I-SiC Coated Graphite Susceptor kanye ne-Carrier ye-Wafer

Incazelo emfushane:

I-VET Energy SiC Coated Graphite Susceptor iwumkhiqizo osebenza kahle kakhulu owenzelwe ukunikeza ukusebenza okulinganayo nokuthembekile isikhathi eside. Inokumelana okuhle kakhulu nokushisa kanye nokufana kokushisa, ubumsulwa obuphezulu, ukumelana nokuguguleka, okwenza kube yisisombululo esifanele sezinhlelo zokusebenza zokucubungula i-wafer.

Izinto:I-graphite ye-isostatic emsulwa kakhulu

Ukuhlanzwa: <5ppm

Ukugqoka:I-CVD-SiC, i-CVD-TaC, i-Pyro-carbon

I-OEM ODM:Kuyatholakala

Sithumelele i-imeyili Landa njenge-PDF

Imininingwane Yomkhiqizo

Amathegi Omkhiqizo

I-SiC coated graphite suscetporiyisici esibalulekile esisetshenziswa ezinqubweni ezahlukene zokukhiqiza ama-semiconductor. Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza i-suscetpor eboshwe yi-SiC ibe nobumsulwa obukhulu kakhulu, ukufana okuhle kokumboza kanye nokuphila kahle kwenkonzo, kanye nokumelana okuphezulu kwamakhemikhali kanye nezakhiwo zokuqina kokushisa.

Izici zemikhiqizo yethu:

1. Ukumelana nokushisa okuphezulu kwe-oxidation kuze kufike ku-1700℃.
2. Ubumsulwa obuphezulu kanye nokufana okushisayo
3. Ukumelana okuhle kakhulu nokugqwala: i-asidi, i-alkali, usawoti kanye nama-reagent e-organic.
4. Ubulukhuni obuphezulu, ubuso obuncane, izinhlayiya ezincane.
5. Impilo yesevisi ende futhi ihlala isikhathi eside

I-CVD SiC薄膜基本物理性能 Izakhiwo eziyisisekelo zomzimba ze-CVD SiCukugqoka
性质 / Impahla	典型数值 / Inani Elijwayelekile
晶体结构 / Isakhiwo sekristalu	Isigaba se-β se-FCC多晶，主要為（111）取向
密度 / Ubuningi	3.21 g/cm³
硬度 / Ubulukhuni	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Usayizi Wokusanhlamvu	2 ~ 10μm
纯度 / Ukuhlanzeka Kwamakhemikhali	99.99995%
热容 / Amandla Okushisa	640 J·kg^-1·K^-1
升华温度 / Izinga Lokushisa Elingaphansi	2700℃
抗弯强度 / Amandla Okugobeka	I-415 MPa RT amaphuzu angu-4
杨氏模量 / I-Modulus yentsha	I-430 Gpa 4pt bend, 1300℃
导热系数 / I-ThermalUkuqhuba	300W·m^-1·K^-1
热膨胀系数 / Ukwanda Kokushisa (i-CTE)	4.5×10^-6K^-1

I-VET Energy ingumkhiqizi ochwepheshe ogxile ku-R&D kanye nokukhiqizwa kwezinto ezisezingeni eliphezulu ezifana ne-graphite, i-silicon carbide, i-quartz, kanye nokwelashwa kwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, i-semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lobuchwepheshe livela ezikhungweni zocwaningo zasekhaya eziphezulu, lingakunikeza izixazululo zezinto zobuchwephesha ezengeziwe.

Izinzuzo ze-VET Energy zifaka:
• Ilebhu yakho yefektri kanye neyobungcweti;
• Amazinga okuhlanzeka okuhamba phambili embonini kanye nekhwalithi;
• Intengo yokuncintisana kanye nesikhathi sokulethwa okusheshayo;
• Ubambiswano oluningi lwemboni emhlabeni jikelele;

Siyakwamukela ukuthi uvakashele ifektri yethu kanye nelebhu nganoma yisiphi isikhathi!