Cov khoom siv graphite purity siab yog qhov tseem ceeb rauCov txheej txheem hauv kev lag luam semiconductor, LED thiab hnub ci. Peb cov khoom muaj ntau yam los ntawm cov khoom siv graphite rau cov chaw kub uas loj hlob siv lead ua (cov cua sov, crucible susceptors, rwb thaiv tsev), mus rau cov khoom siv graphite siab rau cov khoom siv ua wafer, xws li silicon carbide coated graphite susceptors rau Epitaxy lossis MOCVD. Qhov no yog qhov uas peb cov graphite tshwj xeeb los ua si: isostatic graphite yog qhov tseem ceeb rau kev tsim cov txheej semiconductor sib xyaw. Cov no tau tsim nyob rau hauv "cheeb tsam kub" nyob rau hauv qhov kub heev thaum lub sijhawm hu ua epitaxy, lossis MOCVD txheej txheem. Lub rotating carrier uas cov wafers tau coated hauv lub reactor, muaj silicon carbide-coated isostatic graphite. Tsuas yog qhov graphite ntshiab heev, homogeneous no ua tau raws li qhov xav tau siab hauv cov txheej txheem txheej.
TLub hauv paus ntsiab lus ntawm LED epitaxial wafer kev loj hlob yog: ntawm lub substrate (feem ntau yog sapphire, SiC thiab Si) cua sov rau qhov kub thiab txias, cov khoom siv roj InGaAlP raug thauj mus rau qhov chaw substrate hauv txoj kev tswj hwm kom loj hlob ib zaj duab xis siv lead ua ke. Tam sim no, cov thev naus laus zis loj hlob ntawm LED epitaxial wafer feem ntau siv cov organic hlau tshuaj lom neeg vapor deposition.
Cov khoom siv LED epitaxial substrateyog lub hauv paus tseem ceeb ntawm kev txhim kho thev naus laus zis ntawm kev lag luam teeb pom kev zoo semiconductor. Cov ntaub ntawv sib txawv ntawm cov khoom siv substrate xav tau cov thev naus laus zis LED epitaxial wafer loj hlob, thev naus laus zis ua cov chip thiab thev naus laus zis ntim khoom siv sib txawv. Cov ntaub ntawv substrate txiav txim siab txoj kev loj hlob ntawm cov thev naus laus zis teeb pom kev zoo semiconductor.
Cov yam ntxwv ntawm LED epitaxial wafer substrate xaiv cov khoom siv:
1. Cov khoom siv epitaxial muaj cov qauv siv lead ua zoo ib yam lossis zoo sib xws nrog lub substrate, me me lattice tsis sib xws, crystallinity zoo thiab qhov tsis zoo tsawg.
2. Cov yam ntxwv zoo ntawm interface, ua rau lub nucleation ntawm cov ntaub ntawv epitaxial thiab muaj zog adhesion
3. Nws muaj kev ruaj khov tshuaj zoo thiab tsis yooj yim rau decompose thiab corrode nyob rau hauv qhov kub thiab huab cua ntawm epitaxial kev loj hlob
4. Kev ua haujlwm zoo thermal, suav nrog kev ua haujlwm thermal zoo thiab kev tsis sib haum xeeb thermal tsawg
5. Kev coj ua zoo, tuaj yeem ua rau sab saud thiab qis dua 6, kev ua haujlwm zoo ntawm qhov muag, thiab lub teeb uas tawm los ntawm cov khoom siv tsim yog tsawg dua nqus los ntawm lub substrate
7. Cov khoom siv kho tshuab zoo thiab yooj yim ua cov khoom siv, suav nrog kev thinning, polishing thiab txiav
8. Tus nqi qis.
9. Loj. Feem ntau, txoj kab uas hla yuav tsum tsis pub tsawg dua 2 nti.
10. Nws yooj yim kom tau txais cov duab zoo li qub (tshwj tsis yog tias muaj lwm yam kev cai tshwj xeeb), thiab cov duab zoo li lub qhov tais ntawm cov khoom siv epitaxial tsis yooj yim los tsim cov eddy tam sim no tsis sib xws, yog li cuam tshuam rau qhov zoo ntawm epitaxial.
11. Nyob rau hauv lub hauv paus ntawm tsis cuam tshuam rau qhov zoo ntawm epitaxial, qhov kev siv tshuab ntawm lub substrate yuav tsum ua tau raws li qhov yuav tsum tau ua ntawm cov chip thiab cov txheej txheem ntim khoom tom qab kom deb li deb tau.
Nws nyuaj heev rau kev xaiv cov substrate kom ua tau raws li kaum ib yam saum toj no tib lub sijhawm.Yog li ntawd, tam sim no, peb tsuas yog hloov kho tau rau R & D thiab kev tsim cov khoom siv hluav taws xob semiconductor ntawm ntau lub substrates los ntawm kev hloov pauv ntawm cov thev naus laus zis loj hlob epitaxial thiab kev hloov kho ntawm cov cuab yeej ua haujlwm. Muaj ntau cov ntaub ntawv substrate rau kev tshawb fawb gallium nitride, tab sis tsuas muaj ob lub substrates uas siv tau rau kev tsim khoom, uas yog sapphire Al2O3 thiab silicon carbide.Cov khoom siv SiC.
Lub sijhawm tshaj tawm: Lub Ob Hlis-28-2022