kululeeyaha dahaadhka dhoobada ee silikoon carbide

Sharaxaad Gaaban:

Iyada oo ah soo saaraha iyo alaab-qeybiyaha dahaadhka dhoobada Silicon Carbide ee xirfadlaha ah ee Shiinaha, dahaadhka dhoobada Silicon Carbide ee Vet-China ayaa si weyn loogu isticmaalaa qaybaha muhiimka ah ee qalabka wax soo saarka semiconductor-ka, gaar ahaan marka hababka CVD iyo PECVD ay ku lug leeyihiin. Vet-China waxay ku takhasustay soo saarista iyo bixinta dahaadhka dhoobada Silicon Carbide ee waxqabadka sare leh, waxayna ka go'an tahay inay bixiso tignoolajiyad horumarsan iyo xalal wax soo saar oo loogu talagalay warshadaha semiconductor-ka. Soo dhawoow su'aalahaaga.


Faahfaahinta Badeecada

Calaamadaha Alaabta

Vet-ChinaDhoobada Silikoon CarbideDahaarku waa dahaar ilaalin oo waxqabad sare leh oo laga sameeyay aad u adag oo u adkaysta xirashadasilikoon carbide (SiC)agab, kaas oo bixiya iska caabin kiimiko oo heer sare ah iyo xasillooni heerkul sare leh. Astaamahani waa muhiim wax soo saarka semiconductor-ka, sidaa darteedDahaarka Dhoobada ee Silicon Carbidewaxaa si weyn loogu isticmaalaa qaybaha muhiimka ah ee qalabka wax soo saarka semiconductor-ka.

Doorka gaarka ah ee Vet-ChinaDhoobada Silikoon CarbideDahaarka wax soo saarka semiconductor waa sida soo socota:

Kobcinta adkeysiga qalabka:Dahaarka Dhoobada ee Silicon Carbide Dahaarka Dhoobada ee Silicon Carbide wuxuu bixiyaa ilaalin dusha sare oo aad u fiican qalabka wax soo saarka semiconductor-ka iyadoo leh adkeysi aad u sarreeya iyo iska caabin xirasho. Gaar ahaan deegaannada habka heerkulka sare iyo kuwa aadka u daxalka badan, sida kaydinta uumiga kiimikada (CVD) iyo xoqidda balaasmaha, dahaarka ayaa si wax ku ool ah uga hortagi kara dusha sare ee qalabka inuu waxyeello u geysto nabaad-guurka kiimikada ama xirashada jirka, taasoo si weyn u kordhinaysa cimriga adeegga qalabka iyo yareynta waqtiga shaqada oo ay keento beddelka iyo dayactirka joogtada ah.

Hagaaji daahirnimada habka:Habka wax soo saarka semiconductor-ka, wasakhowga yar wuxuu sababi karaa cillado alaabeed. Dahaarka kiimikada ee Silicon Carbide Ceramic Coating wuxuu u oggolaanayaa inuu xasilloonaado xaaladaha daran, isagoo ka hortagaya in walaxdu ay sii deyso walxaha ama wasakhda, taasoo hubinaysa daahirnimada deegaanka ee habka. Tani waxay si gaar ah muhiim ugu tahay tallaabooyinka soo saarista ee u baahan saxnaan sare iyo nadiifin sare, sida PECVD iyo ion-ka lagu beero.

Hagaaji maaraynta kulaylka:Habaynta semiconductor-ka heerkulka sare leh, sida habaynta kulaylka degdega ah (RTP) iyo hababka oksaydhka, habaynta kulaylka sare ee Silicon Carbide Ceramic Coating waxay suurtogal ka dhigaysaa qaybinta heerkulka isku midka ah gudaha qalabka. Tani waxay ka caawisaa yaraynta cadaadiska kulaylka iyo isbeddelka walxaha ee ay keento isbeddelka heerkulka, taasoo hagaajinaysa saxnaanta wax soo saarka iyo joogtaynta.

Taageero jawi hab-raac oo adag:Hawsha u baahan xakamaynta jawiga ee adag, sida hababka ICP etching iyo PSS etching, xasilloonida iyo iska caabbinta oksaydhka ee Silicon Carbide Ceramic Coating waxay hubisaa in qalabku uu ilaaliyo waxqabad deggan hawlgalka muddada dheer, taasoo yaraynaysa khatarta burburka walxaha ama dhaawaca qalabka oo ay ugu wacan tahay isbeddellada deegaanka.

daahan dhoobada ah ee silikoon carbide
Kuleyliyaha garaafka (4)

CVD SiC薄膜基本物理性能

Sifooyinka aasaasiga ah ee jireed ee CVD SiCdahaarka

性质 / Hantida

典型数值 / Qiimaha Caadiga ah

晶体结构 / Qaab-dhismeedka Crystal

Marxaladda FCC β多晶,主要为(111) 取向

密度 / Cufnaanta

3.21 g/cm³

硬度 / Adkaanta

2500 维氏硬度(500g oo culeys ah

晶粒大小 / Xaddiga Badarka

2 ~ 10μm

纯度 / Nadiifinta Kiimikada

99.99995%

热容 / Awoodda Kulaylka

640 J·kg-1·K-1

升华温度 / Heerkulka Sublimation

2700℃

抗弯强度 / Xoogga Laablaabashada

415 MPa RT 4-dhibcood

杨氏模量 / Modulus-ka Young

430 GPA 4pt laab, 1300℃

导热系数 / ThermalGudbinta

300W·m-1·K-1

热膨胀系数 / Ballaarinta Kulaylka (CTE)

4.5 × 10-6K-1

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