Ibikoresho bya SiC substrates by'ikura rya LED epitaxial wafer, SiC Coated Graphite Carriers

Ibice bya grafiti bifite isuku nyinshi ni ingenzi cyane kugira ngoIbikorwa mu nganda za semiconductor, LED n'izuba. Dutanga ibikoresho bitandukanye kuva ku bikoresho bya grafiti byo mu turere dushyuha duhingwamo kristu (ibishyushya, ibikoresho byo gutwika, insulation), kugeza ku bikoresho bya grafiti bifite ubuhanga bwo gutunganya wafer, nka silicon carbide coated graphite susceptors kuri Epitaxy cyangwa MOCVD. Aha niho grafiti yacu yihariye igaragara: grafiti isostatic ni ingenzi mu gukora ibice bya semiconductor. Ibi bikorwa mu "gace gashyuha" mu bushyuhe bukabije mu gihe cy'icyo bita epitaxy, cyangwa MOCVD. Imodoka izenguruka aho wafers zitwikiriwe muri reactor, igizwe na silicon carbide isostatic graphite. Iyi grafiti isukuye cyane, ihuye niyo yujuje ibisabwa byinshi mu gikorwa cyo gutwikira.

TIhame ry'ibanze ry'ikura rya wafer ya LED epitaxial ni: ku gice cy'ubutaka (cyane cyane safiro, SiC na Si) gishyushye ku bushyuhe bukwiye, umwuka witwa InGaAlP ujyanwa ku buso bwacyo mu buryo bugenzurwa kugira ngo hakorwe firime imwe ya kristu. Muri iki gihe, ikoranabuhanga ryo gukura rya LED epitaxial wafer ahanini rikoresha uburyo bwo kubika umwuka w'icyuma kizira ibidukikije.
Ibikoresho bya LED epitaxial substrateni inkingi y'iterambere ry'ikoranabuhanga mu nganda z'amatara ya semiconductor. Ibikoresho bitandukanye bya substrate bikenera ikoranabuhanga ritandukanye ryo gukuraho wafer ya LED epitaxial, ikoranabuhanga ryo gutunganya chips n'ikoranabuhanga ryo gupakira ibikoresho. Ibikoresho bya substrate ni byo bigena inzira y'iterambere ry'ikoranabuhanga ry'amatara ya semiconductor.

Ibiranga uburyo ibikoresho bya LED epitaxial wafer substrate bitoranywa:

1. Ibikoresho bya epitaxial bifite imiterere isa cyangwa isa na kristu hamwe n'ubutaka, kudahuza neza kw'urukiramende, ubukana bwiza bw'ubutare n'ubucucike buke

2. Imiterere myiza y'aho ibintu bihurira, bituma ibikoresho bya epitaxial bihurira neza kandi bigafatana neza

3. Ifite ubushobozi bwo kudahinduka mu binyabutabire kandi ntibyoroshye kubora no kwangirika mu bushyuhe n'ikirere cy'imikurire ya epitaxial

4. Imikorere myiza y'ubushyuhe, harimo no gutwara neza ubushyuhe no kudahuza neza n'ubushyuhe

5. Uburyo bwiza bwo gutwara ibintu, bushobora gukorwa mu buryo bwo hejuru no hasi 6, imikorere myiza y'urumuri, kandi urumuri rutangwa n'igikoresho cyakozwe ntirwinjirwa cyane n'ubutaka

7. Imiterere myiza ya mekanike no koroshya gutunganya ibikoresho, harimo gukata, gusiga irangi no gukata

8. Igiciro gito.

9. Ingano nini. Muri rusange, umurambararo ntugomba kuba munsi ya santimetero 2.

10. Biroroshye kubona substrate ifite imiterere isanzwe (keretse niba hari ibindi bisabwa byihariye), kandi imiterere ya substrate isa n'umwobo w'ibikoresho bya epitaxial ntabwo byoroshye gukora umuyoboro udasanzwe wa eddy, ku buryo bigira ingaruka ku bwiza bwa epitaxial.

11. Bitewe n’uko bitagize ingaruka ku bwiza bwa epitaxial, ubushobozi bwo gukora substrate bugomba kuzuza ibisabwa mu gutunganya chip no gupakira nyuma uko bishoboka kose.

Biragoye cyane guhitamo substrate kuzuza ingingo cumi n'imwe zavuzwe haruguru icyarimweKubwibyo, ubu, dushobora gusa guhuza ubushakashatsi n'iterambere n'ikorwa ry'ibikoresho bitanga urumuri bya semiconductor ku bikoresho bitandukanye binyuze mu guhindura ikoranabuhanga ryo gukura kwa epitaxial no guhindura ikoranabuhanga ryo gutunganya ibikoresho. Hari ibikoresho byinshi bya substrate byo gukora ubushakashatsi kuri gallium nitride, ariko hari substrate ebyiri gusa zishobora gukoreshwa mu gukora, ari zo safiro Al2O3 na silikoni carbideIbice bya SiC.