hita yesimbi yesimbi yesilicon carbide

Tsananguro pfupi:

Semugadziri weSilicon Carbide Ceramic Coating ane hunyanzvi uye mutengesi muChina, Vet-China's Silicon Carbide Ceramic Coating inoshandiswa zvakanyanya pazvikamu zvakakosha zvemidziyo yekugadzira semiconductor, kunyanya kana paine maitiro eCVD nePECVD. Vet-China inonyanya kugadzira nekupa Silicon Carbide Ceramic Coating inoshanda zvakanyanya, uye yakazvipira kupa tekinoroji yepamusoro uye mhinduro dzezvigadzirwa kuindasitiri ye semiconductor. Tinokugamuchirai mibvunzo yenyu.


Ruzivo rweChigadzirwa

Matagi eChigadzirwa

Chiremba wemhuka-ChinaSilicon Carbide CeramicKuputira ipurasitiki inodzivirira inoshanda zvakanyanya yakagadzirwa nesimbi yakaoma uye inodzivirira kupera simbakabhidhi yesilicon (SiC)zvinhu, izvo zvinopa simba rakanaka rekudzivirira ngura yemakemikari uye kugadzikana pakupisa kwakanyanya. Hunhu uhwu hwakakosha mukugadzirwa kwezvikamu zve semiconductor, sakaSilicon Carbide Ceramic unhaniinoshandiswa zvakanyanya muzvikamu zvakakosha zvemichina yekugadzira semiconductor.

Basa chairo reVet-ChinaSilicon Carbide CeramicKuputira mukugadzirwa kwe semiconductor ndekwekuti:

Wedzera kugara kwenguva refu kwemidziyo:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating inopa dziviriro yakanaka pamusoro pemidziyo yekugadzira semiconductor nekuoma kwayo kwakanyanya uye kuramba kupfeka. Kunyanya munzvimbo dzinopisa zvakanyanya uye dzinopisa zvakanyanya, dzakadai se chemical vapor deposition (CVD) uye plasma etching, coating iyi inogona kudzivirira zvinobudirira pamusoro pemidziyo kuti isakuvadzwe nekukukurwa kwemakemikari kana kupfeka kwemuviri, nokudaro ichiwedzera hupenyu hwekushanda kwemidziyo uye ichideredza nguva yekushanda inokonzerwa nekutsiviwa nekugadzirisa nguva nenguva.

Kuvandudza kuchena kwemaitiro:Mukugadzirwa kwema semiconductor, kusvibiswa kudiki kunogona kukonzera zvikanganiso zvechigadzirwa. Kusashanda kwemakemikari kweSilicon Carbide Ceramic Coating kunoita kuti chirambe chakasimba mumamiriro ezvinhu akaoma, zvichidzivirira zvinhu kuti zvisaburitse zvidimbu kana tsvina, nokudaro zvichiita kuti zvakatipoteredza zvive zvakachena. Izvi zvakakosha zvikuru pamatanho ekugadzira anoda kunyatsojeka uye kuchena kwakanyanya, senge PECVD uye ion implantation.

Gadzirisa manejimendi yekupisa:Mukugadzirisa semiconductor inodziya zvakanyanya, senge kukurumidza kupisa (RTP) uye maitiro e oxidation, kufambisa kupisa kwakanyanya kweSilicon Carbide Ceramic Coating kunogonesa kugoverwa kwekupisa kwakafanana mukati memidziyo. Izvi zvinobatsira kuderedza kushushikana kwekupisa uye kushanduka kwezvinhu kunokonzerwa nekuchinja kwekupisa, nokudaro zvichivandudza kururama kwekugadzirwa kwechigadzirwa uye kugara kwenguva refu.

Tsigira mamiriro ezvinhu akaomarara:Mumaitiro anoda kudzora mamiriro ekunze akaomarara, akadai seICP etching uye PSS etching processes, kugadzikana uye kuramba kweSilicon Carbide Ceramic Coating kunoita kuti michina irambe ichishanda zvakanaka kwenguva refu, zvichideredza njodzi yekuora kwezvinhu kana kukuvara kwemidziyo nekuda kwekuchinja kwezvakatipoteredza.

silicon carbide ceramic coating
Girafu yegirafu (4)

CVD SiC薄膜基本物理性能

Hunhu hweCVD SiCkuputira

性质 / Pfuma

典型数值 / Kukosha Kwakajairika

晶体结构 / Chimiro cheKristaro

Chikamu cheFCC β多晶,主要為(111)取向

密度 / Kuwanda kwehuwandu

3.21 g/cm³

硬度 / Kuomarara

2500 维氏硬度 (500g mutoro)

晶粒大小 / Saizi yeZviyo

2 ~ 10μm

纯度 / Kuchena kwemakemikari

99.99995%

热容 / Kugona Kupisa

640 J·kg-1·K-1

升华温度 / Kupisa kweSublimation

2700℃

抗弯强度 / Simba reKuchinjika

415 MPa RT ine mapoinzi mana

杨氏模量 / Modulus yeVadiki

430 Gpa 4pt bend, 1300℃

导热系数 / ThermalKufambisa kwemhepo

300W·m-1·K-1

热膨胀系数 / Kuwedzera kweThermal (CTE)

4.5×10-6K-1

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