Ihame ry'ubwato bwa grafiti bwa PECVD ku mirasire y'izuba (coating) | VET Energy

Mbere na mbere, tugomba kumenyaPECVD(Plasma Enhanced Chemical Vapor Deposition). Plasma ni ukwiyongera k'ubushyuhe bw'uturemangingo tw'ibintu. Guhura hagati yabyo bizatuma uturemangingo twa gaze duhinduka iyoni, kandi ibyo bintu bizahinduka uruvange rwa iyoni nziza zigenda, electron n'uduce tudafite aho duhuriye bikorana.

 

Bivugwa ko igipimo cyo kubura urumuri ku buso bwa silikoni kiri hejuru cyane nka 35%. Filimi irwanya kugaragara ishobora kunoza cyane igipimo cyo gukoresha urumuri rw'izuba n'akaremangingo ka bateri, ibi bifasha kongera ubucucike bw'umuriro ukomoka kuri foto bityo bikanoza imikorere myiza yo guhindura. Muri icyo gihe, hydrogen iri muri firime ihindura ubuso bw'akaremangingo ka bateri, ikagabanya igipimo cyo gusubiranamo kw'ubuso bw'aho imiyoboro ihurira, ikagabanya umuvuduko w'umwijima, yongera voltage y'uruziga rufunguye, kandi ikanoza imikorere myiza yo guhindura amashanyarazi. Gutera ubushyuhe bwinshi mu buryo bwihuse mu nzira yo gutwika bigabanya imigozi imwe na imwe ya Si-H na NH, kandi H yakuweho irushaho gushimangira kunyura kwa bateri.

 

Kubera ko ibikoresho bya silikoni byo mu rwego rwa photovoltaic bihora bifite umwanda n'ubusembwa bwinshi, igihe cyo gutwara amashanyarazi make n'igihe cyo gukwirakwira muri silikoni biragabanuka, bigatuma ubushobozi bwa bateri bwo guhindura amashanyarazi bugabanuka. H ishobora gukorana n'ubusembwa cyangwa imyanda muri silikoni, bityo igashyira ingufu mu gice cy'umugozi mu gice cy'umugozi mu gice cy'umugozi cyangwa mu gice cy'umugozi.

 

1. Ihame rya PECVD

Sisitemu ya PECVD ni urukurikirane rw'imashini zitanga moteri zikoreshaUbwato bwa grafiti ya PECVD n'ibikurura plasma bifite frequency nyinshi. Imashini ikora plasma ishyirwa hagati y'isahani yo gutwikira kugira ngo ikore neza mu gihe hari umuvuduko muke n'ubushyuhe bwinshi. Imyuka ikoreshwa ni silane SiH4 na ammonia NH3. Iyi myuka ikora kuri silicon nitride ibitswe kuri silicon wafer. Ibimenyetso bitandukanye byo kugarura ubushyuhe bishobora kuboneka hakoreshejwe guhindura ikigereranyo cya silane na ammonia. Mu gihe cyo gushyiramo, hakorwa atome nyinshi za hydrogen na iyoni za hydrogen, bigatuma hydrogen passivation ya wafer iba nziza cyane. Mu mwanya w'ubushyuhe n'ubushyuhe bwa dogere selisiyusi 480, urwego rwa SixNy rushyirwa ku buso bwa silicon wafer binyuze mu kuyoboraUbwato bwa grafiti ya PECVD.

 

3SiH4+4NH3 → Si3N4+12H2

 

2. Si3N4

Ibara rya firime ya Si3N4 rihinduka bitewe n'ubunini bwayo. Muri rusange, ubunini bwiza ni hagati ya nanometero 75 na 80, bigaragara nk'ubururu bwijimye. Igipimo cyo kugarura ubushyuhe cya firime ya Si3N4 ni cyiza cyane hagati ya 2.0 na 2.5. Ubusanzwe inzoga ikoreshwa mu gupima igipimo cyo kugarura ubushyuhe.

Ingaruka nziza cyane zo kunyura hejuru y'urumuri, imikorere myiza yo kurwanya kugaragara neza kw'urumuri (guhuza ubugari bw'urumuri rw'inyuma), uburyo bwo kugabanya ubushyuhe (bigabanya ikiguzi neza), kandi ioni za H zikozwe zinyura hejuru y'urumuri rwa silikoni.

 

3. Ibintu bisanzwe mu iduka ry'amatafari

Ubunini bwa filime: 

Igihe cyo gushyiramo filime kiratandukanye bitewe n'ubugari butandukanye bwa filime. Igihe cyo gushyiramo filime kigomba kongerwa cyangwa kugabanywa hakurikijwe ibara ry'igitambaro. Niba filime ari umweru, igihe cyo gushyiramo filime kigomba kugabanuka. Niba ari umutuku, kigomba kongerwa uko bikwiye. Buri bwato bw'amafirime bugomba kwemezwa neza, kandi ibicuruzwa bifite inenge ntibyemerewe gutembera mu nzira ikurikira. Urugero, niba igitambaro ari kibi, nk'utudomo tw'amabara n'ibimenyetso by'amazi, umweru ukunze kugaragara ku buso, itandukaniro ry'amabara, n'utudomo tw'umweru ku murongo w'umusaruro bigomba gutorwa mu gihe. Kwera ku buso ahanini guterwa na filime nini ya silicon nitride, ishobora guhindurwa hakoreshejwe guhindura igihe cyo gushyiramo filime; filime y'itandukaniro ry'amabara ahanini iterwa no kuziba inzira ya gaze, kuva kwa quartz tube, kwangirika kwa microwave, nibindi; utudomo tw'umweru ahanini duterwa n'utudomo duto tw'umukara mu nzira yabanje. Gukurikirana uburyo bwo kugaruramo filime, imiterere ya refractive, nibindi, umutekano w'imyuka yihariye, nibindi.

 

Uduce tw'umweru ku buso:

PECVD ni igikorwa cy'ingenzi cyane mu turemangingo tw'izuba kandi ni ikimenyetso cy'ingenzi cy'imikorere myiza y'uturemangingo tw'izuba tw'ikigo. Imikorere ya PECVD muri rusange iba ihuze, kandi buri gice cy'uturemangingo kigomba gukurikiranwa. Hariho imiyoboro myinshi yo gusiga irangi, kandi buri turemangingo muri rusange ifite amagana y'uturemangingo (biterwa n'ibikoresho). Nyuma yo guhindura ibipimo by'imikorere, igihe cyo kugenzura kiba kirekire. Ikoranabuhanga ryo gusiga irangi ni ikoranabuhanga inganda zose zikora ku zuba ziha agaciro gakomeye. Imikorere myiza y'uturemangingo tw'izuba ishobora kunozwa binyuze mu kunoza ikoranabuhanga ryo gusiga irangi. Mu gihe kizaza, ikoranabuhanga ryo hejuru y'uturemangingo tw'izuba rishobora kuba intambwe ikomeye mu mikorere myiza y'uturemangingo tw'izuba.