SiC Coated Graphite Halfmoon Chikamu CheSilicon Carbide Epitaxial Furnace

Tsananguro pfupi:

VET Energy inyanzvi yekugadzira uye inopa zvikamu zvikuru zve silicon carbide epitaxial furnaces. Chikamu chedu che SiC coated graphite halfmoon chinoshandisa high-purity graphite pamwe chete ne CVD coating technology yepamusoro. Yakagadzirirwa nzvimbo dze epitaxial dzinopisa zvakanyanya uye dzinopisa zvakanyanya. Iyo high-purity graphite inopa chikamu ichi simba rakanaka rekudzivirira kupisa kwakanyanya (>1600℃) uye kugadzikana kwekupisa, zvichiita kuti thermal field ifanane; iyo CVD coating inoumba dense protective layer pamusoro kuburikidza ne CVD technology, ichivandudza zvakanyanya anti-oxidation uye anti-etching properties, uye inowedzera hupenyu hwebasa nekanopfuura katatu.

Zvinyorwa:Graphite yakachena kwazvo

Kucheneswa:＜5ppm

Kupfeka:CVD-SiC kana CVD-TaC

Kugadzirisa:Chitofu cheBrand kana OEM

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Ruzivo rweChigadzirwa

Matagi eChigadzirwa

SiC Coated Graphite Halfmoon Chikamuchinhu chakakosha chinoshandiswa mukugadzira semiconductor, kunyanya pamidziyo yeSiC epitaxial. Tinoshandisa tekinoroji yedu ine patent kugadzira chikamu chehafu yemwedzi chakachena zvikuru, chinoenderana zvakanaka uye chinoshanda zvakanaka, pamwe nekudzivirira makemikari zvakanyanya uye hunhu hwekugadzikana kwekupisa.

Zvinhu zvepakutanga: graphite yakachena kwazvo
Zvinodiwa pakuchena:huwandu hwekabhoni ≥99.99%, huwandu hwedota ≤5ppm, kuve nechokwadi chekuti hapana tsvina inokonzereswa kuti isvibise epitaxial layer pakupisa kwakanyanya.
Zvakanakira mashandiro:
Kupisa kwakanyanya:Kupisa kwemhepo patembiricha yemumba kunosvika 150W/(m・K), iyo iri pedyo nehukuru hwemhangura uye inogona kutamisa kupisa nekukurumidza.
Kuwanda kwekuwedzera kwakaderera:5×10^-6/℃ (25-1000℃), inoenderana nesilicon carbide substrate (4.2×10^-6/℃), kuderedza kutsemuka kwependi inokonzerwa nekumanikidzwa kwekupisa.
Kunyatsogadzirisa:Kukwanisa kushivirira ±0.05mm neCNC machining kuve nechokwadi chekuti kamuri rakavharwa.

Mashandisirwo akasiyana eCVD SiC neCVD TaC

Kuputira	Maitiro	Kuenzanisa	Kushandiswa kwakajairika
CVD-SiC	Kupisa: 1000-1200℃ Kudzvanywa: 10-100 Torr	Kuomarara HV2500, ukobvu 50-100um, kuramba kuoxidation kwakanaka (kwakagadzikana pasi pe1600℃)	Mafuro e epitaxial epasi rose, akakodzera mamiriro ekunze akadai sehydrogen ne silane
CVD-TaC	Tembiricha: 1600-1800℃ Kudzvanywa: 1-10 Torr	Kuomarara HV3000, ukobvu 20-50um, inodzivirira ngura zvakanyanya (inogona kutsungirira magasi anoparadza akadai seHCl, NH₃, nezvimwewo)	Nzvimbo dzine ngura yakawanda (senge GaN epitaxy nemichina yekuchekerera), kana maitiro chaiwo anoda tembiricha yakakwira zvikuru ye2600°C

Kuongorora mhando

Ukobvu hwekuputira: chiyero chekukora kwelaser (kururama ± 1um) kana ongororo yeSEM cross-sectional.
Simba rekubatanidza: bvunzo yekukwenya (mutoro wakakosha > 50N) kana bvunzo ye ultrasonic (kumhanya kweruzha > 5000m/s).
Kuramba ngura: mwero wekurasikirwa nehuremu (<0.1 mg/cm²・h) wakaedzwa mumhepo yeHCl (5 vol%, 1600℃).

VET Energy inyanzvi yekugadzira inotarisa paR&D uye kugadzirwa kwezvinhu zvepamusoro-soro zvakaita segraphite, silicon carbide, quartz, pamwe nekurapwa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo. Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.

Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.

Zvakanakira zveVET Energy zvinosanganisira:
• Laboratori yemufekitori neyanyanzvi;
• Matanho ekuchena uye mhando yepamusoro-soro muindasitiri;
• Mutengo unokwikwidzana & Nguva yekutumira nekukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;

Tinokugamuchirai kuti mushanyire fekitori yedu nerabhoritari chero nguva!