silicon carbide ceramic txheej cua sov

Kws Kho Mob-Tuam TshojSilicon Carbide Tej HubCoating yog ib qho txheej tiv thaiv kev ua tau zoo heev uas ua los ntawm cov khoom siv tawv heev thiab tiv taus kev hnavsilicon carbide (SiC)cov khoom siv, uas muab kev tiv thaiv xeb zoo heev thiab kev ruaj khov kub. Cov yam ntxwv no tseem ceeb heev hauv kev tsim khoom semiconductor, yog liSilicon Carbide Ceramic Txheejyog siv dav hauv cov khoom tseem ceeb ntawm cov khoom siv semiconductor.

Lub luag haujlwm tshwj xeeb ntawm Vet-Tuam TshojSilicon Carbide Tej HubKev txheej txheem hauv kev tsim khoom semiconductor yog raws li nram no:

Txhim kho cov khoom siv kom ruaj khov:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating muab kev tiv thaiv zoo heev rau cov khoom siv semiconductor nrog nws qhov nyuaj heev thiab hnav tsis kam. Tshwj xeeb tshaj yog nyob rau hauv qhov kub thiab txias heev thiab corrosive ib puag ncig, xws li tshuaj vapor deposition (CVD) thiab plasma etching, lub txheej txheej tuaj yeem tiv thaiv qhov chaw ntawm cov khoom siv los ntawm kev puas tsuaj los ntawm tshuaj lom neeg lossis kev hnav lub cev, yog li ua rau lub neej ua haujlwm ntawm cov khoom siv ntev dua thiab txo lub sijhawm tsis ua haujlwm los ntawm kev hloov pauv thiab kho ntau zaus.

Txhim kho cov txheej txheem purity:Hauv cov txheej txheem tsim khoom semiconductor, kev ua qias me me yuav ua rau cov khoom tsis zoo. Kev tsis muaj tshuaj lom neeg ntawm Silicon Carbide Ceramic Coating tso cai rau nws kom ruaj khov nyob rau hauv cov xwm txheej hnyav, tiv thaiv cov khoom los ntawm kev tso tawm cov khoom me me lossis cov khoom tsis huv, yog li ua kom muaj kev huv si ntawm cov txheej txheem. Qhov no yog qhov tseem ceeb tshwj xeeb rau cov kauj ruam tsim khoom uas xav tau kev ua haujlwm siab thiab kev huv si, xws li PECVD thiab ion implantation.

Txhim kho kev tswj hwm thermal:Hauv kev ua cov khoom siv semiconductor kub siab, xws li kev ua cov khoom siv thermal sai (RTP) thiab cov txheej txheem oxidation, qhov thermal conductivity siab ntawm Silicon Carbide Ceramic Coating ua rau muaj kev faib tawm kub sib npaug hauv cov khoom siv. Qhov no pab txo qhov kev ntxhov siab thermal thiab cov khoom siv deformation los ntawm kev hloov pauv kub, yog li txhim kho qhov tseeb thiab kev sib xws ntawm cov khoom tsim khoom.

Txhawb nqa cov txheej txheem nyuaj:Hauv cov txheej txheem uas xav tau kev tswj hwm huab cua nyuaj, xws li ICP etching thiab PSS etching cov txheej txheem, qhov ruaj khov thiab oxidation tsis kam ntawm Silicon Carbide Ceramic Coating ua kom ntseeg tau tias cov khoom siv tswj hwm kev ua haujlwm ruaj khov hauv kev ua haujlwm ntev, txo qhov kev pheej hmoo ntawm kev puas tsuaj ntawm cov khoom siv lossis kev puas tsuaj ntawm cov khoom siv vim muaj kev hloov pauv ib puag ncig.