Ikoranabuhanga rya Photolithography ryibanda cyane cyane ku gukoresha sisitemu z'urumuri kugira ngo hagaragazwe imiterere y'urumuri kuri wafer za silicon. Ubuhanga bw'iyi nzira bugira ingaruka zitaziguye ku mikorere n'umusaruro w'urumuri rwa circuits. Nk'imwe mu bikoresho byiza cyane mu gukora chips, imashini ya lithography irimo ibice bigera ku bihumbi amagana. Ibice by'urumuri n'ibice biri muri sisitemu ya lithography bisaba ubuziranenge buhanitse cyane kugira ngo harebwe imikorere n'ubuziranenge bw'urumuri.Ibumba rya SiCbyakoreshejwe muriuduce twa wafern'indorerwamo z'ibara rya kare.
Agace k'umugatiAgace ka wafer kari mu mashini ikoresha lithography gatwara kandi kakajyana wafer mu gihe cyo kuyishyira ahagaragara. Guhuza neza hagati ya wafer n'agace ka wafer ni ingenzi kugira ngo ishusho iri ku buso bwa wafer igaragare neza.agace ka SiCChucks zizwiho kuba zoroshye, zifite ubushobozi bwo guhagarara neza mu buryo bwo hejuru ndetse n’ubushyuhe buke, ibyo bikaba bishobora kugabanya imitwaro idafite ingufu no kunoza imikorere myiza y’imigendere, uburyo bwo gushyira ibintu neza no guhagarara neza.
Indorerwamo y'ikirahure cya Ceramic Muri mashini ya lithography, guhuza imikorere hagati ya wafer chuck n'urwego rwa mask ni ingenzi cyane, ibyo bikaba bigira ingaruka ku buryo butaziguye ku kuri kwa lithography no ku musaruro wayo. Reflector ya kirekire ni igice cy'ingenzi cya sisitemu yo gupima imiterere ya wafer chuck, kandi ibisabwa mu bikoresho byayo ni byoroheje kandi bikomeye. Nubwo silicon carbide ceramics zifite imiterere myiza yoroheje, gukora ibyo bice biragoye. Muri iki gihe, abakora ibikoresho mpuzamahanga bihuriweho cyane cyane bakoresha ibikoresho nka silica na cordierite. Ariko, hamwe n'iterambere ry'ikoranabuhanga, impuguke z'Abashinwa zageze ku gukora indorerwamo nini, zifite imiterere ikomeye, zoroheje cyane, zifunze neza za silicon carbide ceramic ceramic square glasses hamwe n'ibindi bice by'ikoranabuhanga bikora ku mashini za photolithography. Photomask, izwi kandi ku izina rya aperture, yohereza urumuri binyuze muri mask kugira ngo ikore ishusho ku bikoresho byoroshye gufotora. Ariko, iyo urumuri rwa EUV rumurikiye mask, isohora ubushyuhe, yongera ubushyuhe kuri dogere selisiyusi 600 kugeza 1000, bishobora kwangiza ubushyuhe. Kubwibyo, urwego rwa SiC film rukunze gushyirwa kuri photomask. Amasosiyete menshi yo mu mahanga, nka ASML, ubu atanga filime zifite ubushobozi bwo kohereza amakuru arenga 90% kugira ngo agabanye isuku n'igenzura mu gihe cyo gukoresha fotomask no kunoza imikorere n'umusaruro w'imashini za EUV zikora fotolithography.
Gushushanya Plasmana Deposition Photomasks, izwi kandi nka crosshairs, ifite inshingano nyamukuru yo kohereza urumuri binyuze muri mask no gukora igishushanyo ku bikoresho bishobora gufotora. Ariko, iyo urumuri rwa EUV (ultraviolet extreme) rumurikiye photomask, rutanga ubushyuhe, rukazamura ubushyuhe bukagera kuri dogere selisiyusi hagati ya 600 na 1000, bishobora kwangiza ubushyuhe. Kubwibyo, urwego rwa silicon carbide (SiC) firime ikunze gushyirwa kuri photomask kugira ngo igabanye iki kibazo. Muri iki gihe, amasosiyete menshi yo mu mahanga, nka ASML, yatangiye guha firime urumuri rurenga 90% kugira ngo igabanye gukenera gusukurwa no gusuzumwa mu gihe cyo gukoresha photomask, bityo bikanoza imikorere n'umusaruro w'imashini za EUV lithography. Plasma Etching naImpeta yo kwibandaho mu gushushanyan'ibindi Mu nganda za semiconductor, uburyo bwo gukata bukoresha ibintu bikozwe mu mazi cyangwa gaze (nk'imyuka irimo fluorine) byashyizwe muri plasma kugira ngo bitereke kuri wafer no gukuramo ibikoresho bidakenewe kugeza igihe imiterere y'uruziga rw'amashanyarazi ikenewe igumye kuriagace gatoUbuso. Mu buryo bunyuranye, gushyiramo icyuma gito bisa n'inyuma y'icyuma gishyushye, hakoreshejwe uburyo bwo gushyiramo ibikoresho bikingira hagati y'ibyuma kugira ngo bikore icyuma gito. Kubera ko inzira zombi zikoresha ikoranabuhanga rya plasma, zishobora kugira ingaruka mbi ku byumba n'ibice byabyo. Kubwibyo, ibice biri mu bikoresho bisabwa kugira ngo bigire ubushobozi bwo kurwanya plasma neza, ubushobozi buke bwo guhangana n'imyuka ishyushye ya fluorine, no kuba nta bushobozi bwo gutwara ibintu. Ibice bisanzwe by'ibikoresho bishyushye kandi bipfundikiye, nk'impeta zo kwibandaho, akenshi bikozwe mu bikoresho nka silicon cyangwa quartz. Ariko, hamwe no gutera imbere kwa miniaturization y'uruziga, icyifuzo n'akamaro k'ibikorwa byo gushyushya mu nganda zihujwe biriyongera. Ku rwego rwa microscopic, gushyushya neza silicon wafer bisaba plasma ifite ingufu nyinshi kugira ngo igere ku bugari buto bw'umurongo n'imiterere ikomeye y'ibikoresho. Kubwibyo, gushyushya icyuma gishyushye (CVD) silicon carbide (SiC) buhoro buhoro byahindutse ibikoresho bikundwa cyane byo gutwikira no gushyiramo ibikoresho hamwe n'imiterere yabyo myiza ya fiziki na shimi, ubuziranenge bwinshi n'ubunini. Kuri ubu, ibice bya CVD silicon carbide mu bikoresho bishyushye birimo impeta zo kwibandaho, imitwe yo kwiyuhagira ya gaze, amasahani n'impeta zo ku nkengero. Mu bikoresho byo gushyiramo ibintu, hari ibipfukisho by'ibyumba, imiringoti y'ibyumba n'ibindiIbikoresho bya grafiti bitwikiriwe na SIC.
Bitewe n'uko ifite ubushobozi buke bwo gutwara ibintu no kugabanya imbaraga zayo mu bijyanye n'imyuka ya chlorine na fluorine,Karubide ya silikoni ya CVDyabaye ibikoresho byiza cyane ku bice nk'impeta zo gushushanya mu bikoresho byo gushushanya plasma.Karubide ya silikoni ya CVDIbice bigize ibikoresho byo gushushanya birimo impeta zo gushushanya, imitwe yo kwiyuhagira ya gaze, amasahani, impeta zo ku nkengero, nibindi. Fata urugero rw'impeta zo gushushanya, ni ibice by'ingenzi bishyirwa hanze ya wafer kandi bigakorana neza na wafer. Mu gushyira voltage ku mpeta, plasma yibanda binyuze mu mpeta kuri wafer, bigatuma uburyo bwo gukora burushaho kuba bumwe. Ubusanzwe, impeta zo gushushanya zikorwa muri silicon cyangwa quartz. Ariko, uko miniaturization y'uruhererekane rw'amashanyarazi igenda itera imbere, icyifuzo n'akamaro k'ibikorwa byo gushushanya mu nganda zikora uruhererekane rw'amashanyarazi bikomeza kwiyongera. Ingufu zo gushushanya plasma n'ingufu zisabwa bikomeje kwiyongera, cyane cyane mu bikoresho byo gushushanya plasma (CCP), bisaba ingufu nyinshi za plasma. Kubera iyo mpamvu, ikoreshwa ry'impeta zo gushushanya zikozwe mu bikoresho bya silicon carbide ririyongera.
Igihe cyo kohereza: Ukwakira-29-2024