Okokuqala, sidinga ukwaziI-PECVD(Ukufakwa Komhwamuko Wamakhemikhali Othuthukisiwe Nge-Plasma). I-Plasma iwukuqiniswa kokunyakaza kokushisa kwama-molecule ezinto ezibonakalayo. Ukungqubuzana phakathi kwawo kuzokwenza ama-molecule egesi abe yi-ionized, futhi izinto zizoba yingxube yama-ion amahle ahamba ngokukhululekile, ama-electron kanye nezinhlayiya ezingathathi hlangothi ezisebenzisana.
Kulinganiselwa ukuthi izinga lokulahleka kokukhanya kokukhanya ebusweni be-silicon liphezulu cishe ku-35%. Ifilimu elwa nokukhanya ingathuthukisa kakhulu izinga lokusetshenziswa kokukhanya kwelanga yiseli yebhethri, okusiza ukwandisa ubuningi bamanje obukhiqizwa nge-photogenerated futhi ngaleyo ndlela kuthuthukiswe ukusebenza kahle kokuguqulwa. Ngesikhathi esifanayo, i-hydrogen efilimini idlulisa ubuso beseli yebhethri, yehlisa izinga lokuhlanganiswa kobuso be-emitter junction, yehlisa ugesi omnyama, yandisa i-open circuit voltage, futhi ithuthukisa ukusebenza kahle kokuguqulwa kwe-photoelectric. Ukufakwa kwe-innealing okusheshayo okushisa okuphezulu enkambisweni yokushisa kuphula ezinye izibopho ze-Si-H ne-NH, kanti i-H ekhululiwe iqinisa kakhulu ukudlula kwebhethri.
Njengoba izinto ze-silicon ze-photovoltaic-grade ziqukethe inani elikhulu lokungcola kanye namaphutha, isikhathi sokuphila kwe-minority carrier kanye nobude bokusabalalisa ku-silicon kuyancishiswa, okuholela ekunciphiseni ukusebenza kahle kokuguqulwa kwebhethri. I-H ingasabela namaphutha noma ukungcola ku-silicon, ngaleyo ndlela idlulisele ibhendi yamandla ku-bandgap iye kubhendi ye-valence noma ibhendi yokuqhuba.
1. Isimiso se-PECVD
Uhlelo lwe-PECVD luwuchungechunge lwamajeneretha asebenzisaIsikebhe se-graphite se-PECVD kanye nama-exciters e-plasma avame kakhulu. Ijeneretha ye-plasma ifakwe ngqo phakathi kwepuleti lokumboza ukuze isabele ngaphansi kwengcindezi ephansi kanye nokushisa okuphezulu. Amagesi asebenzayo asetshenziswayo yi-silane SiH4 kanye ne-ammonia NH3. Lawa magesi asebenza ku-silicon nitride egcinwe ku-silicon wafer. Izinkomba ezahlukene zokubuyisa zingatholakala ngokushintsha isilinganiso se-silane ku-ammonia. Ngesikhathi senqubo yokufaka, inani elikhulu lama-athomu e-hydrogen nama-ion e-hydrogen ayakhiqizwa, okwenza i-hydrogen passivation ye-wafer ibe yinhle kakhulu. Ku-vacuum kanye nokushisa okuzungezile okungu-480 degrees Celsius, ungqimba lwe-SixNy lumbozwa phezu kwe-silicon wafer ngokwenza i-Isikebhe se-graphite se-PECVD.
3SiH4+4NH3 → Si3N4+12H2
2. I-Si3N4
Umbala wefilimu ye-Si3N4 uyashintsha ngokujiya kwayo. Ngokuvamile, ukujiya okufanele kuphakathi kuka-75 no-80 nm, okubonakala kuluhlaza okwesibhakabhaka okumnyama. Inkomba yokujiya yefilimu ye-Si3N4 ingcono kakhulu phakathi kuka-2.0 no-2.5. Utshwala luvame ukusetshenziselwa ukukala inkomba yayo yokujiya.
Umphumela omuhle kakhulu wokudlula kobuso, ukusebenza kahle kokumelana nokukhanya kokukhanya (ukulinganisa ubukhulu benkomba yokukhanya), inqubo yokushisa ephansi (kunciphisa izindleko ngempumelelo), kanye nama-ion e-H akhiqiziwe adlula kobuso be-silicon wafer.
3. Izindaba ezivamile emsebenzini wokuhlobisa
Ubukhulu befilimu:
Isikhathi sokufakwa kwefilimu sihlukile ngobukhulu obuhlukene befilimu. Isikhathi sokufakwa kwefilimu kufanele sandiswe noma sincishiswe ngokufanele ngokuya ngombala wengubo. Uma ifilimu imhlophe, isikhathi sokufakwa kwefilimu kufanele sincishiswe. Uma ibomvu, kufanele yandiswe ngokufanele. Isikebhe ngasinye samafilimu kufanele siqinisekiswe ngokugcwele, futhi imikhiqizo enephutha ayivunyelwe ukugeleza enkambisweni elandelayo. Isibonelo, uma ingubo imbi, njengamabala ombala nama-watermark, ukumhlophe okuvame kakhulu kobuso, umehluko wombala, namabala amhlophe emgqeni wokukhiqiza kufanele kukhethwe ngesikhathi. Ukumhlophe kobuso kubangelwa kakhulu ifilimu ejiyile ye-silicon nitride, engalungiswa ngokulungisa isikhathi sokufakwa kwefilimu; ifilimu yomehluko wombala ibangelwa kakhulu ukuvaleka kwendlela yegesi, ukuvuza kweshubhu le-quartz, ukwehluleka kwe-microwave, njll.; amabala amhlophe abangelwa kakhulu amabala amnyama amancane enkambisweni yangaphambilini. Ukuqapha ukubonakaliswa, inkomba yokukhanya, njll., ukuphepha kwamagesi akhethekile, njll.
Amabala amhlophe ebusweni:
I-PECVD iyinqubo ebaluleke kakhulu kumaseli elanga futhi iyinkomba ebalulekile yokusebenza kahle kwamaseli elanga enkampani. Inqubo ye-PECVD ngokuvamile imatasa, futhi inqwaba ngayinye yamaseli idinga ukubhekwa. Kunezimbobo eziningi zesithando somlilo, futhi ithubhu ngalinye ngokuvamile linamakhulu amaseli (kuye ngokuthi imishini iyasebenza). Ngemva kokushintsha amapharamitha enqubo, umjikelezo wokuqinisekisa uba mude. Ubuchwepheshe bokumboza buwubuchwepheshe imboni yonke ye-photovoltaic ebubheka njengobubaluleke kakhulu. Ukusebenza kahle kwamaseli elanga kungathuthukiswa ngokuthuthukisa ubuchwepheshe bokumboza. Esikhathini esizayo, ubuchwepheshe bomphezulu wamaseli elanga bungaba yintuthuko ekusebenzeni kahle kwethiyori kwamaseli elanga.
Isikhathi sokuthunyelwe: Disemba 23-2024