Nheyo yechikepe chePECVD graphite che solar cell (coating) | VET Energy

Chekutanga, tinofanira kuzivaPECVD(Plasma Enhanced Chemical Vapor Deposition). Plasma ndiko kuwedzera kwekufamba kwekupisa kwemamorekuru ezvinhu. Kusangana pakati pawo kuchaita kuti mamorekuru egasi aite ionized, uye zvinhu zvacho zvichava musanganiswa wemaion akanaka, maerekitironi uye zvidimbu zvisina kusimba zvinosangana.

 

Zvinofungidzirwa kuti mwero wekurasikirwa kwechiedza pamusoro pesilicon wakakwira kusvika pa35%. Firimu rekudzivirira kuratidzwa kwechiedza rinogona kuvandudza zvakanyanya mwero wekushandiswa kwechiedza chezuva nesero rebhatiri, izvo zvinobatsira kuwedzera huwandu hwemagetsi anokonzerwa ne photogenerated uye nekudaro kuvandudza kushanda kwekushandura. Panguva imwe chete, hydrogen iri mufirimu inofambisa pamusoro pesero rebhatiri, inoderedza mwero wekubatanidza pamusoro pesero re emitter junction, inoderedza dark current, inowedzera open circuit voltage, uye inovandudza kushanda kwe photoelectric conversion. Kupisa kwakanyanya panguva imwe chete mukupisa kunotyora mamwe maSi-H neNH bonds, uye H yakasunungurwa inowedzera kusimbisa kutenderera kwebhatiri.

 

Sezvo zvinhu zvesilicon zvemhando ye photovoltaic zvine tsvina yakawanda uye zvikanganiso, hupenyu hwekutakura hushoma uye hurefu hwekupararira musilicon zvinoderedzwa, zvichikonzera kudzikira kwekushanda kwebhatiri. H inogona kuita nezvikanganiso kana zvikanganiso musilicon, nokudaro ichiendesa simba mubhandi rebhandi kuenda mubhandi re valence kana bhandi re conduction.

 

1. Nheyo yePECVD

Sisitimu yePECVD imhando yemajenareta anoshandisaChikepe chegrafiti chePECVD uye maexciters eplasma ane frequency yakakwira. Chinogadzirwa neplasma chinoiswa zvakananga pakati peplate yekuputira kuti chiite kana paine kumanikidzwa kwakaderera uye tembiricha yakakwira. Magasi anoshanda anoshandiswa ndi silane SiH4 uye ammonia NH3. Magasi aya anoshanda pasilicon nitride yakachengetwa pasilicon wafer. Zviratidzo zvakasiyana zve refractive zvinogona kuwanikwa nekushandura chiyero che silane kune ammonia. Munguva yekuiswa, huwandu hwakawanda hwemaatomu ehydrogen uye maion ehydrogen zvinogadzirwa, zvichiita kuti hydrogen passivation yewafer ive yakanaka kwazvo. Mu vacuum uye tembiricha yemhepo ye480 degrees Celsius, layer yeSixNy inoputirwa pamusoro pesilicon wafer nekuita kutiChikepe chegrafiti chePECVD.

 

3SiH4+4NH3 → Si3N4+12H2

 

2. Si3N4

Ruvara rwefirimu reSi3N4 runochinja nekukora kwaro. Kazhinji, ukobvu hwakakodzera huri pakati pe75 ne80 nm, hunotaridzika sebhuruu rakasvibira. Chiratidzo chefirimu reSi3N4 chinonyatsoenderana ne2.0 ne2.5. Doro rinowanzo shandiswa kuyera chiyero charo cherefractive.

Mhedzisiro yakanaka kwazvo yekudzivirira kupenya pamusoro, mashandiro anoshanda ekudzivirira kupenya kwemaziso (kufananidza ukobvu hwe refractive index), maitiro ekupisa akaderera (zvichideredza mitengo zvinobudirira), uye ma H ions akagadzirwa anobvisa kupenya pamusoro pe silicon wafer.

 

3. Nyaya dzakajairika mumusangano wekuputira

Ukobvu hwefirimu: 

Nguva yekuiswa kwefirimu yakasiyana pamhando dzakasiyana dzehukobvu hwefirimu. Nguva yekuiswa kwefirimu inofanira kuwedzerwa kana kuderedzwa zvichienderana neruvara rwependi. Kana firimu rakachena, nguva yekuiswa kwefirimu inofanira kuderedzwa. Kana rakatsvuka, rinofanira kuwedzerwa zvakakodzera. Boka rega rega remafirimu rinofanira kusimbiswa zvizere, uye zvigadzirwa zvisina kunaka hazvibvumirwi kuyerera mumaitiro anotevera. Semuenzaniso, kana pendi yacho isina kunaka, senge mavara emavara uye watermarks, kuchena kwepaso kwakajairika, musiyano wemavara, uye mavara machena pamutsetse wekugadzira zvinofanirwa kusarudzwa nenguva. Kuchena kwepaso kunonyanya kukonzerwa nefirimu gobvu resilicon nitride, iro rinogona kugadziriswa nekugadzirisa nguva yekuiswa kwefirimu; firimu rekusiyana kwemavara rinonyanya kukonzerwa nekuvharika kwenzira yegesi, kubuda kwechubhu ye quartz, kutadza kushanda kwe microwave, nezvimwewo; mavara machena anonyanya kukonzerwa nemavanga matema madiki mumaitiro apfuura. Kutarisa kuratidzwa kwechiedza, index ye refractive, nezvimwewo, kuchengetedzeka kwemagasi akakosha, nezvimwewo.

 

Mavara machena pamusoro:

PECVD inzira yakakosha mumasero ezuva uye chiratidzo chakakosha chekushanda zvakanaka kwemasero ezuva ekambani. Maitiro ePECVD anowanzo shanda, uye boka rega rega remasero rinofanira kutariswa. Kune machubhu akawanda echoto chekuvhara, uye chubhu yega yega inowanzova nemazana emasero (zvichienderana nemidziyo). Mushure mekuchinja maparamita emaitiro, kutenderera kwekusimbisa kunotora nguva yakareba. Tekinoroji yekuvhara itekinoroji iyo indasitiri yese ye photovoltaic inokoshesa zvikuru. Kushanda zvakanaka kwemasero ezuva kunogona kuvandudzwa nekuvandudza tekinoroji yekuvhara. Mune ramangwana, tekinoroji yepamusoro pemasero ezuva inogona kuva budiriro mukushanda zvakanaka kwemasero ezuva.