SiC mkpuchi graphite susceptor na ebu maka wafer

Nkọwa dị mkpirikpi:

VET Energy SiC Coated Graphite Susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

 

 


  • Ihe:Elu ịdị ọcha isostatic graphite
  • Nsacha: <5ppm
  • Mkpuchi:CVD-SiC, CVD-TaC, Pyro-carbon
  • OEM ODM:Dị
  • Nkọwa ngwaahịa

    Mkpado ngwaahịa

    SiC mkpuchi graphite sussetporbụ isi akụrụngwa eji na dị iche iche semiconductor mmepụta usoro. Anyị na-eji teknụzụ anyị nwere ikike ime Suscetpor mkpuchi SiC nwere ịdị ọcha dị oke mma, mkpuchi mkpuchi dị mma yana ndụ ọrụ magburu onwe ya, yana nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.

    Atụmatụ ngwaahịa anyị:

    1. High okpomọkụ ọxịdashọn eguzogide ruo 1700 ℃.
    2. High ịdị ọcha na thermal uniformity
    3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
    4. Elu ike, kọmpat elu, ezigbo ahụ.
    5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

    CVD SiC薄膜基本物理性能

    Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi

    性质 / Ihe onwunwe

    典型数值 / Uru a na-ahụkarị

    晶体结构 / Crystal Structure

    FCC β oge多晶,主要为(111) 取向

    密度 / Njupụta

    3.21g/cm³

    硬度 / Isi ike

    2500 维氏硬度 (ibu 500g)

    晶粒大小 / ọka SiZe

    2 ~ 10μm

    纯度 / Chemical ịdị ọcha

    99.99995%

    热容 / Okpomọkụ Ike

    640 nk-1· K-1

    升华温度 / Sublimation okpomọkụ

    2700 ℃

    抗弯强度 / Ike Flexural

    415 MPa RT 4-isi

    杨氏模量 Modul nke Young's

    430 Gpa 4pt ekwe, 1300 ℃

    导热系数 / ThermalOmume omume

    300W·m-1· K-1

    热膨胀系数 Mgbasawanye okpomọkụ (CTE)

    4.5 × 10-6K-1

    1

    2

    Ọnụ ego nke VET Energy Graphite

    2

    VET Energy bụ ọkachamara emeputa na-elekwasị anya na R & D na mmepụta nke elu-ọgwụgwụ elu ihe dị ka graphite, silicon carbide, quartz, nakwa dị ka ihe ọgwụgwọ dị ka SiC mkpuchi, TaC mkpuchi, glassy carbon mkpuchi, pyrolytic carbon mkpuchi, wdg The ngwaahịa na-ọtụtụ-eji na fotovoltaic, semiconductor, ọhụrụ ume, metallurgy, wdg.

    Anyị oru otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

    Uru VET Energy gụnyere:
    • Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara;
    • Ụlọ ọrụ na-eduga ọkwa dị ọcha na ịdị mma;
    • Ọnụ ahịa asọmpi & oge nnyefe ngwa ngwa;
    • Mmekọrịta ọtụtụ ụlọ ọrụ n'ụwa nile;

    Anyị na-anabata gị ka vist anyị factory na laabu n'oge ọ bụla!

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