silicon carbide ceramic coating heater

Tlhaloso e Khutšoanyane:

Joaloka moetsi le mofani oa thepa oa Silicon Carbide Ceramic Coating naheng ea China, Vet-China's Silicon Carbide Ceramic Coating e sebelisoa haholo likarolong tsa bohlokoa tsa lisebelisoa tsa tlhahiso ea semiconductor, haholo-holo ha mekhoa ea CVD le PECVD e ameha. Vet-China e sebetsa ka ho khetheha ho hlahiseng le ho fana ka thepa e phahameng ea Silicon Carbide Ceramic Coating, 'me e ikemiselitse ho fana ka tharollo ea theknoloji e tsoetseng pele le lihlahisoa bakeng sa indasteri ea semiconductor. Amohela lipotso tsa hau.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Vet-ChaenaSilicon Carbide CeramicCoating ke tšireletso e phahameng ea ts'ireletso e entsoeng ka thata ka ho fetisisa le e sa senyehengsilicon carbide (SiC)lintho tse bonahalang, tse fanang ka lik'hemik'hale tse ntle haholo tse thibelang kutu le botsitso ba mocheso o phahameng. Litšobotsi tsena ke tsa bohlokoa tlhahisong ea semiconductor, ka honaSilicon Carbide Ceramic Coatinge sebelisoa haholo likarolong tsa bohlokoa tsa lisebelisoa tsa tlhahiso ea semiconductor.

Karolo e ikhethileng ea Vet-ChinaSilicon Carbide CeramicHo roala ka tlhahiso ea semiconductor ke ka tsela e latelang:

Ntlafatsa ho tšoarella ha lisebelisoa:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating e fana ka tšireletso e ntle ea holim'a metsi bakeng sa lisebelisoa tsa tlhahiso ea semiconductor ka boima ba eona bo phahameng ka ho fetesisa le khanyetso ea ho roala. Haholo-holo libakeng tse nang le mocheso o phahameng le o senyang haholo, joalo ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD) le plasma etching, ho roala ho ka thibela ka katleho holim'a thepa hore e se ke ea senyeha ke khoholeho ea lik'hemik'hale kapa ho apara 'mele, kahoo e lelefatsa bophelo ba lisebelisoa le ho fokotsa nako ea ho theoha e bakoang ke ho nkeloa sebaka khafetsa le ho lokisoa.

Ntlafatsa bohloeki ba ts'ebetso:Ts'ebetsong ea tlhahiso ea semiconductor, tšilafalo e nyane e ka baka bofokoli ba sehlahisoa. Lik'hemik'hale tsa lik'hemik'hale tsa Silicon Carbide Ceramic Coating li lumella hore li lule li tsitsitse tlas'a maemo a feteletseng, ho thibela thepa hore e se ke ea ntša likaroloana kapa litšila, kahoo e netefatsa bohloeki ba tikoloho ea ts'ebetso. Sena ke sa bohlokoa ka ho khetheha bakeng sa mehato ea tlhahiso e hlokang ho nepahala ho phahameng le bohloeki bo phahameng, joalo ka PECVD le ho kenngoa ha ion.

Ntlafatsa taolo ea mocheso:Ts'ebetsong ea semiconductor e phahameng ea mocheso, joalo ka ts'ebetso e potlakileng ea mocheso (RTP) le lits'ebetso tsa oxidation, conductivity e phahameng ea mocheso oa Silicon Carbide Ceramic Coating e nolofalletsa ho ajoa ha mocheso o tšoanang ka har'a lisebelisoa. Sena se thusa ho fokotsa khatello ea mocheso le deformation ea thepa e bakoang ke ho fetoha ha mocheso, ka tsela eo ho ntlafatsa ho nepahala ha tlhahiso ea lihlahisoa le ho tsitsisa.

Ts'ehetsa maemo a rarahaneng a ts'ebetso:Lits'ebetsong tse hlokang taolo e rarahaneng ea sepakapaka, joalo ka ICP etching le PSS etching process, botsitso le khanyetso ea oxidation ea Silicon Carbide Ceramic Coating e netefatsa hore lisebelisoa li boloka ts'ebetso e tsitsitseng ts'ebetsong ea nako e telele, ho fokotsa kotsi ea ho senyeha ha thepa kapa ho senyeha ha lisebelisoa ka lebaka la liphetoho tsa tikoloho.

sekoaelo sa silicon carbide ceramic
Mofuthu oa graphite (4)

CVD SiC薄膜基本物理性能

Lintho tsa motheo tsa 'mele tsa CVD SiCho roala

性质 / Thepa

典型数值 / Boleng bo Tlwaelehileng

晶体结构 / Sebopeho sa Crystal

FCC mohato oa β多晶,主要為(111)取向

密度 / Ho teteana

3.21 g/cm³

硬度 / Ho thatafala

2500 维氏硬度 (500g mojaro)

晶粒大小 / Mabele SiZe

2 ~ 10μm

纯度 / Bohloeki ba lik'hemik'hale

99.99995%

热容 / Bokhoni ba mocheso

640 J·kg-1·K-1

升华温度 / Sublimation Mocheso

2700 ℃

抗弯强度 / Flexural Matla

415 MPa RT 4-ntlha

杨氏模量 / Young's Modulus

430 Gpa 4pt kobeha, 1300 ℃

导热系数 / ThermalBoikhantšo

300Wm-1·K-1

热膨胀系数 / Katoloso ea Mocheso(CTE)

4.5×10-6K-1

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