuvura ibikoresho nka SiC coating, TaC coating, carbone carbone, pirolitike ya karubone, n'ibindi.

Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, birashobora kuguha ibisubizo byumwuga kubwawe.

Inyungu zingufu za VET zirimo:
• Uruganda bwite na laboratoire yabigize umwuga;
• Inganda ziyobora inganda nubuziranenge;
• Igiciro cyo guhatanira & Igihe cyo gutanga vuba;
• Ubufatanye butandukanye bwinganda kwisi yose;

Turakwakiriye neza kugirango ubone uruganda na laboratoire igihe icyo aricyo cyose!