Silicon carbide ceramics: zigawo zolondola zofunika pa ntchito za semiconductor

Ukadaulo wa Photolithography umayang'ana kwambiri pakugwiritsa ntchito makina owonera kuti awonetse mawonekedwe a ma circuit pa ma silicon wafers. Kulondola kwa njirayi kumakhudza mwachindunji magwiridwe antchito ndi kukolola kwa ma circuit ophatikizika. Monga chimodzi mwa zida zapamwamba kwambiri zopangira ma chip, makina owonera ali ndi zida zokwana mazana ambiri. Zida zonse zowonera ndi zida zomwe zili mkati mwa dongosolo la lithography zimafunikira kulondola kwambiri kuti zitsimikizire magwiridwe antchito a circuit komanso kulondola.SiC zoumbaumbazagwiritsidwa ntchito mumachuki a waferndi magalasi ozungulira a ceramic.

Wafer chuckChikwama cha wafer chomwe chili mu makina ojambulira chimanyamula ndikusuntha wafer panthawi yowonekera. Kulumikizana bwino pakati pa wafer ndi chuck ndikofunikira kuti chikope bwino mawonekedwe omwe ali pamwamba pa wafer.SiC waferMa chuck amadziwika chifukwa cha kupepuka kwawo, kukhazikika kwakukulu komanso kusinthasintha kwa kutentha, zomwe zimatha kuchepetsa katundu wopanda mphamvu ndikuwonjezera magwiridwe antchito, kulondola kwa malo ndi kukhazikika.

Galasi la Ceramic Square Mu makina a lithography, kulumikizana kwa kayendedwe pakati pa chuck ya wafer ndi gawo la chigoba ndikofunikira, zomwe zimakhudza mwachindunji kulondola kwa lithography ndi kukolola. Chowunikira cha square ndi gawo lofunikira la makina oyezera mayankho a wafer chuck scanning positioning, ndipo zofunikira zake ndizopepuka komanso zokhwima. Ngakhale kuti zigoba za silicon carbide zili ndi mawonekedwe opepuka abwino, kupanga zinthu zotere n'kovuta. Pakadali pano, opanga zida zoyendera padziko lonse lapansi amagwiritsa ntchito kwambiri zinthu monga fused silica ndi cordierite. Komabe, ndi kupita patsogolo kwa ukadaulo, akatswiri aku China apanga magalasi akuluakulu, owoneka ngati ovuta, opepuka kwambiri, otsekedwa mokwanira a silicon carbide ceramic ndi zida zina zogwirira ntchito za makina a photolithography. Chigoba cha photomask, chomwe chimadziwikanso kuti aperture, chimatumiza kuwala kudzera mu chigoba kuti chipange mawonekedwe pazinthu zomwe zimakhudzidwa ndi kuwala. Komabe, kuwala kwa EUV kukawunikira chigoba, chimatulutsa kutentha, kukweza kutentha kufika madigiri 600 mpaka 1000 Celsius, zomwe zingayambitse kuwonongeka kwa kutentha. Chifukwa chake, filimu ya SiC nthawi zambiri imayikidwa pa chigoba cha photomask. Makampani ambiri akunja, monga ASML, tsopano akupereka mafilimu okhala ndi kutumiza kopitilira 90% kuti achepetse kuyeretsa ndi kuyang'anira panthawi yogwiritsa ntchito chigoba cha zithunzi ndikuwonjezera magwiridwe antchito ndi zokolola za makina a EUV photolithography.

Kujambula Plasmandi Deposition Photomasks, yomwe imadziwikanso kuti crosshairs, ili ndi ntchito yayikulu yotumiza kuwala kudzera mu chigoba ndikupanga mawonekedwe pa zinthu zomwe zimakhudzidwa ndi kuwala. Komabe, kuwala kwa EUV (extreme ultraviolet) kukawunikira chigoba cha photomask, kumatulutsa kutentha, kukweza kutentha kufika pakati pa madigiri 600 ndi 1000 Celsius, zomwe zingayambitse kuwonongeka kwa kutentha. Chifukwa chake, filimu ya silicon carbide (SiC) nthawi zambiri imayikidwa pa chigoba cha photomask kuti ithetse vutoli. Pakadali pano, makampani ambiri akunja, monga ASML, ayamba kupatsa mafilimu mawonekedwe owonekera opitilira 90% kuti achepetse kufunikira koyeretsa ndikuwunika panthawi yogwiritsa ntchito chigoba cha photomask, motero akukweza magwiridwe antchito ndi zokolola za makina a EUV lithography. Kujambula Plasma ndiMphete Yoyang'ana Poyambirandi zina Pakupanga ma semiconductor, njira yocheka imagwiritsa ntchito zinthu zamadzimadzi kapena za gasi (monga mpweya wokhala ndi fluorine) zomwe zimayikidwa mu plasma kuti ziphulike wafer ndikuchotsa zinthu zosafunikira mpaka mawonekedwe a dera lomwe mukufuna akhalebe pachikwama cha mkatepamwamba. Mosiyana ndi zimenezi, kuyika filimu yopyapyala kumafanana ndi mbali ina ya kuyika, pogwiritsa ntchito njira yoyika zinthu kuti zikhazikitse zinthu zotetezera pakati pa zigawo zachitsulo kuti zipange filimu yopyapyala. Popeza njira zonsezi zimagwiritsa ntchito ukadaulo wa plasma, zimakhala ndi zotsatirapo zowononga pa zipinda ndi zigawo. Chifukwa chake, zigawo zomwe zili mkati mwa zidazo zimafunika kukhala ndi kukana kwabwino kwa plasma, kusinthasintha kochepa ku mpweya wopaka wa fluorine, komanso kutsika kwa mphamvu yoyendetsa. Zida zoyika ndi zoyika zinthu zakale, monga mphete zoyang'ana, nthawi zambiri zimapangidwa ndi zinthu monga silicon kapena quartz. Komabe, ndi kupita patsogolo kwa kuyika kwa circuit miniaturization, kufunikira ndi kufunika kwa njira zoyika zinthu popanga circuit yolumikizidwa kukuwonjezeka. Pa mulingo wa microscopic, kuyika kwa silicon wafer molondola kumafuna plasma yamphamvu kwambiri kuti ikwaniritse m'lifupi mwa mizere yaying'ono komanso kapangidwe ka zida zovuta kwambiri. Chifukwa chake, kuyika kwa chemical vapor deposition (CVD) silicon carbide (SiC) pang'onopang'ono kwakhala chinthu chokongoletsera chomwe chimakondedwa kwambiri pa zida zoyika ndi zoyika zinthu ndi zinthu zake zabwino kwambiri zakuthupi ndi zamankhwala, kuyera kwambiri komanso kufanana. Pakadali pano, zigawo za CVD silicon carbide mu zida zoyika zinthu zimaphatikizapo mphete zoyang'ana, mitu ya shawa ya gasi, thireyi ndi mphete zam'mphepete. Mu zipangizo zosungiramo zinthu, muli zophimba zipinda, zophimba zipinda ndiMa substrates a graphite okhala ndi SIC.

Chifukwa cha kuchepa kwa reactivity yake komanso conductivity yake ku chlorine ndi fluorine etching gases,CVD silicon carbidechakhala chinthu choyenera kwambiri pazida monga mphete zowunikira muzipangizo zolembera za plasma.CVD silicon carbideZinthu zomwe zili mu zida zojambulira zimaphatikizapo mphete zolunjika, mitu ya shawa ya gasi, mathireyi, mphete zam'mphepete, ndi zina zotero. Mwachitsanzo, mphete zolunjika ndi zinthu zofunika kwambiri zomwe zimayikidwa kunja kwa wafer ndipo zimalumikizana mwachindunji ndi wafer. Pogwiritsa ntchito mphamvu yamagetsi pa mphete, plasma imayikidwa kudzera mu mphete kupita ku wafer, zomwe zimapangitsa kuti ntchitoyi ikhale yofanana. Mwachikhalidwe, mphete zolunjika zimapangidwa ndi silicon kapena quartz. Komabe, pamene kusinthasintha kwa ma circuit miniaturization kukupita patsogolo, kufunikira ndi kufunika kwa njira zojambulira pakupanga ma circuit ophatikizana kukupitirirabe kukula. Mphamvu ndi mphamvu zojambulira plasma zikupitirira kukwera, makamaka mu zida zojambulira plasma (CCP) zomwe zimagwirizanitsidwa bwino, zomwe zimafuna mphamvu zambiri za plasma. Zotsatira zake, kugwiritsa ntchito mphete zolunjika zopangidwa ndi zinthu za silicon carbide kukuwonjezeka.