Zigawo za graphite zoyera kwambiri ndizofunikira kwambirinjira zomwe zimagwiritsidwa ntchito mu makampani opanga ma semiconductor, LED ndi dzuwa. Zinthu zomwe timapereka zimayambira pa zinthu zogwiritsidwa ntchito ndi graphite m'malo otentha omwe amamera ndi kristalo (zotenthetsera, zotenthetsera, zotenthetsera), mpaka zida zolondola kwambiri za graphite pazida zopangira ma wafer, monga ma silicon carbide coated graphite susceptors a Epitaxy kapena MOCVD. Apa ndi pomwe graphite yathu yapadera imagwira ntchito: isostatic graphite ndiyofunikira kwambiri popanga zigawo za semiconductor. Izi zimapangidwa mu "malo otentha" kutentha kwambiri panthawi yotchedwa epitaxy, kapena MOCVD. Chonyamulira chozungulira chomwe ma wafer amaphimbidwa mu reactor, chimakhala ndi silicon carbide-coated isostatic graphite. Graphite yoyera kwambiri, yofanana ndi iyi yokha ndiyo imakwaniritsa zofunikira kwambiri pakuphimba.
TMfundo yaikulu ya kukula kwa wafer wa LED epitaxial ndi: pa substrate (makamaka safiro, SiC ndi Si) ikatenthedwa kufika kutentha koyenera, mpweya wa InGaAlP umasamutsidwira pamwamba pa substrate mwanjira yolamulidwa kuti upange filimu imodzi ya kristalo. Pakadali pano, ukadaulo wokulira wa LED epitaxial wafer makamaka umagwiritsa ntchito kuyika kwa nthunzi yachitsulo cha organic metal.
Zipangizo za LED epitaxial substratendiye maziko a chitukuko cha ukadaulo wa makampani opanga magetsi a semiconductor. Zipangizo zosiyanasiyana za substrate zimafunikira ukadaulo wosiyanasiyana wa LED epitaxial wafer growth, ukadaulo wokonza ma chip ndi ukadaulo wopaka zida. Zipangizo za substrate zimatsimikizira njira yopangira ukadaulo wa magetsi a semiconductor.
Makhalidwe a kusankha kwa zinthu za LED epitaxial wafer substrate:
1. Zipangizo za epitaxial zili ndi kapangidwe ka kristalo kofanana kapena kofanana ndi gawo lapansi, kusalingana kwa latisi yaying'ono, kristalo wabwino komanso kachulukidwe kochepa ka chilema
2. Makhalidwe abwino a mawonekedwe, othandiza kuti zinthu za epitaxial zikhazikike komanso kuti zikhale zolimba
3. Ili ndi kukhazikika kwabwino kwa mankhwala ndipo sikophweka kuwola ndi kuwononga kutentha ndi mlengalenga wa kukula kwa epitaxial
4. Kugwira ntchito bwino kwa kutentha, kuphatikizapo kutentha koyenera komanso kusagwirizana pang'ono kwa kutentha
5. Kuyendetsa bwino kwa magetsi, kungapangidwe kukhala kapangidwe kapamwamba ndi kotsika 6, magwiridwe antchito abwino a kuwala, ndipo kuwala komwe kumatulutsidwa ndi chipangizo chopangidwacho sikulowa kwambiri ndi gawo lapansi.
7. Kapangidwe kabwino ka makina komanso kosavuta kukonza zipangizo, kuphatikizapo kupukuta, kupukuta ndi kudula
8. Mtengo wotsika.
9. Kukula kwakukulu. Kawirikawiri, kukula kwake sikuyenera kuchepera mainchesi awiri.
10. N'zosavuta kupeza substrate yooneka bwino (pokhapokha ngati pali zofunikira zina zapadera), ndipo mawonekedwe a substrate ofanana ndi dzenje la thireyi la zida za epitaxial si osavuta kupanga magetsi osasinthasintha a eddy, kotero kuti akhudze khalidwe la epitaxial.
11. Poganizira kuti sizikhudza khalidwe la epitaxial, kuthekera kwa makina a substrate kuyenera kukwaniritsa zofunikira pakukonza chip ndi ma phukusi pambuyo pake momwe zingathere.
N'zovuta kwambiri kuti kusankha gawo lapansi kukwaniritse zinthu khumi ndi chimodzi zomwe zili pamwambapa nthawi imodzi.Chifukwa chake, pakadali pano, tikhoza kungosintha malinga ndi kafukufuku ndi chitukuko ndi kupanga zida zotulutsa kuwala za semiconductor pazigawo zosiyanasiyana kudzera mu kusintha kwa ukadaulo wakukula kwa epitaxial ndikusintha ukadaulo wopangira zida. Pali zinthu zambiri zogwiritsira ntchito pansi pa gallium nitride, koma pali zinthu ziwiri zokha zomwe zingagwiritsidwe ntchito popanga, zomwe ndi safiro Al2O3 ndi silicon carbide.Ma substrates a SiC.
Nthawi yotumizira: Feb-28-2022