SiC coated graphite suscetpor is a key component used in various semiconductor manufacturing processes. We use our patented technology to make the SiC coated suscetpor with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.
Features of our products:
1. High temperature oxidation resistance up to 1700℃.
2. High purity and thermal uniformity
3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
4. High hardness, compact surface, fine particles.
5. Longer service life and more durable
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CVD SiC薄膜基本物理性能 Basic physical properties of CVD SiC coating |
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性质 / Property |
典型数值 / Typical Value |
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晶体结构 / Crystal Structure |
FCC β phase 多晶，主要为（111）取向 |
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密度 / Density |
3.21 g/cm³ |
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硬度 / Hardness |
2500 维氏硬度（500g load） |
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晶粒大小 / Grain SiZe |
2~10μm |
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纯度 / Chemical Purity |
99.99995% |
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热容 / Heat Capacity |
640 J·kg-1·K-1 |
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升华温度 / Sublimation Temperature |
2700℃ |
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抗弯强度 / Flexural Strength |
415 MPa RT 4-point |
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杨氏模量 / Young' s Modulus |
430 Gpa 4pt bend, 1300℃ |
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导热系数 / Thermal Conductivity |
300W·m-1·K-1 |
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热膨胀系数 / Thermal Expansion(CTE) |
4.5×10-6K-1 |
VET Energy is a professional manufacturer focusing on the R&D and production of high-end advanced materials such as graphite, silicon carbide, quartz, as well as the material treatment like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..
Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.
VET Energy advantages includes:
• Own factory and professional laboratory;
• Industry-leading purity levels and quality;
• Competive price & Fast delivery time;
• Multiple industry partnerships worldwide;
We welcome you to vist our factory and laboratory at any time!
