SiC Coated Graphite Susceptor le Carrier Bakeng sa Wafer

Tlhaloso e Khutšoanyane:

VET Energy SiC Coated Graphite Susceptor ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le khanyetso e ntle haholo ea mocheso le ho tšoana ha mocheso, bohloeki bo phahameng, khanyetso ea khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lits'ebetso tsa ts'ebetso ea wafer.

Boitsebiso:Graphite e se nang bohloeki bo phahameng

Tlhoekiso: <5ppm

Ho roala:CVD-SiC, CVD-TaC, Pyro-carbon

OEM ODM:E fumaneha

Romella imeile ho rona Khoasolla e le PDF

Qaqiso ea Sehlahisoa

Li-tag tsa Sehlahisoa

SiC e koahetsoeng ka graphite suscetporke karolo ea bohlokoa e sebelisoang lits'ebetsong tse fapaneng tsa tlhahiso ea li-semiconductor. Re sebelisa theknoloji ea rona e nang le patente ho etsa suscetpor e koahetsoeng ke SiC e nang le bohloeki bo phahameng haholo, ho tšoana hantle ha ho koahetsoe le bophelo bo botle ba ts'ebeletso, hammoho le khanyetso e phahameng ea lik'hemik'hale le thepa ea botsitso ba mocheso.

Likarolo tsa lihlahisoa tsa rona:

1. Khanyetso ea oxidation ea mocheso o phahameng ho fihlela ho 1700℃.
2. Bohloeki bo phahameng le ho tšoana ha mocheso
3. Ho hanyetsa mafome hantle haholo: asiti, alkali, letsoai le li-reagent tsa tlhaho.
4. Ho thatafala ho hoholo, bokaholimo bo kopaneng, dikarolwana tse nyane.
5. Bophelo ba tšebeletso e telele le bo tšoarellang haholoanyane

CVD SiC薄膜基本物理性能 Thepa ea motheo ea 'mele ea CVD SiCsekoahelo
性质 / Thepa	典型数值 / Boleng bo Tloaelehileng
晶体结构 / Sebopeho sa kristale	Mokhahlelo oa FCC β多晶，主要為（111）取向
密度 / Botenya	3.21 g/cm³
硬度 / Bothata	2500 维氏硬度 (moroalo oa 500g)
晶粒大小 / Sekala sa Lithollo	2 ~ 10μm
纯度 / Bohloeki ba Lik'hemik'hale	99.99995%
热容 / Bokgoni ba Mocheso	640 J·kg^-1·K^-1
升华温度 / Mocheso oa Sublimation	2700℃
抗弯强度 / Matla a ho Kobeha	415 MPa RT lintlha tse 4
杨氏模量 / Modulus ea Bacha	430 Gpa kobeho ea 4pt, 1300℃
导热系数 / ThermalHo khanna motlakase	300W·m^-1·K^-1
热膨胀系数 / Katoloso ea Thermal (CTE)	4.5×10^-6K^-1

VET Energy ke moetsi oa litsebi ea shebaneng le R&D le tlhahiso ea thepa e tsoetseng pele ea maemo a holimo joalo ka graphite, silicon carbide, quartz, hammoho le kalafo ea thepa joalo ka SiC coating, TaC coating, khalase carbon coating, pyrolytic carbon coating, jj. Lihlahisoa tsena li sebelisoa haholo ho photovoltaic, semiconductor, matla a macha, metallurgy, jj.

Sehlopha sa rona sa botekgeniki se tsoa litsing tse holimo tsa lipatlisiso tsa lehae, se ka u fa litharollo tse ling tsa lisebelisoa tsa profeshenale.

Melemo ea VET Energy e kenyelletsa:
• Laboratori ea fektheri le ea litsebi ea hau;
• Maemo le boleng bo hloekileng bo etellang pele indastering;
• Theko e qothisanang lehlokoa le nako e potlakileng ea ho tlisa thepa;
• Likamano tse ngata tsa indasteri lefatšeng ka bophara;

Rea u amohela ho etela fektheri le laboratori ea rona neng kapa neng!