Ngaka ea liphoofolo-ChinaSilicone Carbide CeramicHo koahela ke sekoahelo se sireletsang se sebetsang hantle se entsoeng ka lesela le thata haholo le le sa senyehengkhabide ea silicon (SiC)thepa, e fanang ka khanyetso e ntle ea ho bola ha lik'hemik'hale le botsitso ba mocheso o phahameng. Litšobotsi tsena li bohlokoa tlhahisong ea semiconductor, kahooSekoahelo sa Ceramic sa Silicon Carbidee sebelisoa haholo likarolong tsa bohlokoa tsa lisebelisoa tsa tlhahiso ea semiconductor.
Karolo e ikhethang ea Vet-ChinaSilicone Carbide CeramicHo koahela tlhahiso ea semiconductor ke ka tsela e latelang:
Ntlafatsa ho tšoarella ha lisebelisoa:Sekoahelo sa Silicon Carbide Ceramic Sekoahelo sa Silicon Carbide Ceramic se fana ka tšireletso e ntle ea bokaholimo bakeng sa lisebelisoa tsa tlhahiso ea semiconductor ka thata ea tsona e phahameng haholo le ho hanyetsa ho tsofala. Haholo-holo libakeng tsa ts'ebetso tse nang le mocheso o phahameng le tse senyang haholo, joalo ka chemical vapor deposition (CVD) le plasma etching, sekoahelo se ka thibela bokaholimo ba lisebelisoa hore bo se ke ba senyeha ke khoholeho ea lik'hemik'hale kapa ho tsofala ha 'mele, ka hona se eketsa bophelo ba ts'ebeletso ea lisebelisoa haholo le ho fokotsa nako ea ho se sebetse e bakoang ke ho nkeloa sebaka le ho lokisoa khafetsa.
Ntlafatsa bohloeki ba ts'ebetso:Ts'ebetsong ea tlhahiso ea semiconductor, tšilafalo e nyane e ka baka liphoso tsa sehlahisoa. Ho se sebetse hantle ha lik'hemik'hale tsa Silicon Carbide Ceramic Coating ho e lumella ho lula e tsitsitse tlas'a maemo a feteletseng, ho thibela thepa ho lokolla likaroloana kapa litšila, ka hona ho netefatsa bohloeki ba tikoloho ba ts'ebetso. Sena se bohlokoa haholo bakeng sa mehato ea tlhahiso e hlokang ho nepahala ho hoholo le bohloeki bo phahameng, joalo ka PECVD le ho kenngoa ha ion.
Ntlafatsa taolo ea mocheso:Tshebetsong ea semiconductor ea mocheso o phahameng, joalo ka ts'ebetso ea ho futhumatsa ka potlako (RTP) le lits'ebetso tsa oxidation, conductivity e phahameng ea mocheso oa Silicon Carbide Ceramic Coating e nolofalletsa kabo ea mocheso o ts'oanang ka har'a lisebelisoa. Sena se thusa ho fokotsa khatello ea mocheso le phetoho ea thepa e bakoang ke ho feto-fetoha ha mocheso, ka hona ho ntlafatsa ho nepahala le botsitso ba tlhahiso ea lihlahisoa.
Tšehetsa tikoloho e rarahaneng ea ts'ebetso:Lits'ebetsong tse hlokang taolo e rarahaneng ea sepakapaka, joalo ka lits'ebetso tsa ho qoela ka ICP le ho qoela ka PSS, botsitso le khanyetso ea oxidation ea Silicon Carbide Ceramic Coating li netefatsa hore lisebelisoa li boloka ts'ebetso e tsitsitseng ts'ebetsong ea nako e telele, e fokotsang kotsi ea ho senyeha ha thepa kapa tšenyo ea lisebelisoa ka lebaka la liphetoho tsa tikoloho.
| CVD SiC薄膜基本物理性能 Thepa ea motheo ea 'mele ea CVD SiCsekoahelo | |
| 性质 / Thepa | 典型数值 / Boleng bo Tloaelehileng |
| 晶体结构 / Sebopeho sa kristale | Mokhahlelo oa FCC β多晶,主要為(111)取向 |
| 密度 / Botenya | 3.21 g/cm³ |
| 硬度 / Bothata | 2500 维氏硬度 (moroalo oa 500g) |
| 晶粒大小 / Sekala sa Lithollo | 2 ~ 10μm |
| 纯度 / Bohloeki ba Lik'hemik'hale | 99.99995% |
| 热容 / Bokgoni ba Mocheso | 640 J·kg-1·K-1 |
| 升华温度 / Mocheso oa Sublimation | 2700℃ |
| 抗弯强度 / Matla a ho Kobeha | 415 MPa RT lintlha tse 4 |
| 杨氏模量 / Modulus ea Bacha | 430 Gpa kobeho ea 4pt, 1300℃ |
| 导热系数 / ThermalHo khanna motlakase | 300W·m-1·K-1 |
| 热膨胀系数 / Katoloso ea Thermal (CTE) | 4.5×10-6K-1 |
Re u amohela ka mofuthu ho etela fektheri ea rona, ha re buisaneng ka ho eketsehileng!
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