SiC Coated Graphite Susceptor na Carrier For Wafer

Ishusho ya Graphite ifite SiC Coated na Carrier yo mu bwoko bwa Wafer

Ibisobanuro bigufi:

VET Energy SiC Coated Graphite Susceptor ni ibicuruzwa bifite imikorere myiza kandi byizewe byagenewe gutanga imikorere ihoraho kandi yizewe mu gihe kirekire. Bifite ubushobozi bwo kurwanya ubushyuhe n'ubushyuhe bungana, bifite isuku nyinshi, birwanya isuri, bigatuma biba igisubizo cyiza cyo gutunganya wafer.

Ibikoresho:Grafiti ifite isuku nyinshi kandi idafite ubuziranenge bwinshi

Gusukura: <5ppm

Gupfuka:CVD-SiC, CVD-TaC, Piro-karubone

OEM ODM:Biraboneka

Ohereza imeri kuri twe Kuramo nka PDF

Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

suscetpor ya grafiti itwikiriwe na SiCni igice cy'ingenzi gikoreshwa mu bikorwa bitandukanye byo gukora semiconductor. Dukoresha ikoranabuhanga ryacu rifite patenti kugira ngo dukore suscetpor ya SiC ifite ubuziranenge buhanitse cyane, ifite ubushobozi bwo gusiga neza kandi ikora neza, ndetse ikaba ifite ubushobozi bwo kudakoresha imiti n'ubushyuhe bwinshi.

Ibiranga ibicuruzwa byacu:

1. Ubudahangarwa ku bushyuhe bwinshi bwo kuzura kugeza kuri 1700°C.
2. Ubuziranenge bwinshi n'ubushyuhe bungana
3. Irwanya ingese neza cyane: aside, alkali, umunyu n'ibikomoka ku bimera.
4. Ubukomere bwinshi, ubuso buto, uduce duto.
5. Igihe kirekire cyo gukora kandi kiramba kurushaho

SiC Yashushanyijeho Graphite Susceptor (3)

SiC Yashushanyijeho Graphite Susceptor (4)

CVD SiC薄膜基本物理性能 Imiterere y'ibanze ya CVD SiCgusiga
性质 / Umutungo	典型数值 / Agaciro Gasanzwe
晶体结构 / Imiterere ya kristu	Icyiciro cya FCC β多晶，主要为（111 ）取向
密度 / Ubucucike	3.21 g/cm³
硬度 / Ubukomere	2500 维氏硬度（ 500g umutwaro）
晶粒大小 / Ubunini bw'ibinyampeke	2 ~ 10μm
纯度 / Ubuziranenge bw'ibinyabutabire	99.99995%
热容 / Ubushobozi bwo gushyuha	640 J·kg^-1·K^-1
升华温度 / Ubushyuhe bwo gushyuha	2700℃
抗弯强度 / Imbaraga zo Kongera Uburemere	415 MPa RT ifite amanota 4
杨氏模量 / Modulus y'Abana	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUbushobozi bwo kuyobora	300W·m^-1·K^-1
热膨胀系数 / Kwagura ubushyuhe (CTE)	4.5×10^-6K^-1

VET Energy ni uruganda rw’umwuga rwibanda ku bushakashatsi n’iterambere no gukora ibikoresho bigezweho nka grafiti, silicon carbide, quartz, ndetse no gutunganya ibikoresho nka SiC coating, TaC coating, ikirahure cya karuboni, pyrolytic carbon coating, nibindi. Ibi bicuruzwa bikoreshwa cyane mu bushyuhe bwa photovoltaic, semiconductor, new energy, metallurgy, nibindi.

Itsinda ryacu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora kuguha ibisubizo by’ibikoresho by’umwuga.

Ibyiza bya VET Energy birimo:
• Laboratwari yawe bwite y'uruganda n'iy'umwuga;
• Urwego rw'ubuziranenge n'ubwiza bya mbere mu nganda;
• Igiciro gishimishije & Igihe cyo gutanga vuba;
• Ubufatanye bwinshi mu nganda ku isi yose;

Turaguhaye ikaze gusura uruganda rwacu na laboratwari igihe icyo ari cyo cyose!