He mea nui nā ʻāpana graphite maʻemaʻe kiʻekiʻe inā kaʻina hana ma ka ʻoihana semiconductor, LED a me ka lā. Loaʻa kā mākou hāʻawi ʻana mai nā mea hoʻopau graphite no nā wahi wela e ulu ana i ka kristal (nā mea hoʻomehana, nā mea hoʻoulu ipu hao, ka insulation), a hiki i nā ʻāpana graphite kiʻekiʻe no nā lako hana wafer, e like me nā mea hoʻoulu graphite i uhi ʻia me ka silicon carbide no Epitaxy a i ʻole MOCVD. ʻO kēia kahi e komo ai kā mākou graphite kūikawā: he mea nui ka graphite isostatic no ka hana ʻana i nā papa semiconductor hui. Hoʻokumu ʻia kēia mau mea ma ka "wahi wela" ma lalo o nā mahana koʻikoʻi i ka wā i kapa ʻia ʻo epitaxy, a i ʻole ke kaʻina hana MOCVD. ʻO ka mea lawe wili e uhi ʻia ai nā wafers i loko o ka reactor, aia i loko o ka graphite isostatic i uhi ʻia me ka silicon carbide. ʻO kēia graphite maʻemaʻe loa, homogeneous wale nō e hoʻokō i nā koi kiʻekiʻe i ke kaʻina hana uhi.
TʻO ke kumu nui o ka ulu ʻana o ka wafer epitaxial LEDMa luna o kahi substrate (ʻo ia hoʻi ka sapphire, SiC a me Si) i hoʻomehana ʻia i kahi mahana kūpono, ua lawe ʻia ka mea kinoea InGaAlP i ka ʻili o ka substrate ma ke ʻano i kāohi ʻia e ulu i kahi kiʻiʻoniʻoni kristal hoʻokahi. I kēia manawa, hoʻohana nui ka ʻenehana ulu o ka wafer epitaxial LED i ka waiho ʻana o ka mahu metala organik.
Mea substrate epitaxial LEDʻo ia ke kihi o ka hoʻomohala ʻenehana o ka ʻoihana kukui semiconductor. Pono nā mea substrate like ʻole i nā ʻenehana ulu wafer epitaxial LED like ʻole, ʻenehana hana chip a me ka ʻenehana hoʻopili hāmeʻa. Hoʻoholo nā mea substrate i ke ala hoʻomohala o ka ʻenehana kukui semiconductor.
Nā ʻano o ke koho ʻana i nā mea substrate wafer epitaxial LED:
1. Loaʻa i ka mea epitaxial ke ʻano kristal like a like paha me ka substrate, ka mismatch mau lattice liʻiliʻi, ka crystallinity maikaʻi a me ka density kīnā haʻahaʻa
2. Nā ʻano pilina maikaʻi, kūpono i ka nucleation o nā mea epitaxial a me ka hoʻopili ikaika
3. He kūpaʻa kemika maikaʻi kona a ʻaʻole maʻalahi ke palaho a ʻōpala i ka mahana a me ka lewa o ka ulu ʻana o ka epitaxial
4. Hana maikaʻi ka hana wela, me ka conductivity wela maikaʻi a me ka mismatch wela haʻahaʻa
5. ʻO ka conductivity maikaʻi, hiki ke hana ʻia i loko o ke ʻano o luna a me lalo 6, hana optical maikaʻi, a ʻo ka mālamalama i hoʻopuka ʻia e ka mea i hana ʻia ua emi iki ka omo ʻia e ka substrate
7. Nā waiwai mechanical maikaʻi a me ka hana maʻalahi o nā mea hana, me ka lahilahi, ka polishing a me ka ʻoki ʻana
8. Kumukūʻai haʻahaʻa.
9. Nui. Ma keʻano laulā, ʻaʻole e emi ke anawaena ma mua o 2 ʻīniha.
10. He mea maʻalahi ke loaʻa ʻana o ke ʻano maʻamau o ka substrate (ke ʻole he mau koi kūikawā ʻē aʻe), a ʻo ke ʻano o ka substrate e like me ka lua o ka pā o nā lako epitaxial ʻaʻole ia he mea maʻalahi ke hana i ke au eddy maʻamau ʻole, no laila e hoʻopilikia i ka maikaʻi o ka epitaxial.
11. Ma ke kumu o ka ʻole e hoʻopilikia i ka maikaʻi epitaxial, pono e hoʻokō ka mīkini o ka substrate i nā koi o ka hana ʻāpana a me ka hoʻopili ʻana ma hope e like me ka hiki.
He mea paʻakikī loa ke koho ʻana o ka substrate e hoʻokō i nā ʻano he ʻumikumamākahi i luna i ka manawa like.No laila, i kēia manawa, hiki iā mākou ke hoʻololi wale i ka R&D a me ka hana ʻana o nā mea hoʻomālamalama semiconductor ma nā substrates like ʻole ma o ka hoʻololi ʻana o ka ʻenehana ulu epitaxial a me ka hoʻoponopono ʻana o ka ʻenehana hana hāmeʻa. Nui nā mea substrate no ka noiʻi gallium nitride, akā ʻelua wale nō substrates e hiki ke hoʻohana ʻia no ka hana ʻana, ʻo ia hoʻi ka sapphire Al2O3 a me ka silicon carbide.Nā substrates SiC.
Ka manawa hoʻouna: Pepeluali-28-2022