hita mai rufi na silicon carbide

Takaitaccen Bayani:

A matsayinta na ƙwararriyar mai kera murfin silicon carbide da kuma mai samar da shi a China, ana amfani da murfin silicon carbide na Vet-China sosai a kan muhimman sassan kayan aikin kera semiconductor, musamman idan aka haɗa da hanyoyin CVD da PECVD. Vet-China ta ƙware a fannin kera da samar da murfin silicon carbide mai inganci, kuma ta himmatu wajen samar da fasahar zamani da mafita ga masana'antar semiconductor. Barka da zuwa tambayoyinku.


Cikakken Bayani game da Samfurin

Alamun Samfura

Tsohon soja-ChinaYumbu mai siffar silicon CarbideRufin kariya ne mai ƙarfi wanda aka yi shi da tauri da juriya ga lalacewasilicon carbide (SiC)abu, wanda ke ba da kyakkyawan juriya ga lalata sinadarai da kwanciyar hankali mai zafi. Waɗannan halaye suna da mahimmanci a samar da semiconductor, don hakaRufin Yumbu na Silicon CarbideAna amfani da shi sosai a cikin mahimman kayan aikin masana'antar semiconductor.

Takamaiman rawar da Vet-China ke takawaYumbu mai siffar silicon CarbideRufin da aka yi a cikin samar da semiconductor shine kamar haka:

Inganta karko na kayan aiki:Rufin Ceramic na Silicon Carbide Rufin Ceramic na Silicon Carbide yana ba da kyakkyawan kariya ga kayan aikin kera semiconductor tare da tsananin tauri da juriyar lalacewa. Musamman a cikin yanayin aiki mai zafi da kuma mai yawan lalata, kamar adana tururin sinadarai (CVD) da kuma etching na plasma, rufin zai iya hana saman kayan aikin lalacewa ta hanyar lalata sinadarai ko lalacewar jiki, ta haka yana tsawaita rayuwar kayan aikin sosai da kuma rage lokacin aiki da ake kashewa sakamakon maye gurbin da gyara akai-akai.

Inganta tsarkin tsari:A cikin tsarin kera semiconductor, ƙaramin gurɓatawa na iya haifar da lahani ga samfura. Rashin daidaiton sinadarai na Silicon Carbide Ceramic Coating yana ba shi damar kasancewa cikin kwanciyar hankali a cikin mawuyacin yanayi, yana hana kayan sakin barbashi ko ƙazanta, ta haka yana tabbatar da tsarkin muhalli na tsarin. Wannan yana da mahimmanci musamman ga matakan ƙera waɗanda ke buƙatar babban daidaito da tsafta, kamar PECVD da dasa ion.

Inganta tsarin kula da zafi:A cikin sarrafa semiconductor mai yawan zafin jiki, kamar sarrafa zafi mai sauri (RTP) da hanyoyin oxidation, babban ƙarfin wutar lantarki na Silicon Carbide Ceramic Coating yana ba da damar rarraba yanayin zafi iri ɗaya a cikin kayan aiki. Wannan yana taimakawa rage damuwa da nakasar kayan da canjin yanayin zafi ke haifarwa, ta haka ne inganta daidaito da daidaiton masana'antar samfura.

Goyi bayan yanayin tsari mai rikitarwa:A cikin hanyoyin da ke buƙatar sarrafa yanayi mai rikitarwa, kamar su etching ICP da PSS etching, kwanciyar hankali da juriya ga iskar shaka na Silicon Carbide Ceramic Coating suna tabbatar da cewa kayan aikin suna da ingantaccen aiki a cikin dogon lokaci, suna rage haɗarin lalata kayan aiki ko lalacewar kayan aiki saboda canje-canjen muhalli.

shafi na yumbu na silicon carbide
Na'urar hita ta graphite (4)

CVD SiC薄膜基本物理性能

Abubuwan asali na zahiri na CVD SiCshafi

性质 / Kadara

典型数值 / Darajar da Aka Saba

晶体结构 / Tsarin Crystal

Matakin FCC β多晶,主要为(111) 取向

密度 / Yawan yawa

3.21 g/cm³

硬度 / Tauri

2500 维氏硬度 (500g kaya)

晶粒大小 / Size na hatsi

2 ~ 10μm

纯度 / Tsarkakewar Sinadarai

99.99995%

热容 / Ƙarfin Zafi

640 J·kg-1·K-1

升华温度 / Zafin Sublimation

2700℃

抗弯强度 / Ƙarfin Lankwasawa

415 MPa RT maki 4

杨氏模量 / Matashin Young

430 GPA lanƙwasa 4pt, 1300℃

导热系数 / ThermalGudanar da wutar lantarki

300W·m-1·K-1

热膨胀系数 / Faɗaɗawar Zafi (CTE)

4.5×10-6K-1

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