Ihe na-egbochi graphite SiC na ihe na-ebu maka Wafer

Ihe na-egbochi Graphite na ihe na-ebu SiC maka Wafer Foto a na-egosipụta

Nkọwa Dị Mkpirikpi:

VET Energy SiC Coated Graphite Suscepter bụ ngwaahịa dị elu nke e mere iji nye arụmọrụ na-adịgide adịgide ma bụrụ nke a pụrụ ịtụkwasị obi ruo ogologo oge. Ọ nwere ezigbo iguzogide okpomọkụ na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, iguzogide mbuze, na-eme ka ọ bụrụ ihe ngwọta zuru oke maka ngwa nhazi wafer.

Ihe:Graphite isostatic dị ọcha nke ukwuu

Nchacha: <5ppm

Mkpuchi:CVD-SiC, CVD-TaC, Pyro-carbon

OEM ODM:Dị

Zitere anyị ozi-e Budata ya dị ka PDF

Nkọwa Ngwaahịa

Akara Ngwaahịa

Ihe mkpuchi graphite nke SiC kpuchiebụ isi ihe eji eme ihe n'ọtụtụ usoro mmepụta semiconductor. Anyị na-eji teknụzụ anyị nwere ikike iji mee ka suscetpor nke SiC kpuchie dị ọcha nke ukwuu, ịdị mma nke mkpuchi na ndụ ọrụ dị mma, yana nnukwu iguzogide kemịkalụ na ihe ndị na-eme ka okpomọkụ sie ike.

Atụmatụ nke ngwaahịa anyị:

1. Oke okpomọkụ na-eguzogide oxidation ruo 1700℃.
2. Ịdị ọcha dị elu na ịdị n'otu okpomọkụ
3. Ezigbo nguzogide nchara: acid, alkali, nnu na ihe ndị sitere n'okike.
4. Ike siri ike, elu dị obere, obere ihe.
5. Ndụ ọrụ dị ogologo ma na-adịgide adịgide karịa

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ihe onwunwe	典型数值 / Uru nkịtị
晶体结构 / Nhazi kristal	FCC β nkebi多晶，主要为（111) 取向
密度 / Njupụta	3.21 g/cm³
硬度 / Ike siri ike	2500 维氏硬度： (ibu 500g)
晶粒大小 / SiZe ọka	2 ~ 10μm
纯度 / Ịdị ọcha nke kemịkalụ	99.99995%
热容 / Ike Okpomọkụ	640 J·kg^-1·K^-1
升华温度 / Okpomọkụ Sublimation	2700℃
抗弯强度 / Ike nke Flexural	415 MPa RT isi ihe anọ
杨氏模量 / Modulu Young	430 GPA 4pt gbagọrọ agbagọ, 1300℃
导热系数 / ThermalNhazigharị	300W·m^-1·K^-1
热膨胀系数 / Mgbasawanye Okpomọkụ (CTE)	4.5 × 10^-6K^-1

VET Energy bụ ọkachamara na-emepụta ihe na-elekwasị anya na R&D na mmepụta nke ihe ndị dị elu dị ka graphite, silicon carbide, quartz, yana ọgwụgwọ ihe dịka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg. A na-eji ngwaahịa ndị a eme ihe n'ọtụtụ ebe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.

Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.

Uru ike VET gụnyere:
• Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara nke ya;
• Ọkwa na ịdị ọcha nke ụlọ ọrụ mmepụta ihe na-eduga n'ịdị ọcha;
• Ọnụ ahịa asọmpi & Oge nnyefe ngwa ngwa;
• Mmekọrịta dị iche iche n'etiti ụlọ ọrụ n'ụwa niile;

Anyị na-anabata gị ka ị gaa leta ụlọ ọrụ mmepụta ihe na ụlọ nyocha anyị n'oge ọ bụla!