Ko te hangarau whakaahua-ipurangi e aro nui ana ki te whakamahi i ngā pūnaha whatu hei whakaatu i ngā tauira ara iahiko i runga i ngā papa silicon. Ko te tika o tēnei tukanga e pā tika ana ki te mahi me te hua o ngā ara iahiko whakauru. Hei tētahi o ngā taputapu matua mō te hanga maramara, kei roto i te mīhini whakaahua-ipurangi tae atu ki te rau mano ngā wāhanga. Ko ngā wāhanga whatu me ngā wāhanga i roto i te pūnaha whakaahua-ipurangi e hiahia ana kia tino tika kia pai ai te mahi me te tika o te ara iahiko.Ngā uku SiCkua whakamahia i roto ingā pūwero waferme ngā whakaata tapawhā uku.
Pūwero angiangiKa mau, ka neke hoki te wafer i te wa e whakaatuhia ana i roto i te mīhini whakairo. He mea nui te tūnga tika i waenga i te wafer me te chuck kia tika ai te tārua i te tauira ki te mata o te wafer.Wafer SiCE mōhiotia ana ngā chucks mō tō rātou mama, te pumau o ngā āhuatanga me te iti o te tauwehenga whānui wera, ka taea te whakaiti i ngā kawenga inertia me te whakapai ake i te pai o te nekehanga, te tika o te tūnga me te pumau.
Whakaata tapawhā uku I roto i te mīhini whakaahua, he mea nui te tukutahitanga o te nekehanga i waenga i te pūwero wafer me te atamira kopare, e pā tika ana ki te tika me te hua o te whakaahua. Ko te whakaata tapawhā he wāhanga matua o te pūnaha ine urupare tūnga matawai pūwero wafer, ā, he mama, he tino uaua hoki ngā whakaritenga rauemi. Ahakoa he pai ngā āhuatanga mama o ngā uku silicon carbide, he uaua te hanga i aua wāhanga. I tēnei wā, ko ngā kaihanga taputapu ara iahiko whakauru o te ao e whakamahi ana i ngā rauemi pēnei i te silica me te cordierite kua hanumi. Heoi, me te whanaketanga o te hangarau, kua tutuki i ngā tohunga Hainamana te hanga i ngā whakaata tapawhā silicon carbide nui, āhua uaua, tino mama, kua kati katoa me ētahi atu wāhanga whatu mahi mō ngā mīhini whakaahua. Ko te whakaahua kopare, e mōhiotia ana ko te aperture, ka tuku i te mārama mā roto i te kopare hei hanga i tētahi tauira ki runga i te rauemi whakaahua-tairongo. Heoi, ina whiti te mārama EUV i te kopare, ka tukuna te wera, ka piki ake te pāmahana ki te 600 ki te 1000 nekehanga Celsius, ka pā kino pea ki te wera. Nō reira, he paparanga kiriata SiC te nuinga o te wā ka whakatakotoria ki runga i te whakaahua kopare. He maha ngā kamupene o tāwāhi, pērā i a ASML, e tuku ana i ngā kiriata he neke atu i te 90% te kaha whakawhiti hei whakaiti i te horoi me te tirotiro i te wā e whakamahia ana te kopare whakaahua, hei whakapai ake hoki i te whai huatanga me te hua o ngā mīhini whakaahua whakaahua EUV.
Te Whakairo PlasmaKo ngā Whakaahua Whakaahua Whakatakotoranga, e mōhiotia ana ko ngā whitiwhiti, he mahi matua mā te tuku māramatanga mā roto i te kanohi me te hanga tauira ki runga i te rauemi whakaahua-ā-tinana. Heoi, ina whiti te mārama EUV (tino ultraviolet) ki te whakaahua kanohi, ka tukuna te wera, ka piki ake te pāmahana ki waenga i te 600 me te 1000 nekehanga Celsius, ka pā kino pea ki te wera. Nō reira, ka whakatakotoria he paparanga kiriata silicon carbide (SiC) ki runga i te whakaahua kanohi hei whakamama i tēnei raruraru. I tēnei wā, he maha ngā kamupene o tāwāhi, pērā i a ASML, kua tīmata ki te whakarato kiriata he māramatanga neke atu i te 90% hei whakaiti i te hiahia mō te horoi me te tirotiro i te wā e whakamahia ana te whakaahua kanohi, ā, ka whakapai ake i te whai huatanga me te hua o ngā mīhini tuhi EUV. Te Whakairo Plasma meMowhiti Arotahi Whakatakotorangame ētahi atu I roto i te hanga haurua-haurua, ka whakamahia e te tukanga whakairo ngā mea whakairo wai, hau rānei (pērā i ngā hau kei roto he fluorine) kua whakakāhia ki roto i te plasma hei pupuhi i te wafer me te tango tīpako i ngā rauemi kāore e hiahiatia kia mau tonu rā anō te tauira ara iahiko e hiahiatia ana ki runga i tepapamata. He rerekē, he rite te whakatakoto kiriata angiangi ki te taha whakamuri o te whakairo, mā te whakamahi i te tikanga whakatakoto hei whakarārangi i ngā rauemi ārai i waenga i ngā paparanga whakarewa hei hanga i tētahi kiriata angiangi. Nā te mea e whakamahi ana ngā tukanga e rua i te hangarau plasma, he ngāwari ki te pāngia e ngā rūma me ngā wāhanga. Nō reira, me whai ātete plasma pai ngā wāhanga o roto i te taputapu, he iti te tauhohenga ki ngā hau whakairo fluorine, me te iti o te kawe hiko. Ko ngā wāhanga taputapu whakairo me te whakatakoto tuku iho, pērā i ngā mowhiti arotahi, he mea hanga i ngā rauemi pērā i te silicon, i te quartz rānei. Heoi, me te whanaketanga o te whakaitiiti i te ara iahiko whakauru, kei te piki haere te tono me te hiranga o ngā tukanga whakairo i roto i te hanga ara iahiko whakauru. I te taumata moroiti, me whai plasma kaha-teitei te whakairo papa silicon tika kia iti ake te whānui o ngā rārangi me ngā hanganga taputapu uaua ake. Nō reira, kua piki haere te rongonui o te whakatakoto kohu matū (CVD) silicon carbide (SiC) hei rauemi paninga pai mō ngā taputapu whakairo me te whakatakoto me ōna āhuatanga ā-tinana me te matū pai rawa atu, te parakore teitei me te ōrite. I tēnei wā, ko ngā wāhanga silicon carbide CVD i roto i ngā taputapu whakairo ko ngā mowhiti arotahi, ngā pane kaukau hau, ngā paepae me ngā mowhiti taha. I roto i ngā taputapu whakatakotoranga, kei reira ngā taupoki rūma, ngā arai rūma meNgā papa graphite pania-SIC.
Nā te iti o tōna tauhohenga me tōna kawe hiko ki ngā hau chlorine me te fluorine engraving,Carbide silicon CVDkua noho hei rauemi tino pai mō ngā wāhanga pēnei i ngā mowhiti arotahi i roto i ngā taputapu whakairo plasma.Carbide silicon CVDKo ngā wāhanga o ngā taputapu whakairo ko ngā mowhiti arotahi, ngā pane kaukau hau, ngā paepae, ngā mowhiti taha, me ētahi atu. Hei tauira, ko ngā mowhiti arotahi he wāhanga matua kei waho o te papa, ā, e pā tika ana ki te papa. Mā te whakamahi i te hiko ki te mowhiti, ka arotahi te plasma mā te mowhiti ki runga i te papa, ka whakapai ake i te ōritetanga o te tukanga. Ko ngā mowhiti arotahi he mea hanga ki te silicon, ki te quartz rānei. Heoi, i te haere tonu o te whakaitiiti i te ara iahiko whakauru, ka piki haere tonu te tono me te hiranga o ngā tukanga whakairo i roto i te hanga ara iahiko whakauru. Ka piki haere tonu ngā hiahia mō te mana me te pūngao whakairo plasma, inā koa i roto i ngā taputapu whakairo plasma honohono capacitively (CCP), e hiahia ana ki te pūngao plasma teitei ake. Nō reira, kei te piki haere te whakamahinga o ngā mowhiti arotahi i hangaia ki ngā rauemi silicon carbide.
Wā tuku: Oketopa-29-2024