Tuatahi, me mōhio tātouPECVD(Te Whakapūtanga Kohu Matū Whakarei ake i te Plasma). Ko te plasma te whakanui ake i te nekehanga wera o ngā ngota rauemi. Mā te tukinga i waenganui i a rātou ka whaka-ionia ngā ngota hau, ā, ka huri te rauemi hei ranunga o ngā katote pai e nekeneke noa ana, ngā irahiko me ngā matūriki kūpapa e taunekeneke ana tetahi ki tetahi.
E ai ki te whakatau tata, ko te tere ngaronga whakaata o te mārama i runga i te mata silicon he teitei ki te 35%. Ka taea e te kiriata ārai-whakaata te whakapai ake i te tere whakamahinga o te mārama o te rā e te pūtau pākahiko, ka āwhina i te whakanui ake i te kiato o te iahiko whakaputa-whakaahua, ā, ka whakapai ake i te pai o te huringa. I taua wā anō, ka whakakorehia e te hauwai i roto i te kiriata te mata o te pūtau pākahiko, ka whakaiti i te tere whakakotahitanga mata o te hononga emitter, ka whakaiti i te iahiko pōuri, ka whakanui ake i te ngaohiko ara iahiko tuwhera, ā, ka whakapai ake i te pai o te huringa hiko-whakaahua. Ko te whakamahana tere-mahana i roto i te tukanga tahu-ā-roto ka pakaru i ētahi hononga Si-H me NH, ā, ko te H kua wetekina ka whakapakari ake i te whakakorenga o te pākahiko.
I te mea he nui ngā poke me ngā hapa kei roto i ngā rauemi silicon kounga photovoltaic, ka whakaitihia te roa o te oranga o te kaikawe iti me te roa o te horapa i roto i te silicon, ka heke te pai o te huringa o te pākahiko. Ka taea e te H te tauhohe ki ngā hapa, ki ngā poke rānei i roto i te silicon, ā, ka whakawhitihia te roopu pūngao i roto i te āputa roopu ki roto i te roopu valence, te roopu kawe hiko rānei.
1. Te Mātāpono PECVD
Ko te pūnaha PECVD he raupapa o ngā kaihanga hiko e whakamahi ana iWaka karāhe PECVD me ngā whakaoho plasma auau-teitei. Kei waenganui tonu o te pereti paninga te kaihanga plasma hei tauhohe i raro i te pēhanga iti me te pāmahana teitei. Ko ngā hau hohe e whakamahia ana ko te silane SiH4 me te haukini NH3. Ka mahi ēnei hau ki te nitride silicon e rongoatia ana i runga i te papa silicon. Ka taea te whiwhi i ngā tohu whakaata rerekē mā te whakarerekē i te ōwehenga o te silane ki te haukini. I te wā o te tukanga whakatakotoranga, ka puta he nui o ngā ngota hauwai me ngā katote hauwai, ka tino pai te whakakorenga hauwai o te papa. I roto i te korehau me te pāmahana taiao o te 480 nekehanga Celsius, ka pania he paparanga o SixNy ki runga i te mata o te papa silicon mā te whakahaere i teWaka karāhe PECVD.
3SiH4+4NH3 → Si3N4+12H2
2. Si3N4
Ka rerekē te tae o te kiriata Si3N4 i tōna matotoru. Ko te matotoru pai rawa atu i waenga i te 75 me te 80 nm, ā, he kikorangi pouri te āhua. Ko te taupū whakaata o te kiriata Si3N4 he pai rawa atu i waenga i te 2.0 me te 2.5. Ko te waipiro te tikanga e whakamahia ana hei ine i tōna taupū whakaata.
He tino pai te pānga whakakore i te mata, he pai te mahi ārai-whakaata whatu (te taurite o te taupū whakaata matotoru), he tukanga pāmahana iti (te whakaiti i ngā utu), ā, ka whakakorea te mata o te anga silicon e ngā katote H kua hangaia.
3. Ngā take noa i roto i te awheawhe paninga
Te matotoru o te kiriata:
He rerekē te wā whakatakoto mō ngā matotoru kiriata rerekē. Me whakanui, me whakaiti rānei te wā whakatakoto kia rite ki te tae o te paninga. Mena he mā te kiriata, me whakaiti te wā whakatakoto. Mena he whero, me whakanui kia tika. Me whakaū katoa ia waka kiriata, ā, kaua e tukuna ngā hua hapa kia rere ki te tukanga e whai ake nei. Hei tauira, mena he ngoikore te paninga, pērā i ngā ira tae me ngā tohuwai, me kimi i te wā tika te mā o te mata, te rerekētanga tae, me ngā ira mā i runga i te raina whakaputa. Ko te mā o te mata te take nui o te kiriata silicon nitride matotoru, ka taea te whakarite mā te whakarite i te wā whakatakoto kiriata; ko te take nui o te kiriata rerekētanga tae ko te aukati i te ara hau, te turuturu o te ngongo quartz, te rahunga o te ngaruiti, me ētahi atu; ko ngā ira mā te take nui o ngā ira pango iti i roto i te tukanga o mua. Te aroturuki i te whakaata, te taupū whakaata, me ētahi atu, te haumaru o ngā hau motuhake, me ētahi atu.
Ngā ira mā i runga i te mata:
He tukanga tino nui te PECVD i roto i ngā pūtau rā, ā, he tohu nui hoki mō te whai huatanga o ngā pūtau rā o tētahi kamupene. He pukumahi te tukanga PECVD i te nuinga o te wā, ā, me aroturuki ia puranga pūtau. He maha ngā ngongo oumu paninga, ā, he rau ngā pūtau o ia ngongo (i runga i te taputapu). Whai muri i te whakarerekētanga o ngā tawhā tukanga, he roa te huringa manatoko. He hangarau te hangarau paninga e aro nui ana te umanga photovoltaic katoa ki tēnei. Ka taea te whakapai ake i te whai huatanga o ngā pūtau rā mā te whakapai ake i te hangarau paninga. I te heke mai, ka taea e te hangarau mata pūtau rā te huri hei putanga hou i roto i te whai huatanga ariā o ngā pūtau rā.
Wā tuku: Hakihea-23-2024