SiC fa'apipi'i graphite Susceptor ma ave mo Wafer

Fa'amatalaga Puupuu:

VET Energy SiC Coated Graphite Susceptor o se oloa maualuga fa'atinoga ua fuafuaina e maua ai le fa'atinoga tumau ma fa'atuatuaina mo se vaitaimi umi. E sili atu le lelei o le vevela ma le tutusa o le vevela, maualuga le mama, teteʻe o le tafia, ma avea ai ma vaifofo lelei mo le gaosiga o talosaga.

 

 


  • Mea:maualuga mama isostatic graphite
  • Fa'amamāina: <5ppm
  • Ufiufi:CVD-SiC, CVD-TaC, Pyro-carbon
  • OEM ODM:Avanoa
  • Fa'amatalaga Oloa

    Faailoga o oloa

    SiC coated graphite suscetporo se vaega autu o loʻo faʻaaogaina i faʻagasologa o gaosiga semiconductor. Matou te faʻaaogaina a matou tekonolosi pateni e fai ai le SiC coated suscetpor ma le maualuga maualuga o le mama, lelei faʻapipiʻi tutusa ma se olaga sili ona lelei, faʻapea foʻi ma le maualuga o vailaʻau faʻamaʻi ma mea faʻamautu vevela.

    Vaega oa tatou oloa:

    1. maualuga le vevela oxidation tetee atu i le 1700 ℃.
    2. maualuga mama ma vevela tutusa
    3. Lelei le fa'afefeteina: acid, alkali, masima ma meaola fa'aola.
    4. Maaa maualuga, faʻapipiʻi luga, vaega laiti.
    5. Le soifua tautua umi ma sili atu le umi

    CVD SiC薄膜基本物理性能

    Meatino fa'aletino autu o le CVD SiCufiufi

    性质 / Meatotino

    典型数值 / Taua masani

    晶体结构 / Fa'a tioata

    FCC β vaega多晶,主要为(111)取向

    密度 / Malosi

    3.21 g/cm³

    硬度 / Maaa

    2500 维氏硬度(500g uta)

    晶粒大小 / Saito Tele

    2~10μm

    纯度 / Vailaau Mama

    99.99995%

    热容 / Malosiaga vevela

    640 J·kg-1·K-1

    升华温度 / Sulimation Temperature

    2700 ℃

    抗弯强度 / Malosi Fa'alilolilo

    415 MPa RT 4-point

    杨氏模量 / Young's Modulus

    430 Gpa 4pt pi'o, 1300 ℃

    导热系数 / ThermalConductivity

    300W·m-1·K-1

    热膨胀系数 / Fa'alauteleina o le vevela(CTE)

    4.5×10-6K-1

    1

    2

    VET Malosiaga Graphite

    2

    VET Energy o se tagata gaosi tomai faʻapitoa e taulaʻi i le R & D ma le gaosiga o mea maualuga maualuga e pei o le graphite, silicon carbide, quartz, faʻapea foʻi ma le togafitiga faʻapitoa e pei o le SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, ma isi.

    O la matou 'au fa'atekinisi e sau mai fa'alapotopotoga su'esu'e fa'apitonu'u pito i luga, e mafai ona tu'uina atu fa'afitauli fa'apitoa fa'apitoa mo oe.

    VET Malosiaga manuia e aofia ai:
    • Lava falegaosimea ma falesuesue fa'apolofesa;
    • Tulaga mama ma tulaga lelei e ta'imua i alamanuia;
    • Tau fa'atauva'a & Taimi vave tu'uina atu;
    • Fa'apa'aga fa'apisinisi tele i le lalolagi atoa;

    Matou te faʻafeiloaia oe e asiasi i la matou fale gaosimea ma fale suʻesuʻe i soo se taimi!

    研发团队

    公司客户


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